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  3. ブルーオーシャンテクノロジー
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ブルーオーシャンテクノロジー

EstablishmentApril 14, 2008
capital900Ten thousand
number of employees5
addressTokyo/Shinjuku-ku/20F Mobaf, Shinjuku Island Tower, 6-5-1 Nishi-Shinjuku
phone03-4503-6532
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last updated:May 11, 2022
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ブルーオーシャンテクノロジー List of Products and Services

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Mini spin coater (desktop type)

Industry first! Compact coater with a maximum rotation speed of 8,000 rpm!

1. Compact and lightweight W180×D210×H200mm approximately 3.5Kg 2. Spindle speed Max 8000rpm 3. Workpiece dimensions 1 inch, 2 inches, 50mm□ 4. Workpiece fixation Vacuum suction using built-in vacuum pump 5. Utility AC 100V 2.0A outlet

  • Coater

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Wrinkle Removal Roll (Eco Stretch Roll)

This is a new wrinkle-removing roll with excellent novelty functions in the fields of functional films, metal foils, non-woven fabrics, textiles, paper, etc. (Patent obtained)

**Functions and Features** 1) There are two types of roll outer dimensions: φ110mm and φ130mm. 2) The outer circumference of the roll is composed of a stretch ring made of EPDM or silicone rubber. 3) This rubber ring has stretch elements that extend the substrate outward upon contact, providing a stretching effect due to roll rotation. 4) Depending on the roll's outer dimensions, 30 or 36 sets of stretch elements are installed in each stretch ring, and for a roll width of 800mm, it is composed of 54 sets of stretch rings. 5) This stretch roll does not require an external drive device; it is stretched solely by the contact force generated by the winding of the web substrate. 6) The stretch elements operate completely independently across the entire width of the roll, with no inactive areas in the intermediate zone. 7) The recommended wrapping angle for the roll ranges widely from 10° to 180°, and the response time for the stretching effect at the start of the device is quick. 8) It has ozone resistance functionality.

  • plastic
  • Composite Materials
  • Paper and pulp

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Linear motion system

It is a direct motion component with short lead times and low costs. We accept orders starting from small lots (1 piece).

We offer Linear Motion Systems with differentiated technology, strict quality control, and competitive pricing. We can provide shorter delivery times compared to domestic manufacturers. We offer a wide range of linear motion guides, from ultra-compact miniature types to standard ball types. Depending on different shapes, sizes, and other conditions, you can select the most suitable linear motion guide, from low-noise linear motion guides to ultra-high rigidity roller linear motion guides. We also accommodate various surface treatment processes and can propose clean specifications. 【Features】 - Enables precise positioning - Maintains stable accuracy over long periods - Eliminates gaps and maintains high rigidity - Achieves compact equipment and energy savings - Supports short delivery times

  • Other machine elements

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Lightweight tabletop die cutter

Achieve reduced liquid application! Realize a minimum of 5cc with a single application. Lightweight tabletop compact type, main unit 50kg.

1. Compact and lightweight machine size 2. Wide viscosity range of coating liquid 1cps to 100,000cps 3. Film thickness range: 1μ to 1.5mmt 4. Roll-to-roll type, automatic machines, etc. Supports customized specifications 5. Stripe coating (minimum coating width up to 2mm) 6. Automatic cleaning unit for die lip 7. Capable of producing two-layer and three-layer simultaneous coating dies 8. Wet on wet coating is possible

  • Coater

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Coating equipment for MEMS and semiconductor packages

We provide optimal coating systems for various mounting processes, including cutting-edge MEMS and semiconductor packaging processes.

Supports a wide range of production technologies for wafer-level CSP, TAB, COF, etc. - Excellent in-plane uniformity, capable of forming thin films and thick films at levels from 50nm to 100μm. - Coating examples: precise coating on thin films, thick films, uneven surfaces, and through holes. - We also sell equipment and conduct experiments and contract testing, so we can make proposals tailored to your applications and environments. 【Non-Contact Coating Equipment】 This coater allows for non-contact bulk coating of circular substrates such as wafers and disks without wasting coating liquid. It can handle high-viscosity liquids and thick films, which are difficult to coat with spin coaters. 【Precision Spray Coating Equipment】 Easily achieves coating on various substrates using a spray method. Spray coating samples can be produced easily with minimal materials. It accommodates a wide variety of workpieces, materials, and processes, including uneven substrates, thick films, and organic materials.

  • Coater

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Film Contract Testing (Coating and Cleaning)

We can accommodate short delivery times and small lots. Support from experienced technicians. We can handle materials from 50mm square sheets to 700mm wide rolls.

