神津精機 List of Products and Services

By adopting a parallel link mechanism using a double wedge method in the conventional "RST aligner" drive unit, both lifting and tilting operations can be achieved with a single unit. 【Features】 ■ Maintains a low floor even with 6-axis drive. ■ High followability is achieved by arranging the drive units in a balanced equilateral triangle. ■ Equipped with high-rigidity cross roller guides for high load capacity specifications. (No issues with pressure during bonding) ■ Drive motors can be selected from various options, including servo motors, stepping motors, and AZ motors from different manufacturers. ■ The table is equipped with a large-diameter transparent hole. ■ By modularizing the drive components, the table size and shape can be freely designed, allowing us to propose a stage that perfectly meets your requirements. ■ DLL/sample code necessary for control is provided.

• Sputtering Equipment
• Semiconductor inspection/test equipment
• Photomask

In the manufacturing process, accurate positioning is crucial for improving the precision and quality of products. Among these, alignment stages require not only the precision demanded of standard positioning stages but also attributes such as followability and positional stability, which are very important. Therefore, it is necessary to select an appropriate stage according to the required precision and positioning time during alignment. At Kozu Seiki, we offer a variety of alignment stages tailored to different applications. We feature the "YRA Series," which employs a guide mechanism that balances high precision and high rigidity, and the "RSTA Series," which achieves high followability with a 0.1μm pitch by evenly distributing the drive units. [YRA Series] - Guide mechanism that balances high precision and high rigidity - Achieves a slim, lightweight, and compact design - Utilizes high-precision ground ball screws - Employs easy-to-control stepping motors Additionally, we have prepared a guidebook regarding alignment stages. We hope it will be a useful reference for your selection process. *For more details, please refer to the PDF materials or feel free to contact us.*

• Other machine elements

This is a feature on the Z stage of Kozu Seiki's precision positioning stages, which are active in various production sites such as semiconductor manufacturing equipment. We introduce the upright Z stage and three types of horizontal Z stages. Each stage includes information on table size and model type, as well as essential specifications for selecting a Z stage, such as stroke, overall height, and load capacity. Examples of performance values are also provided. Custom case studies are included as well. This material serves as a helpful resource for selection. Performance values for the Z stage are also available. *For more details, please refer to the PDF document or feel free to contact us.

• Other semiconductor manufacturing equipment

【RST Aligner】 - The most notable feature is the balanced triangular arrangement of the drive units, enabling ultra-high precision micro-movement essential for alignment. - Achieves high responsiveness of 0.1μm ± 20nm without feedback from linear scales, etc. - Allows for large-diameter through holes since it does not use bearings. - Table size can be freely adjusted to match wafer size or workpiece size. - Z mechanism can be added as required for applications such as bonding. - Customizable for high load capacity specifications, color changes, and other specifications. 【YRA Series】 - Achieves high precision and high rigidity while being compact and space-saving. - Integrated structure where each axis of the XYθ axes operates independently. - Four models are available to suit various applications: - YRA-070: The smallest alignment stage in the series. - YRA-071: Capable of accommodating various motor modification requests. - YRA-131: Suitable for bonding small to medium-sized LCDs and wafers. - YRA-200: The largest model in the series with high load capacity specifications.

• Semiconductor inspection/test equipment
• Other semiconductor manufacturing equipment
• Other image-related equipment

The "RA05A-T01" is a compact automatic rotating stage with a tangent bar design that contributes to space-saving for the entire mounted equipment due to its slim profile (22mm). It achieves high precision suitable for high-accuracy alignment and high resolution (0.002°) thanks to the tangent bar mechanism. Additionally, it features high durability due to the adoption of high-precision ball screws. 【Features】 ■ Contributes to space-saving for the entire mounted equipment due to its slim profile (22mm) ■ Excellent durability due to the use of high-precision ball screws ■ Achieves high resolution (0.002°) through the tangent bar mechanism ■ Realizes precision suitable for high-accuracy alignment *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

This document presents usage records for each semiconductor manufacturing process. We introduce positioning stages used in the pre-process and post-process leading to completion, starting with the high-load goniometer "wire saw" for ingot positioning. Additionally, it can be utilized in devices that measure the thickness and surface shape of various samples, not just semiconductor wafers. 【Featured Products (Partial)】 ■ Wire Saw ■ Wafer Bonding Equipment ■ Exposure Equipment for Printed Circuit Boards ■ Film Thickness and Composition Measurement Equipment ■ Laser Dicing *For more details, please refer to the PDF document or feel free to contact us.

