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  2. Testing, Analysis and Measurement
  3. 一般財団法人材料科学技術振興財団 MST
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一般財団法人材料科学技術振興財団 MST

EstablishmentAugust 1, 1984
addressTokyo/Setagaya-ku/Kitaomi 1-18-6
phone03-3749-2525
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last updated:May 26, 2025
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一般財団法人材料科学技術振興財団 MST List of Products and Services

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Mass spectrometry Mass spectrometry
 【分析事例】高分子材料 【分析事例】高分子材料
【測定法】計算科学・AI・データ解析 【測定法】計算科学・AI・データ解析
Photoelectron spectroscopy Photoelectron spectroscopy
[Measurement Method] Electron Microscopy Observation and Analysis [Measurement Method] Electron Microscopy Observation and Analysis
Vibrational spectroscopy Vibrational spectroscopy
Measurement Method: X-ray Diffraction Related Measurement Method: X-ray Diffraction Related
[Measurement Method] Related to SPM [Measurement Method] Related to SPM
Measurement Method: Failure Analysis Measurement Method: Failure Analysis
[Measurement Method] Other Measurement Methods [Measurement Method] Other Measurement Methods
Processing methods and treatment methods Processing methods and treatment methods
Other services and support information Other services and support information
[Analysis Case] LSI・Memory [Analysis Case] LSI・Memory
[Analysis Case] Optical Devices [Analysis Case] Optical Devices
[Analysis Case] Solar Cells [Analysis Case] Solar Cells
[Analysis Case] Fuel Cell [Analysis Case] Fuel Cell
[Analysis Case] Display [Analysis Case] Display
[Analysis Case] Oxide Semiconductors [Analysis Case] Oxide Semiconductors
[Analysis Case] Power Device [Analysis Case] Power Device
[Analysis Case] Electronic Components [Analysis Case] Electronic Components
[Analysis Case] Secondary Battery [Analysis Case] Secondary Battery
[Analysis Case] Lighting [Analysis Case] Lighting
[Analysis Case] Manufacturing Equipment and Components [Analysis Case] Manufacturing Equipment and Components
[Analysis Case] Biotechnology [Analysis Case] Biotechnology
[Analysis Case] Cosmetics [Analysis Case] Cosmetics
[Analysis Case] Food [Analysis Case] Food
[Analysis Case] Pharmaceuticals [Analysis Case] Pharmaceuticals
[Analysis Case] Medical Devices [Analysis Case] Medical Devices
Analysis Case: Daily Necessities Analysis Case: Daily Necessities
[Analysis Case] Environment [Analysis Case] Environment
[Analysis Case] Others [Analysis Case] Others
Materials from the exhibition where MST exhibited. Materials from the exhibition where MST exhibited.
Mass

Mass spectrometry

◆SIMS (Secondary Ion Mass Spectrometry) ◆TOF-SIMS (Time-of-Flight Secondary Ion Mass Spectrometry) ◆TG-DTA-MS (Thermogravimetric Differential Thermal Analysis Mass Spectrometry) ◆GC/MS (Gas Chromatography Mass Spectrometry) ◆LC/MS (Liquid Chromatography Mass Spectrometry) ◆LC/MS/MS (Liquid Chromatography Tandem Mass Spectrometry)

Differentiation of mass spectrometry methods for solid sample surfaces

It is effective to differentiate between the two methods according to the purpose components and the size of the imaging field.

TOF-SIMS and MALDI-MS, which are representative mass spectrometry methods for solid sample surfaces, both enable qualitative analysis and imaging analysis. TOF-SIMS, which utilizes hard ionization methods, can detect inorganic and organic components with masses up to several hundred with high sensitivity. On the other hand, MALDI-MS, which employs soft ionization methods, can detect polymers in the range of thousands to tens of thousands. Additionally, the spatial resolution of the images also varies depending on the diameter of the irradiation beam.

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[Analysis Case] Identification and Quantitative Evaluation of Solvents and Additives in LIB Electrolytes

Qualitative and quantitative evaluation is possible from the sampling of the electrolyte.