【Features】 - Short delivery times - Capable of handling small lots - Total solutions provided by experienced technicians - We flexibly respond to customer needs through joint development, prototype processing, and custom orders for small lots. 【Equipment Lineup】 - Cleaning - Roll-to-roll cleaning - Spin cleaning - Hydrocarbon cleaning - Vacuum drying - Coating - Slit coater - Spin coater - Roll coater - Spray coater - Surface treatment - Atmospheric pressure plasma treatment - Excimer UV irradiation - UV curing equipment - Laminating and bonding - Laminator - Bonding equipment - Hot press - Vacuum press - Auxiliary equipment and measuring instruments - Non-contact film thickness gauge, optical microscope, spectroscopic ellipsometer, contact angle meter, SEM-EDX, contact angle meter, and others. *If you have any requests for tests using other equipment, please feel free to contact us.

  • Coater

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Rental small slit coater

Experimental and development slit coater ・Substrate size: 200mm□ ・Rental period: 6 months (MAX) *From thin films to high viscosity

Rental-only slit coater! Contract processing (film formation and coating) is also available. Supported substrate size (MAX): 200mm□×0.4–1.1mmt Target work: Glass substrates, films, sheets Rental period: 1 month to 6 months 【Equipment Features】 - Substrate size: 200×200×0.4–1.1mmt - Stage size: 230×230mm - Film thickness: 0.5–100μm - Liquid system: 1 system - Viscosity: Several cps to 10,000 cps - Nozzle vertical drive: Servo motor - Table drive: Linear motor 【Main Applications and Examples】 - Universities, research and development institutions, National Institute of Advanced Industrial Science and Technology (AIST), material development, precision parts, optical components - Pharmaceutical research applications, automotive precision mold parts, cosmetics, electronic devices, semiconductors, liquid crystals

  • Coater

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Slit coater (for 200mm□)

Experimental small slit coater ・Substrate size: 200mm ・Viscosity: several cps to 10,000 cps ・Film thickness: 0.5 to 100μm

【Device Features】 - Substrate size: 200×200×0.4–1.1mmt - Stage size: 230×230mm - Film thickness: 0.5–100μm - Chemical system: 1 system - Viscosity: several cps to 10,000 cps - Nozzle vertical drive: servo motor - Table drive: linear motor

  • Coater

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Film laminating device

Compatible with flat presses and roll presses, capable of roll pressurization in a vacuum atmosphere.

【Device Features】 Film Size: MAX 400mm□ Maximum Pressure: Flat Press 400kN, Roll Press 50kN Heating Temperature: Max 200℃ Experimental testing is possible with a test machine. For detailed specifications, please contact us separately. 【Main Applications and Examples】 Lamination and molding of build-up substrates, embedded component substrates, flexible printed circuits, fuel cells, ceramic green sheets, and functional multilayer films. Production of fuel cell MEAs, lamination of glass and film substrates, lamination of green sheets, and thermosetting molding of engineering plastics. Applicable for prototyping and development to mass production processes for component lamination on substrates and thermal transfer molding.

  • Vacuum forming machine

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Roll brush

We accept orders starting from low-cost, small lots (1 piece). We can produce up to G10 size.

The need for the development of new concepts for shafts due to demands such as the large-scale, high-definition, and reduction of manufacturing costs for FPD is rapidly increasing. We are producing brush shafts that are lighter, eliminate bending, and minimize wobble. Types of core materials for brush shafts: 1. CFRP + SUS 2. CFRP + PVC 3. CFRP Pipe 4. CFRP Round Bar Product features: 1. Manufacturing sizes up to G10 have been successfully delivered. 2. Weight reduction achieved with CFRP (24T/65T) core materials. 3. Specifications that suppress metal contamination through resin channel brushes. *For details, please contact us for "Request for Materials."

  • Other conveying machines
  • Other cleaning machines
  • shaft

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Tabletop hot plate

Lightweight and compact tabletop type

【Device Features】 Board Size: MAX 370×470mm Temperature Range: MAX 200℃ Hot Plate GAP: 0.3mm (Proxy Type) Main Applications and Examples - Universities, research and development institutions, AIST, material and materials development, precision parts, optical parts - Pharmaceutical research applications, precision mold parts for automobiles, cosmetics, electronic devices, semiconductors, liquid crystals

  • Coater

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Organic cleaning device (explosion-proof specification)

It is a device that promotes drying by placing the substrate after cleaning and coating in a reduced pressure state. Evaluation and testing using experimental equipment are possible.

