株式会社ダン科学 Product Lineup

■Device Overview A flat surface polishing device (edge polisher) that performs mirror polishing, rough polishing, and cleaning using filtered water and pure water as the medium, without using slurry or long polishing belts. The elimination of slurry and long polishing belts achieves low maintenance, space-saving, and a simple mechanism. ■Examples of Applications Mirror finishing processing, mirror finishing processing, end face foreign matter cleaning. ■Target Objects - Suitable for thin materials of 150 to 200 μm - Various wafers: compounds, oxides, glass, quartz, silicon, ceramics Please consider adopting the device after evaluation and confirmation with the actual machine. Compatible with Orifura (V-notches are not supported). Custom design and manufacturing are available through automation and specification discussions.

This product is a device that automatically transports and etches GaAs wafers using a dedicated basket. When GaAs wafers placed in the basket from the loader section are introduced, they are automatically transported by a conveyor from the loader section to the etching tank, rinsing tank, and unloader section. Additionally, there is a chemical supply tank located at the bottom of the device, which automatically mixes the chemicals and supplies the required amount to the etching tank. 【Main Specifications】 ■ Heated Material: GaAs (Gallium Arsenide) Block ■ Cassette: Dedicated PTFE Cassette ■ Conveyor: Automatic Robot Transport (Servo Motor Driven) ■ Control Method: Sequencer Control *For more details, please refer to the PDF document or feel free to contact us.