The electrolyte of lithium-ion secondary batteries can be qualitatively and quantitatively analyzed using GC/MS. In the example below, ethylene carbonate (EC) and ethyl methyl carbonate (EMC) were identified as organic solvents, and vinylene carbonate (VC) was identified as an additive. It is also possible to determine the composition ratio of the solvents and the content of the additives. Additionally, other additives such as fluoroethylene carbonate (FEC) and ethylene sulfite (ES) can also be evaluated.

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[Analysis Case] Analysis of Solvents and Additives in Lithium-Ion Secondary Battery Electrolytes

Extraction of electrolyte from the product and component evaluation.

The characteristics and reliability of lithium-ion secondary batteries are greatly influenced by materials, among which the impact of the electrolyte is said to be significant. Commercial products in various shapes, such as cylindrical and laminated types, can have their electrolytes extracted using appropriate methods, allowing for the identification of organic solvents and additives. The following case involves extracts from prismatic batteries, confirming the use of ethylene carbonate (EC), ethyl methyl carbonate (EMC), and diethyl carbonate (DEC) as organic solvents, and fluoroethylene carbonate (FEC) as an additive.

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[Analysis Case] Structural Analysis of Tape Adhesives by GC-MS

Structural analysis of adhesives is possible using pyrolysis GC/MS method.

Adhesive tapes are used for a wide range of applications, including everyday household uses, as well as in medical, construction, and insulation purposes. The adhesives used for these tapes vary depending on their application, and various materials are employed. This case study introduces an example of structural analysis of the adhesives in commercially available adhesive tapes using thermal decomposition GC/MS method. Measurements of three types of tapes revealed that they each used different materials: acrylate-based, styrene/isoprene-based, and silicone-based.

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[Analysis Case] Evaluation of the Component 18-MEA on Hair Surface

It is possible to evaluate 18-MEA, a component of the hair surface, using TOF-SIMS.

The surface of the hair cuticle is covered with a lipid called 18-MEA (18-methyl eicosanoic acid). 18-MEA is said to be the source of hair shine and smoothness, and when it decreases due to UV rays or hair coloring, the cuticle becomes more susceptible to damage. In this case, we will present the results of evaluating the differences in 18-MEA on the surfaces of healthy hair (hair near the root that has not been treated with hair color) and damaged hair (hair that has been treated with hair color) using TOF-SIMS.

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[Analysis Case] Evaluation of Component Distribution in Skin Cross-Section

It is possible to visualize molecular information of organic and inorganic substances.

We created skin tissue samples and evaluated the distribution of biogenic components in freeze-dried samples using TOF-SIMS. Since TOF-SIMS identifies components based on the mass of molecular ions, it does not require labels such as fluorescent substances, allowing for the evaluation of distribution without the influence of labeled materials. The mapping results confirmed that arginine, a natural moisturizing factor (NMF), and cholesterol, which retains moisture as an intercellular lipid, are localized in the stratum corneum. This method is also effective for assessing the permeation state during drug application.

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[Analysis Case] Composition and Impurity Analysis of Thin Films, Bulk, and Powder Materials

Quantitative analysis of main components and metallic impurity elements in IGZO using CP-MS.

IGZO thin films, which are transparent oxide semiconductors, are being researched and developed as TFT materials for displays. IGZO is a material whose properties change based on the composition of the thin film and the amount of impurities within it, making it important to obtain information about the composition and impurities. This time, we will introduce a case where the main components and the amounts of metallic impurity elements in IGZO powder, the raw material for the thin film, were evaluated with high precision using ICP-MS. Analysis is possible not only for powders but also for bulk and thin films.

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[Analysis Case] Component Analysis of Food Wrap Film Surface

Analysis of the compositional changes on the surface of the wrap film before and after heating using TOF-SIMS.

We analyzed the surface components of three types of commercially available food wrap films (A, B, C) using TOF-SIMS. In this document, we focused on the outermost surface of the wrap films, as shown in Figure 1.

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[Analysis Case] Analysis of Functional Ingredient Concentration in Food

Evaluation case of resveratrol concentration in red wine.

Resveratrol is a type of polyphenol and a substance that has garnered attention as a natural antioxidant. Resveratrol, which is abundant in grape skins, is also present in red wine made from whole grape skins. This document presents an analytical case in which the amount of resveratrol in three types of commercially available red wine was measured and compared using the LC/MS/MS method.