【Device Configuration】 - Target work basket dimensions: W300×D300×H250mm (made of SUS) - Target barrel basket dimensions: Φ250×D300mm (made of SUS) - Target work weight: Max 10kg - Cleaning process 1) Main cleaning - Vacuum + Ultrasonic (600W 26kHz) 2) Rinse cleaning - Atmospheric pressure + Degassing + Ultrasonic (600W 26kHz) 3) Vapor cleaning - Vacuum vapor 4) Drying - Vacuum self-heating drying - Takt time: Approximately 5 minutes (varies with the amount of work) - Safety measures 1) Motor is explosion-proof and safety-enhanced 2) All automatic valves are air-driven 3) Air purge inside ultrasonic transducer 4) Oil pan leakage sensor - Liquid holding capacity 1) Cleaning liquid (NS-100 Class 2 petroleum) Vacuum and rinse tanks 65L×2 tanks = 130L Distillation unit 90L Buffer and others 60L Total liquid volume 280L 2) Heat transfer oil (Class 4 petroleum) 80L

  • Processing Contract

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Excimer UV device (handheld type)

Ultra-compact handheld excimer UV device Body weight: 3.8kg Dimensions: W320×D260×H180mm Demo unit available for loan

Ultra-compact handheld excimer UV device Main unit weight: 3.8 kg Dimensions: W320 × D260 × H180 mm Demo units available for loan 【In-house experimental machine specifications】 - Maximum experimentable size: 600 × 700 mm - Lamp intensity: 50–140 mW - Number of lamps: 5 - Stage transport speed: 0.5–5.8 m/min - Atmosphere utilities: N2, CDA, ambient air - Clean room: Class 10,000 - Measurable with contact angle meter 【Features】 - High intensity and uniformity due to high-intensity RF discharge method - Direct irradiation from the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Intensity adjustment possible for each lamp - Effective lamp length: up to MAX G10 size 【Main applications】 - Surface modification cleaning of glass and films - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubrication oil curing - Resist removal and ashing

  • Coater

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Conveyor belt

We propose custom-made automation machines for all fields! We offer tailor-made automation machines that meet your needs, such as processing lines for electronic components.

【Conveyor System】 Total support from loaders and unloaders of various process equipment to standalone devices and entire lines. Capable of manufacturing up to MaxG10 size. Maintains a clean environment through non-contact transmission using magnetic gears, the adoption of anti-static rollers, and optimization of airflow. 【Robot System】 Promoting automation and labor-saving in manufacturing sites through integrated production from design to manufacturing and robot teaching. We listen to customer requests and current situations to propose a total system that optimizes the entire manufacturing line. 【Roll-to-Roll Conveying Line】 Achieving high-precision winding and conveying of "wide," "long," and "ultra-thin" films! We propose automatic winding and conveying machines compatible with various products such as LCD films, packaging films, and high-functionality films. We can also accommodate materials other than films, such as metal foils, paper, and new materials, so please consult with us. We design and manufacture unwinding and winding sections of process equipment tailored to customer needs. Tension (1-100N) and automatic conveying at low and high speeds are possible. Conveying is performed without causing scratches, wrinkles, or damage to the base material. Dual-side cleaning process treatment is possible through edge support conveying.

  • Touch Panel
  • Conveyor

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Spin coater (for organic EL)

Device lineup: Slit coater, spin coater, dip coater, tabletop coater. Capable of handling up to MaxG8 substrate size.

【Device Lineup】 Slit coater, spin coater, dip coater, tabletop coater 【Features of the Coater】 - Capable of handling substrate sizes from 10mm□ to G8. - A coater with high coating precision and excellent uniformity for film thicknesses ranging from thin to thick (approximately 1 to 500μm). - Available for evaluation using various test machines. - Maintains and improves uniformity of coating from low viscosity to high viscosity (a few cp to 5,000 cp). - Designed and manufactured according to customer applications and environments. 【Test Target Substrates, Workpieces】 - Glass: Substrate sizes from 10mm□ to G6 - Wafers: 2 inches to Φ300mm - Functional films: MAX 400×500mm Coating materials, viscosity - Various chemicals: resist, ink, paste, resin-based - Viscosity: a few cp to 5,000 cp - Film thickness: 1 to 500μm 【Main Applications, Examples】 - Universities, research and development institutions, National Institute of Advanced Industrial Science and Technology - Semiconductors, LCDs, organic EL, touch panels - Functional films - Material and material development - Precision parts, optical parts - Pharmaceutical and cosmetic research applications

  • Coater

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Slit coater (G6 size)

Precision coating pursuing uniformity of application Viscosity: several cp to 10,000 cp Substrate size: G8 size *Coating experiments available

