サーモニックENG Product Lineup

We handle a "small chlorine furnace" for research and development purposes. This device was developed to address issues such as the "high risk of gas leakage and poor safety" associated with tubular furnaces, as well as their unsuitability for sample scale-up and continuous testing. The furnace features a sealed structure that allows for the safe and highly controllable supply of chlorine and hydrogen chloride, enabling reproducible dry processing using corrosive gases at a research level while ensuring sufficient sample quantities. 【Features】 ■ High corrosion-resistant materials: Achieved through Thermonic's unique technology for high corrosion resistance. ■ Easy connection to scrubbers: Simple integration with liquid absorption and two-stage neutralization towers. ■ Compatible with corrosive gas monitoring: Can operate in conjunction with leakage detection sensors. ■ Scale adaptability: Capable of processing samples ranging from a few grams to several hundred grams. ■ Operates under constant negative pressure: By operating at a pressure lower than atmospheric pressure, the risk of process gas leakage is reduced. *For more detailed information, please download the materials or feel free to contact us.

The "chlorine furnace" we handle has a structure that allows for independent control of temperature and chlorine partial pressure under reduced pressure. Urban mines contain metals such as Au, Cu, Sn, Fe, and Ni, which coexist in a complex manner. If these can be separated using the dry chlorination volatilization method, it would be possible to realize a new recycling method that efficiently recovers valuable metals while reducing the burden of wastewater treatment. Furthermore, due to the characteristics of this device, which can precisely control temperature, pressure, and chlorine partial pressure, we believe it could develop into "selective recovery of valuable metals from urban mines" in the future. 【Features】 ■ Volatilization of base metals at low temperatures: Selective volatilization of FeCl3, SnCl4, etc., around 200-300°C ■ Control of noble metal salt generation at medium temperatures: Separation of noble metals using stable regions such as AuCl3 ■ Reaction sequence switching through pressure control: Control of the generation and decomposition equilibrium of chlorides under reduced pressure conditions *For more detailed information, please download the materials or feel free to contact us.

Our company offers a "chlorine furnace" that can reproduce corrosion behavior in chlorine and hydrogen chloride atmospheres. This experimental furnace safely reproduces high temperatures in corrosive environments. It is theoretically expected to be applied to fundamental research on high-temperature corrosion mechanisms caused by chlorine gas, durability evaluations of chlorine-resistant materials (high alloys, coatings, ceramics), and testing platforms for corrosion prevention coatings. We also provide test equipment. 【Features】 ■ Compatible with corrosive gases such as chlorine and hydrogen chloride ■ Simultaneous control of reduced pressure and temperature ■ High-purity atmosphere due to dry structure ■ Reduced risk of process gas leakage due to constant reduced pressure atmosphere *For more detailed information, please download the materials or feel free to contact us.

The "small chlorine furnace" enables the dry volatilization and removal of metal impurities such as Fe/Ni/Al remaining in carbon powder through selective chlorination using Cl2/HCl. Chlorination and volatilization are controlled with a staged temperature profile, allowing for low residue in a short time while maintaining the crystallinity and specific surface area of the base material. Additionally, by not using acidic solvents such as hydrochloric acid or sulfuric acid, the burden of waste liquid treatment is reduced, while achieving high purity of the product. 【Features】 ■ Selectively volatilizes metal chlorides through chlorination ■ Dry process eliminates the need for water washing, simplifies post-processing, and improves yield and energy efficiency ■ Base material retention design: Maintains physical properties by controlling oxygen partial pressure and residence time *For more detailed information, please download the materials or feel free to contact us.

The "small chlorine furnace" is a product that maintains phase and particle size through negative pressure operation and oxygen partial pressure control, minimizing waste liquid without the need for cleaning. By using Cl2/HCl for selective chlorination, it removes metal impurities mixed in during the production of ceramic powder (SiO2/Al2O3/Si3N4) in a dry process. Additionally, by volatilizing chlorine, it reduces impurities in a short time while maintaining the composition, crystal phase, and particle size distribution of the mother phase. This allows for the elimination of the washing process, thereby reducing re-drying and waste liquid treatment costs. 【Features】 ■ Selective chlorination × temperature staging: Prioritizes the volatilization of metal chlorides while maintaining the base material phase. ■ Dry process: Minimizes the burden of waste liquid and re-drying without the need for washing. ■ Physical property retention design: Maintains crystal phase, particle size, and specific surface area through control of oxygen partial pressure and residence time. *For more detailed information, please download the materials or feel free to contact us.

The "Small Chlorine Furnace" is a dry cleaning device for fixtures that utilizes "selective chlorination → volatilization" with Cl2/HCl. It targets GaN/AlN/Si-based products adhered to MOCVD/epitaxial furnace susceptors, quartz boats, and tubes, converting them into chlorides at temperature stages and gas compositions suited to the materials, and removing them through volatilization at low temperatures. Additionally, it minimizes waste liquid burden without the need for acid washing, and reduces dimensional changes, distortion, and grain boundary damage. 【Features】 ■Selective chlorination × staged temperature: Converts adhered substances to chlorides → volatilizes at low temperatures, suppressing substrate damage. ■Dry process with minimal waste liquid: No acid washing, shortening cleaning and drying processes. ■Maintains dimensions and surfaces: Operates under negative pressure and controls oxygen partial pressure to minimize distortion and roughness changes. ■Compatible with multiple materials: Applicable to fixtures made of quartz, SiC, C/C, metals (Mo/W/Al-based), etc. *For more detailed information, please download or feel free to contact us.