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[Analysis Case] Composition Analysis of UV Curing Resin

The identification capability is enhanced when combined with soft ionization methods.

UV-curable resins harden quickly when exposed to ultraviolet light and are widely used as coating materials and adhesives due to their ease of use. In acrylate resins, which are commonly used materials, the molecular ions of acrylate monomers are difficult to detect using the conventional ionization method of EI in GC/MS analysis, leading to insufficient structural estimation. Here, we introduce a case where, in addition to the partial structural information obtained from the conventional EI method, the use of the soft ionization method FI enabled the detection of molecular ions, allowing for the estimation of the structure of acrylate monomers.

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[Analysis Case] Evaluation of Glass Fiber Reinforced Plastic using X-ray CT and GC/MS

Evaluation of GFRP is possible according to the purpose.

Glass Fiber Reinforced Plastics (GFRP) are inexpensive, lightweight, and high-strength materials. Understanding their components, distribution, and internal structure is an important aspect of product design. This document presents case studies evaluating the components and structure of GF-reinforced PEEK (Poly Ether Ether Ketone) as GFRP material, as well as the degradation components of the resin after UV exposure.

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[Analysis Case] Investigation of the Causes of Yellowing in Polyurethane

By using PDA and MS in LC, it is possible to qualitatively analyze colored extracts.

Many organic materials (resins) may discolor due to aging and other factors. The causes include the formation of conjugated double bonds within the polymer, the degradation of additives contained in the resin, and the transfer of surrounding substances, among others. When the degradation of additives is the cause, the responsible substances can be analyzed by elution using methods such as LC or GC. Here, we provide an overview of the causes of resin discoloration and analysis methods, and introduce a case where the coloring substances responsible for yellowing in polyurethane were separated by LC and qualitatively identified using a combination of PDA and MS.

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[Analysis Case] Composition Analysis of the Surface Film on the Positive Electrode of Secondary Batteries

Evaluation of the distribution of organic components and active substances on the surface, qualitative analysis.

The segregation of components and the formation of films on the surface of the positive electrode of lithium-ion secondary batteries are factors that influence the electric capacity. We will introduce a case study on Li(NiCoMn)O2 (NCM), which is used as a positive electrode, where micro-region mapping was conducted using AES, and qualitative analysis of organic components (binder) and active material surface films was performed using XPS and TOF-SIMS. These methods allow for analysis with a series of treatments conducted under an Ar atmosphere, which helps to suppress the alteration of the sample.

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[Analysis Case] Rietveld Analysis of Secondary Battery Cathode Materials

Quantitative analysis of positive electrode active materials, precise evaluation of crystal structure.

In lithium-ion secondary batteries, Li(NiCoMn)O2 (NCM) used as the positive electrode can achieve higher capacity by increasing the Ni ratio, and it also excels in high-temperature storage, making it suitable for mass production for automotive applications. On the other hand, cation mixing, where Ni ions occupy Li sites, is considered one of the factors contributing to the degradation of secondary batteries. This presentation will introduce a case where the metal content of the positive electrode active material was evaluated using ICP-MS, the crystal structure was assessed using XRD, and the results were used to perform Rietveld analysis to evaluate the proportion of cation mixing.

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[Analysis Case] Qualitative and Structural Analysis of Resin (Synthetic Polymer)

Insights into molecular structure can be obtained through combined analysis using FT-IR and thermal decomposition GC/MS.

Resins (synthetic polymers) are polymers of monomers and have characteristic functional groups depending on their type. Due to their structure, they exhibit properties such as heat resistance, toughness, and electrical insulation, making them widely used in packaging materials, adhesives, paints, and more. Structural analysis is important for understanding the properties of resins, and common analytical methods include FT-IR and thermogravimetric GC/MS. FT-IR allows for the evaluation of functional groups, while thermogravimetric GC/MS enables the assessment of monomers and partial structures, so by combining these two methods, structural analysis of a wide variety of resins becomes possible.

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Analysis of Corrosive Gases Emitted from Resin

Analysis of corrosive gases generated from resin.