【Device Features】 Target Substrate: G8 Size Coating Materials and Viscosity - Various chemicals, resists, resin-based materials, etc. - Viscosity: a few cp to 10,000 cp - Film Thickness: 1 to 100 μm Main Applications and Examples - Universities, research and development institutions, AIST, material and materials development, precision parts, optical components - Pharmaceutical research applications, precision mold parts for automobiles, cosmetics, electronic devices, semiconductors, liquid crystals 【Test Experiment Equipment】 - Clean booth (installed within a clean room) - Slit coater 400×500 mm - Tabletop spin coater Φ500 series (compatible with inner cup method) - Tabletop spin coater Φ300 series - Hot plate - Film thickness measurement device

  • Coater

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Excimer UV Contract Testing

Possible experimental size: 600×700mm (maximum) Lamp illuminance: 50–140mW Contract processing testing available Demo unit available for loan

【Experimental Equipment Specifications】 - Usable size: 600×700mm (maximum) - Lamp illuminance: 50–140mW - Number of lamps: 5 - Stage transport speed: 0.5–5.8m/min - Atmosphere utilities: N2, CDA, ambient air - Clean room: Class 10,000 - Measurable with a contact angle meter 【Features】 - High illuminance and high uniformity due to high-intensity RF discharge method - Direct irradiation from the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit even in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Adjustable illuminance for each lamp - Effective lamp length: up to MAX G10 size 【Electrode-less Irradiation Unit & N2 Slit Holder Structure】 The lamp structure does not have electrodes on the irradiation surface, resulting in no obstruction of light and minimal transmission or reflection losses, leading to high efficiency. Nitrogen (CDA) is ejected along the lamp tube wall from individual lamp holders. This efficiently generates ozone and allows for uniform control of oxygen concentration with a small amount. 【Main Applications】 - Surface modification cleaning of glass and films - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubricant curing - Resist removal and ashing

  • Coater

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High-intensity excimer UV device

Rental-only excimer UV - Long-term rental available from 15 days to over 1 year - Monthly installment payments are possible - No repair costs for the equipment will be incurred.

**Advantages of Rental** - Difficult to introduce equipment - When existing equipment breaks down - When an excimer UV device is urgently needed - Want to reduce maintenance, upkeep, property tax, and management costs - New equipment introduction possible: Please consult separately **Features** - High brightness and high uniformity due to high-intensity RF discharge method - Direct irradiation on the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit even in a vacuum environment - Significant reduction in nitrogen usage due to unique slit holder - Adjustable illuminance for each lamp - Effective lamp length: up to MAX G10 size **Electrode-less Irradiation Unit & N2 Slit Holder Structure** The lamp structure does not have electrodes on the irradiation surface side, resulting in no obstruction of light and minimal transmission or reflection losses, making it highly efficient. Nitrogen (CDA) is ejected along the lamp tube wall from individual lamp holders. This efficiently generates ozone and allows for uniform control of oxygen concentration with a small amount. **Main Applications** - Cleaning and surface modification of glass, films, and wafers - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubricant hardening - Resist removal and ashing - Cleaning of chip, film, and substrate bonding surfaces

  • Coater

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Film vacuum decompression device (explosion-proof specification)

Cleaning experiments using hydrocarbons (such as NS-100) are possible (compatible with ultrasonic cleaning). Explosion-proof specifications: automatic fire extinguishing system. Equipment compliant with international safety standards.

3-Tank Hydrocarbon Cleaning Machine 【Device Configuration】 - Target Work Basket Dimensions: W300×D300×H250mm (SUS) - Target Barrel Basket Dimensions: Φ250×D300mm (SUS) - Target Work Weight: Max 10kg - Cleaning Process 1) Main Cleaning - Vacuum + Ultrasonic (600W 26kHz) 2) Rinse Cleaning - Atmospheric Pressure + Degassing + Ultrasonic (600W 26kHz) 3) Vapor Cleaning - Vacuum Vapor 4) Drying - Vacuum Self-Heating Drying - Cycle Time: Approximately 5 minutes (varies with work quantity) - Safety Measures 1) Motor is explosion-proof and safe design 2) All automatic valves are air-driven 3) Air purge inside ultrasonic transducer 4) Oil pan leak sensor - Liquid Holding Capacity 1) Cleaning Liquid (NS-100 2nd Petroleum) Vacuum and Rinse Tanks: 65L×2 tanks = 130L Distillation Unit: 90L Buffer and Others: 60L Total Liquid Volume: 280L 2) Heat Transfer Oil (4th Petroleum): 80L

  • Processing Contract

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Film defect inspection device

Inspection of 300mm wafers can be performed in less than one second for the entire field of view in a single shot.

