アルバック／ULVAC, Inc. List of Products and Services

The leak detector HELIOT ZERO is a leak detector specially designed for automatic helium leak testing systems. The analysis unit and operation unit can be separated by up to 30 meters, and the analysis unit can be mounted in various orientations. It contributes to space-saving through miniaturization. 【Specifications】 ○ Analysis tube: 90-degree deflection type mass spectrometer ○ Detectable gas type: Helium ○ Vacuum method detection range: E-12 to E-3 Pa·m³/s ○ Sniffer method detection range: E-8 to E-3 Pa·m³/s, 0.1 to 1000 ppm ○ Connection port shape: Test port / Foreline port NW16 / NW16 For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments
• Leak Testing Equipment

This is ULVAC's new residual gas analyzer, realized with revolutionary simplicity and ease of use. It marks the arrival of a new standard in process monitoring, shaped by the voices of equipment technology professionals from various production lines. It is ideal for managing vacuum deposition systems and various vacuum furnaces. 【Features】 - Integrated display design... Measurement possible without a computer - Easy operation - One Click function... Simple for anyone. No complex operations required - Enhanced leak test functionality - Capable of total pressure measurement - Qulee QCS software is standard For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments
• Analytical Equipment and Devices

The Qulee CGM series is a new type of residual gas analyzer/process gas monitor from ULVAC that achieves high precision and high resolution under high pressure (below 1 Pa) with revolutionary simplicity and ease of use. It represents the new standard for process monitors shaped by the voices of equipment technology professionals in various production lines. It is ideal for process management in sputtering equipment (improving quality and yield). 【Specifications】 ○ Mass separation method: Quadrupole mass spectrometer ○ Mass range: 1 to 50 amu ○ Resolution: M/ΔM = 1M (10% P.H.) ○ Maximum operating pressure: 2 Pa (FC) 1×10⁻² Pa (SEM) ○ Linearity: 1 Pa For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments
• Analytical Equipment and Devices

Introducing the high-end model of ULVAC's new residual gas analyzer Qulee series, the "Qulee HGM," which achieves revolutionary simplicity and ease of use. It realizes a high sensitivity of 2.5 × 10-6A/Pa (Faraday cup), catering to all needs from various research and development applications to process management in vacuum equipment. 【Specifications】 ○ Power supply voltage: DC24V ±10% 50W ○ Weight (sensor unit/analysis tube): 2.4kg/0.81kg ○ Operating temperature range: 10 to 40℃ ○ Operating humidity range: 15 to 80% (no condensation) ○ IP protection rating: IP30 (sensor unit) For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments
• Analytical Equipment and Devices

"Qulee QCS" is software compatible with ULVAC's residual gas analyzers/process gas monitors. This software is compatible with most gas analyzers manufactured by ULVAC, allowing anyone to perform measurements and save data with simple click operations. 【Features】 ○ Standard software for Qulee → Standardly adopted across the entire Qulee series (compatible with Windows XP/7) ○ Easy operation → Simple operation with a comprehensive set of shortcut buttons ○ Rich measurement modes → Includes scan mode, trend mode, analog mode, sensitivity calibration mode, etc. ○ Enhanced leak test functionality → Easy leak checks possible with helium leak test mode ○ Gas composition name display available → Gas composition names can be displayed in scan mode For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

The G-TRAN series atmospheric pressure Pirani vacuum gauge SW1 is a Pirani vacuum gauge capable of measuring a wide range from atmospheric pressure to 5 × 10^-2 Pa. Furthermore, this vacuum gauge has removed the operation and display unit from the conventional controller (sensor unit), streamlining it to the minimum necessary functions, enabling "cost reduction" and "space-saving." 【Product Lineup】 ○SW1-1/SWP-16 ○SW1-2/SWP-R1/8 For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

This is a reverse magnetron type cold cathode gauge from the G-TRAN series. Since it does not use a filament, there is no concern about sensor wear or damage. Additionally, its structure is designed for easy maintenance, allowing for reduced running costs. 【Features】 ○ Transducer specification → If a pressure display is not required, it reduces costs associated with vacuum gauges in the display configuration, saves space around the control panel, and simplifies wiring. ○ Maintenance → The measuring element can be easily maintained by the customer. ○ Filament-free → Since it does not use a filament, regeneration is possible. ○ Control output signal → Capable of outputting two set points. ○ Measurement value output signal → Pressure output is 0 to 10V (non-linear output). For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