• Other semiconductor manufacturing equipment
• Photomask

This catalog contains product information for industrial equipment and experimental research equipment handled by Kozu Seiki Co., Ltd. It features a variety of products, including the compact 6-axis manipulator "MPS Series," the surface shape measurement system "Dyvoce Series," and equipment for synchrotron radiation facilities. Please make use of this catalog for selecting products. 【Featured Products】 ■ System Products / Industrial ■ System Products / Experimental Research Solutions ■ Positioning Stage Mont Blanc Series ■ Vacuum-Compatible Stages ■ Control Devices ■ Accessories *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

The "Mont Blanc Series" is a versatile precision positioning stage born from our years of experience in custom-made orders. It is equipped with high precision, high rigidity, and high durability. Please feel free to consult us if you have any requests. 【Lineup】 ■ Manual XY Stage ■ Gothic Arc Stage ■ Manual Z Stage ■ Automatic X Stage ■ Automatic Swivel Stage ■ Manual Swivel Stage ■ Precision Positioner ■ Automatic Rotating Stage *For more details, please download the PDF or feel free to contact us.

• Other inspection equipment and devices

Kozu Seiki's automatic X and XY stage 'SXA Series' achieves high cost performance in pioneering manufacturing fields. 【Are you facing these issues?】 ■ We use a lot in the production line, so we want to keep costs as low as possible. ■ The client's desired delivery date is fluid, so we want to procure as quickly as possible. ■ We want an automatic X stage with high rigidity, high precision, and a long stroke. ■ We want to use it in a clean room. 【Features】 ■ Achieves a 25% to 40% lower price through standardization of parts and mass production (compared to our company). ■ A lineup of four models starting from 98,000 yen (excluding tax)! ■ Adopts high-rigidity ball screws and dedicated cross roller guides. ■ Both high load capacity and moment rigidity are more than twice that of our conventional models! 【High versatility and high performance coexist】 【1】 High precision = required needs + KOHZU quality 【2】 Low price = cost reduction through parts standardization and process management * Modifications can be accommodated by replacing the motor. * An automatic XY stage 'SYA Series' is also available.

• Other machine elements

The "XY Stage" is a high-precision long stroke suitable for integration into analysis and inspection equipment. Due to improvements in component accuracy, rigidity, and assembly technology, the reproducibility of the trajectory is high, allowing for stable corrections and origin return, enabling high-precision positioning. There are tapped holes for mounting a cable carrier kit on the main body, so you can install the cable carrier even after delivery. We also offer installation services for delivery. 【Features】 ■ High reproducibility of straightness ■ Improved reliability through special measurements ■ Enhanced convenience for wiring work ■ Flexible custom support ■ Accepting various special measurements - A wide range of measuring instruments, including rotary encoders and autocollimators, are available. *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices

We would like to introduce our automatic Z stage, the 'ZA07A-V201'. It features a ball screw, which provides excellent durability and allows for high-speed movement. The structure is simple, and it is designed to be cost-effective. Additionally, we offer products with a table size of 70mm, such as the high-rigidity "ZA07A-V1F01" and the low-profile "ZA07A-W2C02". 【Specifications (partial)】 ■ Table size: 70mm ■ Stage height: max 102.5mm ■ Guidance method: Cross roller ■ Movement range: CW 4mm, CCW 10mm ■ Resolution: 0.25μm *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

The "Ball Screw Driven Swivel Stage" is a product that allows for control with higher resolution. The weight has been reduced from 2.8 kg to 2.0 kg, a decrease of 28%, and durability has been significantly improved with ball screw drive. It is suitable for wafer alignment and creates free space above and below the workpiece, increasing design flexibility. 【Features】 ■ Allows for control with higher resolution ■ Weight reduced by 28%, from 2.8 kg to 2.0 kg ■ Durability significantly improved with ball screw drive *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices

We would like to introduce our 6-axis manipulator, the 'MPS/SMR/USM series'. You can freely choose from various stepping motors and servo motors. Combinations such as "downward rotation center," "upside down use," and "all-axis ball screw drive" are flexible. It is designed with high strength, assuming pressure applied to the workpiece after positioning, and we have a rich track record of 50 patterns, including high-resolution types and stroke modifications. 【Features】 ■ Ultra-compact, palm-sized ■ Manual operation at 0.05μm ■ Non-shifting 6-axis ■ 30kg high load with sub-micron precision ■ Flexible combinations ■ Free choice of motors *For more details, please refer to the PDF materials or feel free to contact us.