Resin materials such as adhesives may release gas components when heated, even after curing. If resin is present in manufacturing equipment, the released gas components can adversely affect the equipment or products, making it important to understand the outgassing components at the actual temperature and atmosphere in which the materials will be used. This case presents the results of analyzing the gas generated by heating epoxy-based adhesive after curing using headspace-GC/MS.

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[Analysis Case] Analysis of All-Solid-State Batteries

Comprehensive analytical evaluation combining structure, composition, and electrical properties.

Next-generation all-solid-state batteries, which are lithium-ion batteries, are expected to have high safety, high energy density, high output, and a wide operating temperature range. In recent years, research and development aimed at practical application has been actively conducted, but there are various development challenges. At MST, we propose evaluation content suitable for solving development challenges based on comprehensive analysis and evaluation of structure, composition, and electrical properties. This document introduces specific examples of development challenges for all-solid-state batteries, their evaluation content, and representative evaluation methods for each component.

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[Analysis Case] Component Evaluation of Positive and Negative Electrode Binders in Secondary Batteries

Identification of organic substances using TOF-SIMS and GS/MS.

The binder for lithium-ion secondary batteries not only serves as an adhesive between active materials but also needs to be insoluble in the electrolyte. Therefore, the selection of suitable materials for both the positive and negative electrodes is crucial. This document presents cases where the components of the binders used in each electrode sheet were identified by measuring the positive electrode binder using TOF-SIMS and the negative electrode binder using GC/MS, and then comparing the results with a materials library database.

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[Analysis Case] Evaluation of the Composition of Secondary Battery Electrolyte

Qualitative and quantitative analysis of various components contained in the electrolyte.

In the electrolyte of lithium-ion secondary batteries, a combination of high dielectric constant solvents and low viscosity solvents is used to improve electrical conductivity. Additionally, additives and electrolytes (supporting salts) not only facilitate the transport of Li ions but also have the function of forming a film on the electrode surface, requiring various performance characteristics. This paper presents examples of qualitative and quantitative analysis of various components such as solvents, electrolytes, and additives by evaluating the electrolyte itself using ICP-MS, volatile components during electrolyte heating using GC/MS, and the dry residue of the electrolyte using TOF-SIMS.

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[Analysis Case] Imaging Analysis of Antimicrobial Agents on Antimicrobial Coating Surfaces

Comparison of the state before and after treatment of antibacterial coating using TOF-SIMS.

In anticipation of future demand for antimicrobial agents due to viral infections, this document presents the results of imaging antimicrobial agents and other components in antimicrobial coatings using TOF-SIMS. The antimicrobial coating was formed by spraying an antimicrobial spray containing Ag ions as the antimicrobial component onto a substrate. The analysis revealed that the amount of the antimicrobial component, Ag, did not change even after wiping or rinsing. It was also found that other components besides the antimicrobial agents were present.

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[Analysis Case] Component Analysis of Disinfectant Alcohol

Comparison of components other than the main agent ethanol in each product using chromatography.

Due to the increased demand for disinfectant alcohol to prevent infections caused by viruses, it is important that the products do not contain methanol during handling. It is known that the components other than the main agent, ethanol, differ depending on the type of product. This document introduces cases where components other than ethanol were analyzed using chromatography. The analysis of four types of disinfectant alcohol products revealed that the components contained in the products varied.

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[Analysis Case] Structural Evaluation of Secondary Battery Separators

Evaluation of the shape and composition of organic/inorganic multilayer structures.

The separator in lithium-ion secondary batteries not only serves the role of isolating the positive and negative electrodes to prevent internal short circuits, but in automotive batteries, it is also required to have heat resistance to prevent a decrease in strength or melting even in high-temperature environments. This report introduces a case study on separators used in overseas automotive batteries, where heat resistance and thermal decomposition behavior were investigated using TG-DTA, and structural and compositional evaluations were conducted using SEM-EDX, FT-IR, XPS, TOF-SIMS, and XRD. It was found that the separator used in the battery consists of a porous polyethylene and a layered structure of polygonal AlO(OH) aimed at heat resistance.