【Device Overview】 It is capable of inspecting 300mm wafers in less than one second for the entire field of view in a single shot. Due to the short inspection time, it is also adopted in fully automated inspection lines. It starts with a small field optical system and can be applied to internal void inspections by using infrared as an optional light source. In recent years, wafers have been getting thinner, but this is a high-precision wafer crack inspection device that quickly inspects the entire field of view for issues such as the unevenness of BG processing, polishing marks, and chip cracks caused by stress. 【Device Features】 In addition to automatic inspection, a standalone type is also available, allowing for manual inspection. It can set any slice level, enabling inspections tailored to specific needs. Depending on the application, it also has a function for removing so-marks, automatically extracting defect components excluding polishing marks. 【Device Applications】 ● Patterned wafer crack inspection ● Bare wafer crack inspection ● Wafer edge damage inspection ● Evaluation of BG polishing marks ● Evaluation of slurry ● Residual stress in glass substrates ● Evaluation of stress relief ● Tension inspection of BG tape ● Inspection of distortion and scratches on compound wafers

  • Visual Inspection Equipment

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Film surface inspection device

It is a compound wafer appearance inspection device for SiC, sapphire, and GaN wafers.

It is effective for inspecting internal micro-pipes, delamination, surface scratches, foreign substances, polishing marks, and more. The inspection system features four optical systems: super macro, differential interference, dark field, and transmission, all equipped with autofocus, allowing inspections to be conducted in the same coordinate system using an automatic stage. Optionally, AFM and wafer thickness measurements can also be added to the same coordinate system. 【Device Applications】 ■ Internal micro-pipes in wafers ■ Internal delamination in wafers ■ Surface scratch inspection, polishing mark inspection ■ Foreign substance inspection (including internal) ■ Measurement of surface roughness and pattern inclination (optional AFM) ■ Inspection of scratches, pits, and bubbles ■ Non-contact thickness measurement (optional thickness gauge) ■ Micro-cracks, pinholes ■ General appearance inspection and more.

  • Visual Inspection Equipment

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Film Coating Contract Testing

Contract manufacturing of 10mm□ to G8 substrates is possible. Custom orders for small lots are available. We cater to a variety of needs.

**Features** We will fully support our customers' technology and prototype development. By leveraging our technical skills, proposal capabilities, and proactive approach in coating, printing, and laminating, we aim to become a reliable and trustworthy business partner for our customers. 1. We can process substrates from 10mm square to G8. 2. To meet our customers' needs, we flexibly respond with joint development, prototype processing, and custom orders in small lots. 3. We also offer sales and rentals of testing equipment, providing proposals tailored to our customers' applications and environments. **Target Substrates and Workpieces** Glass: 10mm square to G8 size Wafers: Φ2 inches to Φ300mm Functional films: MAX 400×500mm Optical lenses, precision small parts, etc. **Coating Materials and Viscosity** - Various chemicals: resist, ink, paste, resin-based, etc. - Viscosity: from a few cp to 10,000 cp - Film thickness: 1 to 100μm **Main Applications and Examples** - Universities, research and development institutions, AIST, material and material development, precision parts, optical components - Pharmaceutical research applications, precision mold parts for automobiles, cosmetics, electronic devices, semiconductors, liquid crystals

  • Coater

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Inner cup type spin coater

Improvement of in-plane distribution using the inner cup method and reduction of coating liquid. Affordable pricing. Demo units available for loan. Rental options: from 15 days to over 1 year.

【Device Specifications】 ・ Board Size: MAX 200mm□ board (within diagonal 300mm) ・ Board Transfer Method: Manual set/reset ・ Device Weight: Approximately 50Kg 【Unit Configuration】 ・ Cup Outer Diameter: φ500mm ・ Cup Material: SUS + Polished #400 ・ Cup Treatment: Option - Teflon Coating (Inner surface of cup & inner cup) ・ Board Fixing Method: Vacuum suction method ・ Table: Option - Please consult separately for size and material ・ Spin Motor: AC servo motor ・ Rotation Speed: MAX 2000rpm (depends on board size and thickness) ・ Rotation Accuracy: ±2rpm ・ Rotation Display: Digital display on touch panel ・ Rotation Control: Set via touch panel

  • Coater

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Experimental excimer UV irradiation device

High-intensity 172nm excimer lamp, surface illuminance of 150mW/cm² or more.