The "small-scale chlorine furnace" is a product that simplifies post-processing with dry separation and low contamination while leaving the base material intact and eliminating the need for cleaning. It converts metallic impurities in the material into volatile chlorides through selective chlorination using Cl2/HCl, and preferentially removes them through controlled temperature stages and residence times in a dry process. Additionally, by utilizing the vapor pressure difference and Gibbs free energy difference of metal chlorides, it can achieve high selectivity in separation without compromising the composition or crystal phase of the base material, resulting in almost no wastewater discharge, thus reducing environmental impact and costs. 【Features】 ■ Selectivity: Utilizes the vapor pressure difference of chlorides to preferentially volatilize only target impurities. ■ Staged temperature profile: Sequential separation from low to medium temperature, minimizing damage to the base material. ■ Dry and low waste: Almost zero wastewater with no cleaning required, making post-processing simple. *For more detailed information, please download the materials or feel free to contact us.

In the previous session, we introduced the principle of removing metal impurities by converting them into chlorides in a chlorine furnace (chloride volatilization). Today, we will address a common concern: "Isn't it dangerous to flow corrosive and toxic gases like Cl2 and HCl at high temperatures?" Tubular furnaces are readily available, versatile, and suitable for the new synthesis of small sample sizes. However, there are undeniable "common issues" such as "a small effective heating area, which tends to limit scalability" and "the risk of micro-cracks in the tubes due to long-term use or thermal shock, increasing the risk of leaks during positive pressure operation." The equation "high temperature × corrosive gas = danger" is intuitively correct. That is why the essence lies in "managing risks" through design philosophy and operational design. The small chlorine furnace from Thermonik ENG is built with this concept in mind. Design philosophy for safety: 1) Based on negative pressure (reduced pressure) operation With a vacuum system in place, the internal pressure of the furnace is always maintained below atmospheric pressure. This suppresses any potential blowout in the event of seal degradation, thereby reducing the risk of Cl2/HCl leakage. *For more details, please download the PDF or feel free to contact us.

We will introduce the small chlorine furnace that our company handles in a series of articles covering: ■ Background of development ■ Impurity removal mechanism inside the chlorine furnace (chloride volatilization method) ■ Specifications and operational points of the equipment First, let's discuss "Why a chlorine furnace?" In recent years, with the miniaturization of semiconductors and the enhancement of battery performance, the management of metallic impurities (conductive foreign substances such as Fe/Cu/Ni) in powder raw materials has rapidly advanced to the ppm to ppb level. Even slight contamination can have a fatal impact on yield and reliability. Common countermeasures include: 1. Wet method (acid treatment): Dissolving and removing metallic impurities with strong acids. 2. Dry method (magnetic separation): Recovering magnetic particles with powerful electromagnets. However, ■ While the wet method has the advantage of uniform removal, it poses challenges such as large amounts of wastewater, unsuitability for water-sensitive materials, and energy burdens from re-drying. ■ Magnetic separation is limited to magnetic particles and is less effective for non-magnetic metal compounds and fine adherents. *For more detailed information, please download the materials or feel free to contact us.*

We will introduce the challenges faced on-site regarding small chlorine furnaces (compatible with Cl2/HCl) and explain why the chlorination process can be operated safely. It is possible to remove trace impurities in oxides/metals as volatile chlorides, enabling de-metallization and de-oxygenation through halogen cleaning, as well as surface cleaning. Additionally, due to our unique design, we have safety and reproducibility design points, such as a corrosion-resistant structure that suppresses material degradation even at high temperatures with Cl2/HCl. 【Common Issues】 ■ Wet acid treatment has heavy waste liquid processing and energy costs, and we want to replace it with dry methods. ■ Since the product is water-sensitive, we want to remove metallic foreign substances without wetting. ■ We want to selectively remove only metallic impurities in a dry atmosphere. ■ We want to scale up from CI2 tests in tubular furnaces more safely. *For more detailed information, please download the materials or feel free to contact us.

The "Chlorine Furnace" is a device that accommodates halogen gases such as Cl2 and HCl gas, utilizing Thermonic's unique technology. (CE, SEMI, UL standard certification) By adopting shelf plate heaters, it enables uniform heating, allowing Cl2 gas to diffuse throughout the sample for highly efficient reactions. Additionally, it can lower the boiling point of the generated chlorides, enabling processing at lower temperatures. 【Features】 ■ Accommodates halogen gases such as Cl2 and HCl gas through unique technology ■ Enables uniform heating with the adoption of shelf plate heaters ■ Allows Cl2 gas to diffuse throughout the sample for highly efficient reactions ■ Can lower the boiling point of generated chlorides, enabling processing at lower temperatures ■ Reduces the risk of leakage of Cl2 and HCl gas *For more detailed information, please download the materials or feel free to contact us.

In processes involving halogen gases (such as Cl, F, Br), common issues tend to arise in general electric furnaces, including: ■ Rapid corrosion of heaters and insulation materials due to halogens ■ Incompatibility of packing and piping materials, leading to leaks and safety concerns As a result, there are situations where the consideration of new material processes is abandoned. Thermonik ENG's "Compact Halogen-Compatible Furnace" is designed for two scenarios: 1. When you want to actively flow halogens as process gases 2. When halogens volatilize from samples and contaminate the furnace This specialized furnace aims to change the mindset from "it's not possible because of halogens" to "testing is possible even with halogens." [Features] ■ High corrosion-resistant materials: Achieved through Thermonik's unique technology ■ Corrosive gas monitoring compatibility: Capable of interlocking operation with leakage detection sensors ■ Scale adaptability: Supports sample processing from a few grams to several hundred grams ■ Operation under constant negative pressure: Reduces the risk of process gas leakage by operating at a pressure lower than atmospheric pressure.