サンユー電子 List of Products and Services

The "SVC-700RFIII" is a compact RF magnetron sputtering device that can be placed on a desk, equipped with three φ2-inch cathodes. It is capable of forming stacked films using three types of targets. It can be expanded with a gas introduction mechanism, allowing for the introduction of up to three types of gases, including argon gas. In addition to metal thin films, it can accommodate the production of various thin films such as insulating films, oxides, and nitrides. 【Features】 ■ Desktop size for research and development ■ Sample size: up to φ2 inches ■ Additional film thickness sensor available *For more details, please refer to the documentation. Feel free to contact us with any inquiries.

• Sputtering Equipment

Since our establishment in 1976, we have consistently focused on "ease of use, simplicity, and convenience" in our manufacturing, allowing many people to utilize our sputtering devices (sputter coaters), vacuum deposition equipment, and SEM/electron microscope-related instruments. Our sputtering devices (sputter coaters) for SEM sample preparation, vacuum deposition equipment, and sputtering devices and vacuum deposition equipment for electrode attachment applications in various devices are well-received by researchers in university and public research institution laboratories, as well as by development personnel in private companies. We also handle electron microscope-related equipment such as tensile (fatigue) testing devices for SEM and electron beam lithography systems. For more details, please contact us or download our catalog.

• Coater

The "SC-701Mk II ADVANCE" is a high-spec compact coater compatible with various metals such as Ni, Cr, W, Ti, and Al. It is the smallest ultra-compact model in the DC sputtering category. Thin film production of various metals can be easily performed with this compact and user-friendly device. 【Features】 ○ Equipped with a vacuum gauge to ensure reproducibility of film formation conditions ○ Small, compact & high-spec ○ Standard manual shutter included ○ Easy adjustment of the T-S distance with a dedicated sample stage ○ Capable of tungsten coating, making it suitable for sample preparation for high-resolution SEM For more details, please contact us or download the catalog.

• Other physicochemical equipment

The QUICK COATER SC-701HMC II is a high-spec model compatible with various metals such as Ni, Cr, W, Ti, and Al. It allows for high-precision control through software, making it easy to produce thin films of various metals. 【Features】 〇 Programmable sputter coater 〇 Two types of operation: full auto/manual 〇 Standard equipped with a shutter

• Sputtering Equipment

The multi-compact coater "SVC-700TMSG/Adexcel" is a small film deposition device that generates plasma through direct current discharge using a magnetron cathode in a low vacuum environment. It sputters a metal target attached to the cathode with ions in the plasma, creating a thin film on the surface of the sample. Since three types of targets can be mounted simultaneously, it is possible to select targets in a vacuum and produce multilayer films. 【Features】 - Structure allows for optional installation of film thickness sensors, sample heating units, etc. - Can also be used as a resistance heating vacuum deposition device → Replace the exhaust unit with a resistance heating unit and connect a dedicated power supply. For more details, please contact us.

• Coater

The "SVC-700TMSG/7PS80" is a resistance heating vacuum deposition system of the TMP + RP type. It is a device focused on compactness and ease of use. It consists of the exhaust system "SVC-700TMSG" and the deposition power supply "SVC-7PS80." With its simple and easy operation, it also considers future functional expansions. A wide range of options expands the possibilities for thin film fabrication experiments. Additionally, dedicated options are available for experiments involving the fabrication of organic thin films. We also accept inquiries regarding installation within glove boxes (with many successful cases). 【Features】 ○ Compact size ○ Excellent expandability as a tabletop vacuum deposition system ○ Easy-to-operate TMP exhaust system adopted ○ Abundant options ○ Installation within glove boxes is also possible

• Evaporation Equipment

A long-selling model for over 45 years. Despite its small body, it accommodates everything from thin film production for electrodes to sample preparation for scanning electron microscopy (SEM). Its design and compactness make it feel at home even on an office desk!! 【Features】 〇 Small & Compact 〇 Front door opening mechanism that eliminates the need to lift the bell jar ⇒ Easy sample set-up and retrieval. 〇 Standard intermittent sputtering function 〇 A variety of options available: front door with shutter / aluminum front door / front door with Pirani vacuum gauge mounting port, etc.

• Electron microscope

A compact RF sputtering device compatible with the production of metal films, as well as insulating films/oxide films. 【Features】 ○ Three types of chambers available to match sample sizes 〇 Cathode sizes compatible with 2, 4, and 6 inches 〇 The 2-inch cathode type also supports a three-source configuration ⇒ Enables the production of stacked films 〇 A variety of options available 　　Substrate heating unit / Substrate cooling unit / MFC unit, etc.

• Sputtering Equipment

The QUICK AUTO COATER SC-701AT is a fully automatic coater that performs coating (etching) from vacuum exhaust to atmospheric release automatically. 【Features】 ○ Coating with minimal individual differences is possible due to the film thickness control interlocking system (good reproducibility). ○ Coating/etching mode equipped ○ Can also be used for applying electrode films to devices.