• Other inspection equipment and devices
• Other physicochemical equipment

The "MAX-G Series" is a high-load goniometer developed as a component of a large X-ray diffractometer. This product supports both horizontal and vertical configurations, making it easy to assemble various devices. Additionally, it can be equipped with an encoder as an option, and when used in conjunction with our controller "SC Series," feedback control is also possible. 【Features】 ■ Developed as a component of a large X-ray diffractometer ■ Supports both horizontal and vertical configurations ■ Easily assembles various devices ■ Can be equipped with an encoder as an option, and feedback control is possible when used with the "SC Series" *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "USM-R1C-001" is an ultra-compact 6-axis manipulator that achieves miniaturization while maintaining high precision and high rigidity. With ball screw drive on all axes, it offers long lifespan. It maintains and reproduces stable accuracy over an extended period. Additionally, it has sub-micron following capability in the linear direction and second-level following capability in angles, completing positioning with high precision according to the command values. 【Features】 ■ Concentrated connector unit ■ Simplifies the cumbersome wiring work for multi-axes ■ Compact and lightweight ■ Can be mounted on high-speed operating transport axes ■ High following capability *For more details, please download the PDF or feel free to contact us.

• Other inspection equipment and devices

The "MPS-SSSD-B010" is a compact 6-axis manipulator suitable for precise positioning when attaching elements such as LCD projectors and CCD cameras. Compared to conventional products, it achieves miniaturization, weight reduction, and increased rigidity simultaneously. The height has been reduced by 50%, the width by 40%, the weight by 30%, and rigidity has been increased by 30%. Please feel free to contact us when you need assistance. 【Features】 ■ Compact ■ High precision ■ Increased rigidity ■ Suitable for fine positioning *For more details, please refer to the PDF document or feel free to contact us.

• Other physicochemical equipment

We offer the XYθ thin alignment stage series, including the 'YRA-070', which is suitable for the assembly of small devices. We also have the 'YRA-071', which accommodates various motor modification requests, the 'YRA-131', which is ideal for bonding small to medium-sized LCDs and wafers, and the 'YRA-200', which has the highest load capacity in the series. Please feel free to consult us if you have any requests. 【Product Lineup】 ■YRA-070: The smallest alignment stage in the series ■YRA-071: Capable of accommodating various motor modification requests ■YRA-131: Well-suited for bonding small to medium-sized LCDs and wafers ■YRA-200: The highest load capacity specification in the series *For more details, please download the PDF or feel free to contact us.

• Image Processing Equipment
• Other inspection equipment and devices

The "RST Aligner" is a super high-precision alignment stage with a drive unit arranged in a balanced equilateral triangle. This axis configuration enables high-precision micro-drives essential for alignment. The necessary calculations for control are provided free of charge. It consolidates the cutting-edge technology cultivated in the Mont Blanc series. Even at high resolution settings, it follows with excellent sensitivity. 【Features】 ■ Balanced equilateral triangle arrangement ■ Custom-designed drive unit ■ Large diameter transmission hole ■ Customizable table size ■ Z mechanism can be added ■ Custom support available *For more details, please refer to the PDF document or feel free to contact us.

• Other inspection equipment and devices

The "CYAT-070" is an ultra-thin XY stage that achieves significant miniaturization through its integrated two-axis structure. It secures a full stroke with a transparent hole of φ30mm, making it suitable for use as a compact XY stage for microscopes. Due to its thin structure, it is ideal for retrofitting XY axes after the introduction of various devices. Additionally, the adoption of LM guides allows for a long stroke, expanding its range of applications. 【Features】 - Significant miniaturization achieved through the integrated two-axis structure - Total height of 70mm even with the addition of our Z-axis - Full stroke with a transparent hole of φ30mm, also usable as a compact XY stage for microscopes *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

We would like to introduce the 'ST07A-S1W/YMO7A-SIW' that we handle. By adopting a slim XY stage and a slim swivel stage, we have achieved downsizing. The height has been reduced by 46mm (about 50%) compared to conventional models, and the use of a φ18mm transparent hole expands its applications. The table surface measures 70mm x 70mm, and the guiding method is a precision cross roller guide. 【ST07A-S1W Specifications (partial)】 ■ Center hole: φ18mm (minimum effective transparent hole diameter φ13mm) ■ Work distance: 70mm ■ Displacement of rotation center: φ0.05mm/±3° ■ Horizontal load capacity: 49N (5kgf) ■ Moment load: 0.71 arcsec/N·cm *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

The FPP03-13 is a precision micrometer that allows for manual high-resolution positioning. Thanks to its unique internal structure, it enables sub-micron positioning. The minimum reading is 0.5μm per division (fine adjustment), and the axial load is up to 5Kgf (49N) or less. 【Specifications (partial)】 ■ Structure - Coarse adjustment: Lead screw method - Fine adjustment: Lead screw & lever ■ Movement amount - Coarse adjustment: 13mm (0.5mm per rotation) - Fine adjustment: 0.3mm (25μm per rotation) *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