**Features** - High brightness and high uniformity due to high-intensity RF discharge method - Direct irradiation on the lamp tube surface without electrodes or quartz windows on the irradiation surface - Excimer lamps can be lit even in a vacuum environment - Significant reduction in nitrogen usage due to a unique slit holder - Adjustable illuminance for each lamp - Effective lamp length: up to MAX G10 size **Electrode-less Irradiation Unit & N2 Slit Holder Structure** The lamp structure does not have electrodes on the irradiation surface, resulting in no obstruction of light and minimal transmission or reflection losses, leading to high efficiency. Nitrogen (CDA) is ejected along the lamp tube wall from individual lamp holders. Ozone is generated efficiently, allowing for uniform control of oxygen concentration with a small amount. **Main Applications** - Surface modification for cleaning glass, films, and wafers - Bonding of films, glass, resins, metals, etc. - HDD cleaning, modification, and lubrication oil curing - Resist removal and ashing - Cleaning of chip, film, and substrate bonding surfaces **Examples of Equipment Installation** - Pre-cleaning equipment for G8 size TFT substrate film formation - Roll-to-roll cleaning equipment - Resist ashing equipment

  • Coater

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Tabletop AFM

Electromagnetic scanner type (patented) allows for damage-free and non-destructive measurements at a low cost. It has functions equivalent to expensive AFM.

Even beginners can achieve accurate measurements! You can measure non-destructively just by setting the sample! There is a lineup ranging from handheld types to fully automatic measurements with cassettes. 【Product Features】 - Ultra-compact with a depth and width of 15cm, easy to carry anywhere - Evaluation and demo units available for loan. Rich measurement inspection track record - Achieves low cost while having functions comparable to expensive AFMs - By using an electromagnetic scanner (patented) for scanning, there is no need to move the substrate - Does not use piezo elements commonly used in AFMs, so there is no nonlinear creep or aging changes - Can measure without damage and non-destructively - AFM carbon nano-probes (high resolution, long lifespan) 【Software Applications】 - Fine line width measurement - Surface shape measurement of silicon and compound wafers - Surface inspection of quartz glass - Mask pattern measurement - Surface inspection and evaluation after polishing and CMP - Thin film step measurement, continuous and discontinuous measurement during film formation - Observation of magnetic fields in hard disks - Film surface inspection - High-precision surface analysis of metal molds - Evaluation of optical components and precision parts

  • Semiconductor inspection/test equipment

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Winding and unwinding machine (roll-to-roll method)

For those considering film transport for the first time, for those struggling with roll-to-roll transport.

Design and manufacture of unwinding and rewinding sections of process equipment tailored to customer needs. Tension (1-100N) and automatic transport at low and high speeds are possible. Transport is carried out without causing scratches, wrinkles, or damage to the substrate. Both-sided cleaning process treatment is possible through end-face support transport. Case Studies: Functional films, organic EL, liquid crystal devices, secondary batteries. Target Substrates: Functional films, PEN, PET, etc. Equipment Installation Examples: Unwinding and rewinding units for defect inspection equipment. Unwinding and rewinding units for exposure equipment. Unwinding and rewinding units for film deposition equipment. Unwinding and rewinding units for printing equipment.

  • Touch Panel

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Coating contract testing (precision coating)

We can accommodate short delivery times and small lots. Support from experienced technicians.

Features - Short delivery time - Capable of handling small lots - Total solutions provided by experienced technicians - Precision coating that pursues uniformity in application - Rental of spin coaters is also available, allowing us to propose solutions tailored to your applications and environment. Target substrates and workpieces - Glass: 10mm□ to 200mm□; 400×500mm - Wafers: Φ2 inches to Φ300mm - Functional films: MAX 400×500mm - Optical lenses, precision small parts, etc. Coating materials and viscosity - Various chemicals, resists, resin-based materials, etc. - Viscosity: a few cp to 10,000 cp - Film thickness: 1 to 100μm Main applications and examples - Universities, research and development institutions, National Institute of Advanced Industrial Science and Technology (AIST), material development, precision parts, optical components - Pharmaceutical research applications, precision mold parts for automobiles, cosmetics, electronic devices, semiconductors, liquid crystals Various equipment - Clean booth (installed within a clean room) - Slit coater - Tabletop spin coater Φ500 series (compatible with inner cup method) - Tabletop spin coater Φ300 series - Hot plate - Film thickness measurement device

  • Coater

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Tabletop spin coater

Precision Coating Spin Coater Open-Type Desktop Model for Research and Development (R&D) Applications Demo Unit Available for Loan Rental Options: 15 Days to Over 1 Year

【Device Specifications】 ・ Board Size: φ10~150mm□ Board ・ Board Transfer Method: Manual Set/Reset ・ Device Weight: Approximately 22Kg 【Unit Configuration】 ・ Cup Outer Diameter: φ300mm ・ Cup Material: SUS + Polished #400 ・ Cup Treatment: Optional Teflon Coating (Inner surface of cup & inner cup) ・ Board Fixing Method: Vacuum Suction Method ・ Table: Optional *Please consult for size and material separately ・ Spin Motor: AC Servo Motor ・ Rotation Speed: MAX 9000rpm (depending on board size and thickness) ・ Rotation Accuracy: ±2rpm ・ Rotation Display: Digital display on touch panel ・ Rotation Control: Set via touch panel

