フローベル List of Products and Services

The "TOMOS-50R1" is a dual-sided microscope system equipped with wide-field ring lighting, capable of capturing images with a 1x field of view. It allows for the inspection of both sides of electronic components such as condensers and resistors, resin parts for communication devices, and entire pieces like lenses. 【Features】 ■ High-precision image processing correction for optical axis misalignment on both sides of the microscope, lens magnification errors, and camera θ misalignment. ■ Dimension measurement is possible without the hassle of flipping the sample over. ■ Simultaneous imaging of both sides of quartz oscillators, MEMS, holes in printed circuit boards, and electronic components. ■ Measurement of misalignment in patterns and alignment marks on both sides can be done with a repeatability accuracy of ±0.010mm (※). ※ Measurement accuracy may vary depending on subject conditions, measurement conditions, objective lens magnification, measurement environment, etc. Please confirm with sample tests. ＼ For more details, please check "Download Catalog" ／

The "TOMOS-50R1" is a dual-sided microscope system equipped with wide-field ring lighting, capable of capturing images with a 1x field of view. It allows for the imaging of entire electronic components such as condensers, resistors, resin parts for communication devices, and lenses, enabling inspection of both sides for defects. 【Features】 ■ High-precision image processing correction for optical axis misalignment of the microscope, lens magnification errors, and camera θ misalignment. ■ Dimension measurement is possible without the hassle of flipping the sample over. ■ Simultaneous imaging of both sides of quartz oscillators, MEMS, holes in printed circuit boards, and electronic components. ■ Measurement of misalignment in patterns and alignment marks on both sides with a repeatability accuracy of ±0.010mm (※). ※ Measurement accuracy may vary depending on subject conditions, measurement conditions, objective lens magnification, measurement environment, etc. Please confirm with sample tests. ＼ For more details, please check "Download Catalog" ／

The "TOMOS-50R1" is a dual-sided microscope system equipped with wide-field ring lighting, capable of capturing images with a 1x field of view. It allows for the inspection of both sides of electronic components such as condensers and resistors, resin parts for communication devices, and entire pieces like lenses. 【Features】 ■ High-precision image processing correction for optical axis misalignment of the microscope, lens magnification errors, and camera θ misalignment ■ Dimension measurement is possible without the hassle of flipping the sample over ■ Simultaneous imaging of both sides of quartz oscillators, MEMS, holes in printed circuit boards, and electronic components ■ Measurement of misalignment in patterns and alignment marks on both sides with a repeatability accuracy of ±0.010mm (※) ※ Measurement accuracy may vary depending on subject conditions, measurement conditions, objective lens magnification, measurement environment, etc. Please confirm with sample tests. ＼ For more details, please check "Download Catalog" ／

The "TOMOS-50R1" is a dual-sided microscope system equipped with wide-field ring lighting that allows for dual-sided wide-field imaging at a 1x magnification. It can simultaneously capture images of both sides of electronic components such as crystal oscillators, MEMS, and holes in printed circuit boards. Additionally, it can measure the misalignment of patterns and alignment marks on both sides with a repeatability accuracy of ±0.010mm. 【Features】 ■ High-precision image processing correction for optical axis misalignment of the microscope, lens magnification errors, and camera θ misalignment. ■ Dimension measurement is possible without the hassle of flipping the sample over. ■ Simultaneous imaging of both sides of crystal oscillators, MEMS, holes in printed circuit boards, and electronic components. *For more details, please download the PDF or feel free to contact us.

The "TOMOS-60XY" is a dual-sided microscope displacement measurement system capable of simultaneous imaging of both sides, dimension measurement, and displacement measurement. [Applications] ■Observation: Simultaneous observation of both sides of electronic paper electrophoresis, particles, fluids, filters, etc. ■Displacement measurement of both sides: Measurement of the displacement of alignment marks and through holes on both sides of quartz oscillators, MEMS, etc. ■Dimension measurement of both sides: Measurement of dimensions on both sides of quartz oscillators, semiconductor linewidth patterns, etc. *For more details, please download the catalog or feel free to contact us.