This product is a 6-axis unit developed specifically for the alignment of optical fibers. For the XY axes relative to the optical axis Z axis (focus direction), it employs the precision positioner "FPP03-13," which allows for sub-micron positioning. Compared to the previous model, rigidity has been improved, enabling the installation of optical measuring instruments for alignment in addition to optical fibers, significantly reducing the time required for alignment. 【Features】 ■ Developed specifically for the alignment of optical fibers ■ Rotational 3 axes and Z axis: adopts our standard micrometer ■ Employs the precision positioner "FPP03-13" ■ Capable of mounting optical measuring instruments for alignment other than optical fibers ■ Can significantly reduce the time required for alignment *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

This product is a goniometer that allows for sample alignment at the same rotation center. It uses SUS as the main material and achieves high rigidity through a unique fitting technology. The operating axes are swivel (goniometer) and two θ axes, but it is also possible to add XY axes depending on the application, so please feel free to contact us if you have any requests. 【Features】 ■ Sample alignment capability ■ Main material is SUS ■ High rigidity *For more details, please refer to the PDF document or feel free to contact us.

• Other measurement, recording and measuring instruments

The "TSS Series" is a simulator that verifies the image stabilization function installed in various imaging devices, from digital cameras and camcorders to mobile devices and surveillance cameras, capable of reproducing vibrations caused by hand tremors and other factors. We offer two models: the "TSS-1000" with axis configurations of θX, θY, and θZ, and the "TSS-M0210Y" with configurations of θX and θZ. In recent years, as cameras have advanced in magnification and pixel count, image stabilization has become essential, and our vibration table is particularly important for supporting free vibration waveform driving. 【Features】 ■ High-performance pitch, yaw, and roll ■ Controller with a touch panel (only for TSS-1000) ■ Easy-to-use software ■ A box-type base to accommodate the entire device is also available (optional) *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

The "Dyvoce Series" is a non-contact shape measurement system that uses laser displacement sensors tailored to the workpiece being measured. Equipped with features that prioritize ease of use and a simple user interface, it offers high reliability and motion control technology unique to high-precision stage manufacturers, enabling various measurements. For stage sizes (measurement areas) not listed in the lineup, customization is available according to your application. Please feel free to contact us when needed. 【Features】 ■ Well-suited for evaluating warpage and deflection of wafers and flat panels ■ Equipped with features that prioritize ease of use and a simple user interface ■ Custom holders can be made to fit the workpiece ■ We accept customer samples for pre-installation test measurements ■ It is also possible to try actual measurements *For more details, please refer to the PDF materials or feel free to contact us.

• Other measurement, recording and measuring instruments

High-precision angle control is essential in scientific experiments and research and development. Our company offers a variety of rotating stages to meet the diverse needs of our customers regarding high-precision angle control. Please feel free to contact us when you need assistance. 【Product Lineup】 ■ Rotating stages that can withstand high loads ■ Rotating stages with no wobble in the rotation axis ■ Rotating stages specialized for ultra-high precision positioning in small areas ■ Stages with two rotational axes arranged coaxially, etc. *For more details, please refer to the PDF document or feel free to contact us.

• Other machine elements

Kozu Seiki Co., Ltd. offers a variety of demonstration machines for our products. Before making a purchase, you can actually operate the machines to confirm if they can be used for the intended applications. If you have requests such as wanting to see the products even though you haven't decided to buy, or wanting to evaluate them by integrating them into your equipment, please feel free to contact us. *For more details, please refer to the PDF materials or feel free to inquire.

• Power Transmission Equipment
• Other inspection equipment and devices
• Other image-related equipment

At Kohzu Seiki, we have been advancing the high precision of our products to meet the needs of the world. Essential to this has been the improvement of "measurement technology." Our company offers a variety of high-precision measuring instruments, and experienced measurement personnel conduct meticulous accuracy inspections. Main measuring instruments: - Laser length measuring machine (resolution 1nm): positioning accuracy in the linear direction - Rotary encoder (resolution 0.00005°): positioning accuracy in the rotational direction - Autocollimator (resolution 0.001 seconds): positioning accuracy for posture changes and tilt direction - Electric micrometer (resolution 0.01μm): straightness of travel On our website (https://www.kohzu.co.jp/technology/actualvalue/), we introduce past achievements in special measurements. We can also perform accuracy measurements tailored to your applications, so please feel free to consult with us.

• Power Transmission Equipment
• Other inspection equipment and devices
• Other image-related equipment