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[Analysis Case] Evaluation of Resistance Values and Li Distribution in Secondary Battery Cathodes

Distribution of resistance values in the electrode cross-section, visualization of conduction paths, and comparison with ion distribution.

The charge and discharge characteristics of lithium-ion secondary batteries are influenced by electronic conductivity. I will introduce a case where the decreased conductivity of active materials, due to degradation or blockage of conduction paths, was visualized as a resistance value distribution using SSRM. By comparing the results obtained from SSRM with the elemental distribution of Li and other elements measured by TOF-SIMS, it is possible to confirm the correlation between resistance values and elemental distribution. Additionally, it is feasible to classify conductive additives and binders based on resistance values, perform statistical processing, and quantify the mixing degree for each material.

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[Analysis Case] Comprehensive Evaluation of Positive Electrode Active Materials in Secondary Batteries

Proposing an evaluation that combines structure, composition, and electricity to solve development issues.

This article introduces a case study evaluating the surface morphology, cross-sectional structure, components, composition, crystal structure, and resistance value distribution of Li(NiCoMn)O2 (NCM), which is used as a positive electrode in lithium-ion secondary batteries. Based on a comprehensive evaluation of structure, composition, and electrical properties, MST proposes assessments suitable for solving development challenges aimed at improving characteristics and enhancing reliability.

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[Analysis Case] Impurity Evaluation of MLCC Using Diagonal Processing MLCC

Evaluation of impurity distribution in ceramic layers using diagonal processing.

Multilayer ceramic capacitors (MLCCs) are capacitors designed to increase capacitance by layering ceramic dielectric and electrodes. The electrical properties of MLCCs are significantly affected by impurities, making the evaluation of impurities in the ceramic layers and the diffusion of electrode components important. With the miniaturization of MLCCs, the ceramic layers have become thinner, making it difficult to evaluate impurities. This document introduces the results of evaluating impurities in the ceramic layers by innovating the pretreatment process.

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[Analysis Case] Outgassing Analysis of Resin for 3D Printers

High-sensitivity analysis of exhaust gas is possible with the gas concentration device.

When heated, resin can emit organic substances, which may cause contamination depending on the usage environment. The GC/MS method using a gas concentration device is effective for the high-sensitivity analysis of organic outgassing. Here, we will introduce a case study of outgassing evaluation for resin used in 3D printers. Different types of resin are used for 3D printer materials depending on the intended use of the printed objects, varying in strength, color, heat resistance, and other properties. By conducting analysis using a gas concentration device, it is possible to compare trace amounts of outgassing components and quantities for resins with different properties.

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[Analysis Case] Depth Direction Analysis of Components in SiON Ultra-Thin Films

It is possible to capture molecular information of inorganic substances in the depth direction using TOF-SIMS.

The SiON film used as the gate oxide film for Si transistors is formed by introducing nitrogen into the Si oxide film to suppress leakage current. To ensure a good interface characteristic with the substrate while maintaining the dielectric constant, it is necessary to strictly control the distribution of nitrogen in the SiON film. We will present a case study evaluating the distribution of silicon oxide and nitride in a 1nm thick SiON film using TOF-SIMS. TOF-SIMS has high depth resolution on the surface and can obtain molecular information with good sensitivity, allowing for a clear understanding of the compositional distribution in the ultra-thin SiON film.

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[Analysis Case] Simultaneous Qualitative Analysis of Inorganic and Organic Contaminants/Adhesives on Wafers

Simultaneous measurement of inorganic and organic components in minute specific areas.

TOF-SIMS has features such as simultaneous evaluation of organic and inorganic materials, capability for micro-area analysis, and high sensitivity for analyzing the very surface, making it effective for residue investigation in cleaning processes. An example is presented where pure water was dried on a silicon wafer. Optical microscopy only reveals slight point-like foreign substances and cloudiness. However, the results measured by TOF-SIMS showed that in the contaminated areas, organic components such as hydrocarbons, PDMS, and amides, which tend to adsorb naturally, were aggregated.

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[Analysis Case] Evaluation of Metal Impurities in the Metal Film and Interface of the Device

Impurities in films and interfaces such as plating can be evaluated using TOF-SIMS.