  • Coater

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Spin coater (MAX 200mm□)

Precision Coating Spin Coater Open-Type Desktop Model for Research and Development (R&D) Applications Demo Unit Available for Loan Rental Options: 15 Days to Over 1 Year

【Device Specifications】 ・ Board Size: φ4 to 250mm square board ・ Board Transfer Method: Manual set/reset ・ Device Weight: Approximately 48Kg 【Unit Configuration】 ・ Cup Outer Diameter: φ500mm ・ Cup Material: SUS + Polished #400 ・ Cup Treatment: Optional Teflon Coating (Inner surface of cup & inner cup) ・ Board Fixing Method: Vacuum suction method ・ Table: Optional *Please consult for size and material separately ・ Spin Motor: AC servo motor ・ Rotation Speed: MAX 6000rpm (depending on board size and thickness) ・ Rotation Accuracy: ±2rpm ・ Rotation Display: Digital display on touch panel ・ Rotation Control: Set via touch panel

  • Coater

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Organic EL automatic cleaning device (film cleaning process)

Cleaning equipment for precision parts for smartphones, semiconductor devices, organic EL, and automotive parts.

Explosion-proof specifications, use of organic solvents, cleaning of precision parts and smartphone accessories.

  • Other semiconductor manufacturing equipment

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Dip coater (film precision coating)

Automatic precision dip coating equipment, approximately 20 units of track record.

Numerous achievements in functional films, organic EL, LCD, semiconductor devices, and precision components for smartphones.

  • Coater

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Rental-only spin coater (desktop type)

Industry first! Rental-only spin coater with a simple inner cup system, compact tabletop type. PCB: Max 250mm square.

Industry first! Rental-only spin coater Contract processing (film formation and coating) also available Supported substrate sizes (MAX): 250mm□ and 300mm wafers Target workpieces: glass substrates, silicon wafers, films Rental period: 15 days to over 1 year Options available for table production, automatic supply lines, etc. Compact, tabletop type

  • Coater

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Spin coater for liquid crystal masks

Automatic spin coater for LCD photomasks from G2 to G6.

Supports a wide variety of photomask sizes. This automatic mask spin coater, using an inner cup method, is capable of forming a wide range of films, excels in film thickness uniformity and stability, and achieves high yield.

  • Coater

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Organic EL cleaning device (film cleaning)

Handling of various chemical cleaning, ultrasonic cleaning, and photolithography equipment.

More than 100 chemical wet stations for electronic devices such as semiconductor devices, MEMS, LCD, organic EL, and touch panels have been delivered. Demo units and evaluation systems are fully equipped.

  • Other semiconductor manufacturing equipment

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Film surface modification device (roll-to-roll type)

High-performance film and organic EL roll-to-roll plasma equipment

- Functional films, organic EL research film modification device - Compatible with films of width 200 to 300 mm - Capable of left-right reciprocating transport with a normal pressure plasma generation device in the center - Option to select guide film insertion or protective film alignment winding mode - Transport speed of 0.1 to 1 m/min (actual achievement of 4 m/min)

  • Other semiconductor manufacturing equipment

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Film lamination device (roll-to-roll method)

Laminating equipment compatible with a variety of films and glass.

In recent years, we have successfully commercialized not only laminating machines but also slitting and cutting machines, as well as automated machinery. We provide integrated production from design to manufacturing. We have manufactured numerous processing and production machines to date. We also accept custom-made line consultations for customers, not limited to laminating. Additionally, we have dozens of machines for test processing, allowing for repeated experiments to select models and functions. Please feel free to consult with us.

  • Other semiconductor manufacturing equipment

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Film cleaning device (roll to roll)

Functional film and organic EL cleaning device

It is possible to make the processing section compact through dip treatment using low-speed conveyance. This can significantly reduce the amount of pure water used and the footprint.

  • Other semiconductor manufacturing equipment

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Conveyor shaft for transportation

Stainless steel pipes and solid drawn materials are used. Special specification shafts (CFRP press-fit and PVC wrapped) can also be manufactured.

After manufacturing the SHAFT and ROLLER, or after assembling the SHAFT and ROLLER, we conduct an inspection process to provide high-quality products. There is an urgent need for the development of new concepts for shafts due to the increasing demands for larger and higher-resolution FPDs and cost reduction in manufacturing. We are producing shafts that are lighter, eliminate bending, and minimize runout. These are commonly used in the semiconductor field, PDP, LCD manufacturing equipment, chemical equipment, food equipment, precision machinery industry, and printed circuit board industry. For more details, please download the catalog or contact us.