The "TOMOS-50/60/80/XY" is a dual-sided microscope displacement measurement system capable of simultaneous imaging of both sides, dimensional measurement, and displacement measurement. It features electric control and automatic measurement, making it suitable for measuring and observing displacement of dual-sided exposure patterns, semiconductor wafers, and 4-inch, 6-inch, and 8-inch wafers, as well as MEMS and quartz oscillators. The correction of the optical axis for both sides is performed with high precision using a micro-stage and software. Additionally, it can be sold as a dual-sided microscope module for integration into devices. 【Features】 ■ Simultaneous imaging, dimensional measurement, and displacement measurement of both sides ■ High-precision correction of the optical axis for both sides using a micro-stage and software ■ Measurement of displacement between both sides with a repeatability accuracy of ±0.3μm or less ■ Compatible with a dual-channel auto-focus unit for both sides (optional) ■ Development of an electric XY stage control system is underway ■ Available for sale as a dual-sided microscope module for device integration *For more details, please download the catalog or feel free to contact us.

The "FR-400" is a high-sensitivity camera set for microscopes that comes with measurement function-equipped filing software, making it an easy-to-use all-in-one model ready for immediate use. It offers high sensitivity and excellent cost performance, and can be retrofitted to microscopes from any manufacturer. Additionally, it can be easily mounted to C-mounts and comes with dedicated measurement software. 【Features】 ■ Color ■ Monochrome ■ Near-infrared ■ Fluorescence observation ■ Compatible with any microscope manufacturer *For more details, please refer to the related links or feel free to contact us.

The "TOMOS-80XY" is a dual-sided microscope system that automatically moves to the specified measurement points of a workpiece and can automatically measure the misalignment of patterns and alignment marks on the front and back of MEMS and semiconductor wafers. It automatically detects the edges of alignment marks such as circles, squares, and crosses, and measures the misalignment between their center coordinates. It registers XYZ stage control conditions, measurement conditions, creates maps, and automatically measures multiple locations on the workpiece. Additionally, it is equipped with an alignment function to correct the misalignment of the XY stage and the workpiece mounting position, ensuring precise movement control and preventing measurement errors. [Software Features (Excerpt)] - Front and back optical axis correction - Front and back lens magnification correction - Camera mounting angle correction - Automatic measurement of front and back position misalignment - Electric stage control and map movement control *For more details, please download the PDF or feel free to contact us.

The "TOMOS-60XY" is a 6-inch electric XY stage dual-sided microscope system that can automatically measure multiple locations on a workpiece. It can automatically move to the specified measurement locations on the workpiece and measure the displacement of patterns and alignment marks on the front and back of quartz oscillators, MEMS, semiconductor wafers, and electronic components. Additionally, it is equipped with an alignment function for correcting the positional deviation between the XY stage and the workpiece, ensuring precise movement control and preventing measurement errors. 【Features】 ■ Automatically detects the edges of alignment marks such as circles, squares, and crosses, and measures the displacement between their center coordinates. ■ Controls XYZ stage conditions, measurement conditions, creates maps, and registers recipes to automatically measure multiple locations on the workpiece. *For more details, please download the PDF or feel free to contact us.

The "TOMOS-50" is a compact type of measurement system that can simultaneously capture the front and back of electronic components such as crystal oscillators, MEMS, and semiconductors, and measure with an accuracy of ±0.2μm or less. The front and back optical axis correction can be precisely adjusted using a micro stage and software. Additionally, it is also available for sale as a dual-sided microscope module for device integration. Please contact us for more information. 【Features】 ■ Compact type ■ Approximately 3 million pixels ■ Simultaneous capture of both sides, dimensional measurement, and position deviation measurement ■ High-precision correction of the front and back optical axis using a micro stage and software ■ Measurement of position deviation between front and back with a repeatability of ±0.2μm or less (varies depending on conditions) *For more details, please refer to the PDF document or feel free to contact us.

We would like to introduce our dual-sided microscope system, the "TOMOS series." Our lineup includes the "TOMOS-50" with a 4-inch stage, the "TOMOS-60" with a 6-inch stage, and the "TOMOS-50R1" with wide-field ring illumination. It captures both sides of quartz oscillators, MEMS, and electronic components simultaneously. Dimension measurements can be performed without the hassle of flipping the sample over. 【Features of TOMOS-50/60】 ■ Simultaneous imaging of both sides of quartz oscillators, MEMS, semiconductor wafers, and electronic components ■ Measurement of alignment marks and pattern shifts on both sides with repeatable accuracy of ±0.3μm ■ High-precision image processing correction for optical axis misalignment, lens magnification errors, and camera θ shifts ■ Supports autofocus function and electric XY stage (optional) *For more details, please download the PDF or feel free to contact us.