Impurities from components of the film formation device, target materials, and plating solutions can contaminate the device and have adverse effects, making the qualitative assessment of impurities on surfaces, within films, and at interfaces important. TOF-SIMS can sensitively evaluate unknown elements present on surfaces, within films, and at interfaces in a single measurement due to the following three characteristics: 1. For metallic elements, ions from m/z 1 to 800 can be detected simultaneously in one measurement. 2. Detection sensitivity of a few ppm can be achieved (varies depending on materials and ions). 3. The use of a sputter gun allows for the evaluation of depth distribution.

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[Analysis Case] Qualitative Analysis of Fluorinated Gases

Qualitative analysis of specific freons (CFC/HCFC) and alternative freons (HFC) is possible.

Freon gases are utilized in various applications such as refrigerants, foaming agents, semiconductors, and cleaning agents for precision parts due to their chemically stable nature and minimal impact on human health. On the other hand, they are substances that contribute to ozone layer depletion and global warming, which is why they are regulated by law. In this case, Freon gases were analyzed using GC/MS, and the separation analysis of CF4, which has low polarity and is difficult to separate among PFCs, was conducted. By using GC/MS, it is possible to qualitatively analyze specific Freons such as CFCs, HCFCs, and alternative Freons like HFCs and PFCs.

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[Presentation] Surface analysis applicable in various fields! TOF-SIMS Analysis Case Studies

From inorganic to organic materials, leave high-sensitivity surface analysis to us!

TOF-SIMS analysis allows for detailed examination of the sample's outermost surface, as well as the ability to obtain information in the depth direction, making it possible to understand the distribution of components within the material. Additionally, imaging can visualize the spatial distribution of components. This document includes case studies of products analyzed from various fields. Please feel free to contact us!

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[Analysis Case] Depth Direction State Evaluation of Tin (Sn) Surface

Evaluation of modified layers and altered layers through surface treatment is possible!

TOF-SIMS has good depth resolution and can obtain fragment ions corresponding to bonding states, allowing for the evaluation of layer structures near the surface, within a few nanometers. This document presents a case study analyzing the layer structure of a tin plate surface based on the information obtained from the measurement of standard samples of tin oxide and hydrated tin oxide. By applying this technology, it is possible to evaluate modified layers and altered layers due to surface treatment.

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[Analysis Case] Investigation of Foreign Object Occurrence: Analysis of the Tube

It is possible to estimate the cause of wafer contamination!

TOF-SIMS is a very effective method for investigating the causes of contamination due to foreign substances, deposits, dirt, discoloration, and other factors related to the process. By comparing the mass spectral information obtained from contamination such as foreign substances with the mass spectral information of candidate contamination source components, it is possible to infer the sources of that contamination. In this document, we prepared four types of resin tubes used in the wafer manufacturing process and foreign substances on Si wafers, and by comparing their mass spectral information, we evaluated which components used in the process the contamination from the foreign substances was attributed to.

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[Analysis Case] Contamination Analysis in Vacuum Equipment

It is possible to evaluate the causes of contamination in vacuum devices, such as oil backs and grease!

Vacuum devices that utilize the characteristic of low gas molecular density in a space are used in various applications such as thin film formation and surface analysis in the manufacturing process of electronic components. Since the chamber of a vacuum device is a closed space, the presence of trace amounts of molecules can easily cause contamination within the device. To suppress contamination, it is necessary to conduct investigations to identify contamination sources such as pumps, devices, and samples. This document presents a case study investigating contamination within a vacuum device using TOF-SIMS.

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[Analysis Case] Evaluation of Surface Components of Fur

It is possible to quantify the surface condition through surface analysis of animal fur (coat)!

The surface of human hair (hair) is covered with a lipid called 18-methyl eicosanoic acid (18-MEA). The surface of animal fur (coat) is believed to contain various lipids secreted from sebaceous glands, not limited to 18-MEA. Additionally, a decrease in linoleic acid has been reported in the sebum of animals with skin diseases. Therefore, simultaneously analyzing the representative lipid 18-MEA along with several other components is useful for understanding the condition of the hair. This document presents the results of evaluating the differences in lipids for each type of animal (pet) using TOF-SIMS.

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