Customization according to experimental purposes is possible. Small RF sputtering device.
☆Metal thin films, of course, as well as small RF sputtering devices for the production of insulating films/oxide films☆ Recommended POINT <Customization according to experimental purposes!!> 1. Three types of chambers available to match sample sizes 2. Cathode sizes compatible from 2 to 6 inches 3. The 2-inch cathode type also supports a three-source configuration = Achieving thin film stacking 4. A variety of options available Substrate heating unit / Substrate cooling unit / MFC unit, etc.
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basic information
☆Metal thin films, of course, as well as small RF sputtering equipment suitable for the generation of insulating films/oxide films☆ Recommended POINT <Customization according to experimental purposes!!> 1. Three types of chambers available to match sample sizes 2. Cathode sizes compatible with 2 to 6 inches 3. The 2-inch cathode type also supports a three-source configuration = Achieving thin film stacking 4. A variety of options available Substrate heating unit / Substrate cooling unit / MFC unit, etc.
Price information
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Applications/Examples of results
Generation of insulating thin films/oxide films for various applications.
Line up（3）
| Model number | overview |
|---|---|
| SVC-700RFI | Dedicated 2-inch cathode (depo down) bench-top type small RF sputtering device |
| SVC-700RFII Type-I | Supports 2 to 4-inch cathodes (1 source) *2-inch is compatible with 3 source type RF sputtering device for research and development (output 300W) |
| SVC-700RFII Type-II | Model compatible with 6-inch cathodes RF sputtering device for research and development (output 300W) |
Company information
The management philosophy is to "pioneer the future of research and development with core technology." Our motto is to provide those involved in research and development with what they need at the right time, while enhancing the "expandability of device functions" and offering a "variety of options." Additionally, leveraging our "agility," we strive daily to meet the diverse needs of our customers.