  • shaft
  • Food Conveyor Equipment

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Plastic bearing

We accept orders starting from low cost and small quantities (1 piece). These are resin bearings that can be manufactured in sizes ranging from JIS standards to custom sizes.

We accept orders starting from low-cost, small lots (1 piece). These are resin bearings that can be manufactured in sizes ranging from JIS standards to special sizes. We have a proven track record of supplying to the food, automotive, and electronics industries. Please feel free to request a quote or contact us. For bearings used in special environments, we produce them by combining various special materials such as plastics, ceramics, PEEK, and fluororesins for the inner and outer rings, retainers, and rolling elements to ensure they can be used under special environmental conditions. For more details, please download the catalog or contact us.

  • Other machine elements
  • Plastic bearings
  • Metal bearings

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PEEK bearing

We accept orders starting from low cost and small quantities (1 piece). This is a PEEK bearing that can be manufactured in sizes ranging from JIS standards to custom sizes.

We accept orders starting from low-cost, small lots (1 piece). These are PEEK bearings that can be manufactured in special sizes from JIS standards. We have numerous delivery records to the food, automotive, and electronics industries. Please feel free to request a quote or inquire with us. These bearings are made from high-performance thermoplastic materials that exhibit excellent heat resistance, corrosion resistance, self-lubrication, radiation resistance, smoke resistance, and mechanical properties. Product Features: 1. Excellent heat resistance (continuous use temperature of 200°C) 2. Superior corrosion and solvent resistance 3. Excellent self-lubrication and outstanding wear resistance even without oil or grease supply 4. Exceptional mechanical properties (high tensile and bending strength) 5. Excellent radiation resistance 6. Superior electrical properties Product Specifications: Deep groove ball bearings, angular contact bearings, thrust bearings, self-aligning ball bearings *For more details, please request our materials.

  • Other machine elements

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Ceramic bearing

We accept orders starting from low cost and small quantities (1 piece). These are ceramic bearings that can be manufactured in special sizes as well as JIS standards.

We accept orders starting from low-cost, small lots (1 piece). These are resin bearings that can be manufactured in special sizes from JIS standards. We have a proven track record of supplying to the food, automotive, and electronics industries. Please feel free to request a quote or inquire. They are made from Fine ceramic materials that possess characteristics such as corrosion resistance, heat resistance, non-magnetic properties, lightweight, and insulation, making them suitable for special environmental fields where conventional steel (SUT2) bearings are difficult to use. Product Features: 1. Corrosion Resistance: Usable in strong acids, alkalis, and seawater. 2. Heat Resistance: No change in hardness or strength even at high temperatures. 3. Non-Magnetic, Insulating: Usable in magnetic fields and prevents electrical generation. 4. Lightweight: Lighter than general bearings. 5. High Strength: Hardness and longitudinal elastic modulus are higher than bearing steel. 6. High-Speed Rotation: The rolling elements (balls) are light, reducing centrifugal force during rotation. Product Specifications: Deep groove ball bearings, angular contact bearings, thrust bearings, automatic self-aligning ball bearings. *For details, please request materials.

  • Other machine elements

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Magnet gear

Non-contact drive transmission is possible on the conveyor. Since it is non-contact, there is no dust generation, making it ideal for clean transportation.

This is a magnet made using anisotropic NdFeB rare earth particles, utilized as a non-contact drive gear in the transport systems within the manufacturing processes of the pharmaceutical, food and beverage, LCD, organic EL, and semiconductor industries, particularly in clean environments. We offer various types depending on the number of units, inner and outer diameters, and fixing methods. For more details, please download the catalog or contact us.

  • Other conveying machines
  • Food Conveyor Equipment
  • Sealing

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CFRP shaft

CFRP is a lightweight and strong material with a high specific strength, superior mechanical properties, and a lower density than metal materials such as iron and aluminum.

The need for the development of new shaft concepts driven by demands such as the large-scale, high-definition, and cost reduction of FPDs is rapidly increasing. We are manufacturing shafts that are lighter, eliminate flex, and minimize wobble. Types of shafts: 1. CFRP + SUS 2. CFRP + PVC 3. CFRP Pipe 4. CFRP Round Bar Product features: 1. Realization of weight reduction due to the large scale of FPDs 2. Manufacturing capabilities with delivery records up to G10 size 3. CFRP (24T/65T) 4. Unlike other makers, we manufacture the entire shaft process in-house 5. Also sold as assembled products with shafts and transport rollers. *For details, please request materials.

  • Other conveying machines
  • Other cleaning machines
  • shaft

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