This display is a 1-channel display compatible with the entire G-TRAN series and the CCM series. By connecting it to a measurement unit, pressure readings, pressure contact settings, and various operations can be easily performed, and the operational status can be understood at a glance. Control and measurement via remote operation are possible through the display unit. 【Features】 ○ 0-10V linear output ○ Setpoint output (3 points) ○ Input voltage is DC24V ○ Display section features easy-to-read LED ○ Compliant with CE standards For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

The 4-channel display unit can connect up to 4 measurement units, allowing simultaneous measurement and display. It comes standard with 8-point setpoint output and I/O communication control functions. With the linkage function between the atmospheric pressure Pirani gauge or the Pirani gauge and the ion gauge, it enables easy measurement of a wide range of pressures. 【Features】 ○ Adopts 96mm DIN size ○ Input voltage can be selected from DC24V or AC100V ○ Capable of connecting up to 4 measurement units ○ Simultaneous measurement and output for each sensor (CH1-4) ○ Linked measurement possible between IG (CH1) and PG (CH2) For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

The CCMT-D series is a capacitance manometer that detects pressure changes through the deformation of a diaphragm made of ceramic (alumina) in response to gas pressure variations, with the corresponding change in capacitance. The sensor part has an integrated structure made of ceramic, providing excellent reproducibility and stability, allowing for accurate measurement of pressure in low to medium vacuum ranges regardless of the type of gas (absolute pressure gauge). 【Features】 ○ Long-term stability ○ Excellent corrosion resistance due to the use of a ceramic membrane ○ Built-in temperature compensation circuit ○ Newly adopted structure to protect the sensor from dirt ○ Zero point adjustment possible with a push button For more details, please contact us or download the catalog.

• Other measurement, recording and measuring instruments

■ It is possible to significantly reduce the power consumption of dry pumps. This is particularly effective for multi-stage roots pumps. For other types of pumps, please inquire. ■ There is no decrease in exhaust speed across the entire pressure range. ■ Installation is easy.

• Vacuum pump

The VD series is a motor-directly coupled oil rotary vacuum pump developed as a "low-noise type pump." It can be used for a wide range of exhaust applications, from deposition and sputtering equipment to vacuum packaging machines, serving as the core pump for creating vacuum. There is a strong demand for "quietness" in vacuum pumps to improve the working environment. The VD series is a low-noise motor-directly coupled oil rotary vacuum pump developed in response to such requests. Additionally, it is designed with maintenance in mind, making routine maintenance and inspections very easy. It can be used in a wide range of applications, from laboratories that require quietness to various production lines. 【Features】 ○ Low noise ○ Excellent maintainability ○ Stable exhaust even at high pressures near atmospheric pressure For more details, please contact us or download the catalog.

• Other pumps
• Vacuum pump

The VS series is a motor-direct oil rotary vacuum pump that achieves simplification and high speed through the adoption of a single-stage vane type (rotor type), resulting in a compact, lightweight, and low-vibration design. By significantly reducing vibrations, it alleviates the burden associated with pump installation, such as foundation work in factory buildings. Additionally, the enhancement of the oil circulation and cooling systems ensures stable exhaust performance at high intake pressures, making it suitable for a wide range of applications, including processes with frequent exhaust cycles. 【Features】 ○ Low vibration and low noise ○ Lightweight and compact ○ Excellent maintainability For more details, please contact us or download the catalog.

• Vacuum pump

By combining with dry pumps, oil-sealed rotary vacuum pumps, water-sealed pumps, etc., it is possible to increase the exhaust speed in the range of 10,000 to 0.1 Pa, where the exhaust speed of the roughing pump decreases. The PRC-A series, like the PMB-C(M), is designed primarily for use in semiconductor and liquid crystal manufacturing processes that require cleanliness both inside and outside the pump, as well as for general-purpose applications. The PMB-040C and PMB-060C are optimal for large capacity exhaust in thermal treatment furnaces, melting furnaces, and large film deposition equipment. 【Product Lineup】 ○PMB-001C, CM ○PMB-003C, CM ○PRC-003A ○PRC-006A ○PRC-012A For more details, please contact us or download the catalog.

• Vacuum pump