• Sputtering Equipment

Lightweight and compact desktop sputter coater with high reproducibility 【Features】 ○ Equipped with a magnetron cathode that reduces ion damage ○ The magnetron cathode contributes to the production of high-quality thin films ○ Fully automatic from exhaust to coating to atmospheric release ○ Easy coating of sputtered thin films for electrodes

• Sputtering Equipment

The QUICK COATER SC-708 series is an optimal sputter coater for preventing charge-up of large samples for SEM observation or analysis, as well as for processing a large number of samples at once. 【Features】 - Sample sizes and quantities can be selected in 1-inch increments: 4, 5, 6, 7, or 8 inches. - Equipped with coating mode and etching mode. - Supports not only sputter thin film production but also PDMS surface treatment during microchannel formation.

• Sputtering Equipment

The QUICK CARBON COATER SC-701CT is a dedicated carbon deposition coater that eliminates the hassle of sample preparation for EPMA and analytical SEM. Anyone can easily and conveniently perform carbon deposition. It achieves uniform deposition without individual variation and reduces thermal damage to samples. 【Features】 〇 Adopts a flash deposition method → Achieves uniform carbon deposition without individual variation 〇 Eliminates the need to shave carbon rods for each deposition operation 〇 Excellent at preventing carbon particles from wrapping around the sample surface due to exhaust (low vacuum) using only a rotary pump 〇 Can be used as a metal sputter coater by attaching an optional magnetron sputter unit (SC-MC).

• Evaporation Equipment

The QUICK MINI COATER SC-701Mk II ECO is a lightweight and compact coater specifically designed for pre-treatment of SEM samples. 【Features】 〇 Super easy operation with just one button 〇 Reduced ion damage due to the use of a magnetron cathode 〇 Small, compact & lightweight

• Coater

The "SC-701MkII" is the smallest compact coater in the series. It can also be used for electrode film application on devices and features simple and easy operation. It comes standard with an intermittent sputtering function to reduce ion damage. The T-S distance can be easily changed using a sample block. It is ideal for pre-treatment of SEM samples. 【Features】 ○ The smallest compact coater in the series ○ Low price / small and lightweight type ○ Intermittent coating function to prevent thermal damage For more details, please contact us or download the catalog.

• Coater

The Multi-Target Compact Coater SVC-700TMSG/Adexcel is a small film deposition device that generates plasma through direct current discharge using a magnetron cathode in a low vacuum environment. It sputters a metal target attached to the cathode with ions in the plasma, creating a thin film on the sample surface. Since three types of targets can be mounted simultaneously, it allows for target selection in a vacuum, enabling the production of multilayer films. 【Features】 ○ Three types of targets can be mounted simultaneously ○ Targets can be selected in a vacuum, allowing for the production of multilayer films ○ Optional attachments include a film thickness sensor and a sample heating unit ○ The exhaust device's upper part can be replaced with a resistance heating unit, and a dedicated power supply can be connected → Can also be used as a resistance heating vacuum evaporation device For more details, please contact us or download the catalog.

• Coater

The pattern generation device SPG-724 for electron beam drawing systems is not intended for semiconductor manufacturing but for research and development of fine circuits, micro-optical components, and nanomachines. The generation and deflection of the electron beam are performed by the SEM itself. By attaching the SPC-724 to the SEM, the observation SEM becomes a drawing device. In addition to the SEM body, the necessary components include a blanking device to turn the beam on and off, a current meter to measure exposure amounts, a pattern generator to send drawing patterns to the blanking device and deflector, and a computer to control these components. 【Features】 ○ Add-on style pattern generation device for EB lithography → Can be attached to various types of SEMs ○ User-friendly design that allows immediate realization of ideas using commercially available CAD ○ No specialized knowledge or skilled techniques required, as with dedicated electron beam drawing machines → Anyone can easily create patterns ○ Achieves batch exposure of wide areas (up to 5mm) For more details, please contact us or download the catalog.

• Electron microscope

☆Metal thin films, of course, as well as small RF sputtering devices for the production of insulating films/oxide films☆ Recommended POINT <Customization according to experimental purposes!!> 1. Three types of chambers available to match sample sizes 2. Cathode sizes compatible from 2 to 6 inches 3. The 2-inch cathode type also supports a three-source configuration = Achieving thin film stacking 4. A variety of options available Substrate heating unit / Substrate cooling unit / MFC unit, etc.

• Coater

The "SC-701HMCII" is a magnetron-type programmable sputter coater suitable for the fabrication of thin films such as W (tungsten), Ni (nickel), Cr (chromium), and Ti (titanium). It offers two modes of operation: full auto and manual, catering to all needs from beginner to professional use. The system control via software allows for finer and significantly more precise control of film deposition conditions. It comes standard with an automatic shutter mechanism. 【Features】 ■ Two modes of operation: full auto / manual ■ High-precision control system ■ Standard shutter device → Automatically opens/closes in conjunction with the set program ■ Real-time monitoring ■ Compact desktop-sized body For more details, please contact us or download the catalog.

• Coater

The "SC-701AT" is a fully automatic coater. It features fully automatic exhaust operation and is linked to film thickness control. It is ideal for preparing samples for scanning electron microscopes and can also be used for applying electrode films to devices. 【Features】 ○ Easily prepare samples for electron microscopes fully automatically ○ Film thickness control (simplified type) is possible with a preset method ○ Easy operation and high reproducibility thanks to its pre-treatment device For more details, please contact us or download the catalog.

• Coater