オーテックス Product Lineup

ALIO Industries' patent technology. A new type of hexapod called "Hybrid Hexapod" that combines the degrees of freedom of parallel kinematics with the precision and rigidity of serial kinematics. Its significant feature is that, despite being a long-stroke hexapod, it achieves a repeatability precision of ±80nm even in the standard configuration. Compared to conventional systems, it offers major advantages of being compact, high-rigidity, long-stroke, and high-precision, enabling entirely new system designs for applications such as precision machining and precision alignment.

The XY stage system by ALIO Industries has made an impact on high-end stage manufacturers worldwide with its three-plate design. Unlike the conventional method of combining single axes, this stage successfully achieves both high precision and high rigidity by integrating the XY axes into a single unit, making it a hallmark of ALIO Industries.

In recent years, a laser incidence angle of >45° has been required for laser processing. The proposal from ALIO Industries is the 5D Laser Gimbal. By embedding a seemingly complex drive system of high-precision gimbal drive, high-precision monolithic XY, and Z-axis combination into the multi-axis interpolation controller, users can achieve high-speed and high-precision synchronization control of the stage and laser (on/off, power, etc.) with a simple GUI.

The BORA Hexapod is a compact 6DOF parallel kinematic system designed for precise positioning and adjustment of elements with a resolution of 0.1 µm. The BORA Hexapod meets the most stringent standards of optics and nanotechnology in terms of resolution, accuracy, stability, and size. Its dimensions allow for integration in confined environments, such as the tips of goniometers for applications in synchrotron beamlines and optical ground support equipment for alignment and calibration of space optical systems. The BORA Hexapod can be used in any orientation, including vertical, horizontal, and inverted.

SOLANO is an ultra-compact hexapod designed for precise positioning and calibration with a minimum resolution of 0.08 µm. The SOLANO hexapod meets the increasing demands from rigorous fields in terms of size, resolution, accuracy, and stability. Its dimensions are compact, with a height of 104 mm and a diameter of 120 mm, allowing for integration into tight spaces. SOLANO can be used in both vertical and horizontal orientations.

MAUKA is a compact hexapod designed to position loads of up to 5 kg with sub-micrometer resolution. It has a diameter of 107 mm and a height of 198 mm at its midpoint. To minimize the diameter, a hexaglide shape was used, allowing the motors to be mounted in a single row. MAUKA operates in any direction, whether vertical, horizontal, or at other angles. Thanks to the absolute linear encoder, there is no need to execute a homing command every time the controller is powered on.

HEGOA is small in size (42 cm), has a load capacity of 50 kg, and is lightweight, making it the easiest to install and use compared to other hexapods. Additionally, it is more affordable than larger hexapods. It is ideal for dynamic applications in industrial fields such as naval, aerospace, and automotive (for sensors in autonomous vehicles, AdBlue tank testing), as well as stabilization tests. It can also be used in laboratory and medical applications (neurology, kinesiology).

PUNA is a simple hexapod that meets high-precision positioning applications in research and industry at an optimal budget. It provides a resolution of 0.5 μm in XYZ and 5 μrad (0.0003 °) in rotation for a load capacity of 25 kg. To simplify the design, the motors are mounted in-line, and incremental rotary encoders are incorporated.

BREVA is specially designed to provide high angular precision. With a resolution of XYZ 0.5 µm and rotation 2.5 µrad, it enables angular positioning of objects such as samples, probes, and sensors. It can be used in an orientation-free manner, whether vertical, horizontal, or upside down.

ZONDA is a new high-performance 6DOF system that meets the needs of applications requiring high precision, stability, accuracy, heavy loads, and large travel distances. The ZONDA hexapod, designed to position payloads of up to 400 kg with a resolution of just 0.1 µm, offers excellent travel distances of 400 mm in the XY plane, 300 mm in the Z direction, and 40° in three rotations (Rx, Ry, Rz). With integrated inverse components featuring a thermal expansion coefficient, linear absolute encoders standardly integrated into the actuators, and a design with particularly high rigidity in the joints, it possesses unparalleled precision and thermal stability characteristics. It can be used in any orientation, including vertical, horizontal, and upside down.

Kuban is a highly stable 6DOF system designed to position elements in space with high precision and a resolution of 1.5 µrad. The configuration and integration of high-resolution actuators and high-precision spherical joints enable performance with high resolution and reproducibility, with a load capacity of up to 500 kg.

The JORAN Hexapod is a high-precision system designed to position and adjust elements with a load capacity of 1500 kg and an angular resolution of 0.5 µrad. In particular, the actuators, spherical joints, and natural granite platform ensure excellent stability and guarantee the quality of positioning over the long term. Developed in collaboration with the European Synchrotron ESRF, it is ideal for supporting mirrors and vacuum chambers on synchrotron beamlines. If necessary, the granite platform can also be replaced with a steel platform.

SURES is a highly precise and rigid positioning system. It can adjust and set up payloads of up to 500 kg with high resolution. It is particularly suitable for the fields of space, astronomy, and telescopes. For example, it can correctly readjust the mirrors of ground-based telescopes to compensate for structural deformations caused by changes in gravity and nighttime temperature variations. Since most ground-based telescopes are installed at the tops of high mountains, the mechanisms and electronic components of SURES are designed to operate in cold environments.

NOTUS is a compact and structurally robust motion generator. The load capacity of Notus P is 200 kg. The Notus V hexapod is a high-speed version with a load capacity limited to 100 kg. These hexapods are ideal for applications in laboratories, medical fields, aerospace, and sensors for autonomous vehicles.

MISTRAL enables motion generation of loads up to 1 ton within a significant range of linear movement (up to ±460 mm) and angular movement (±40°). It was initially designed to achieve heave motion for testing boat hulls. It can also replicate the trajectories of land, naval, or aerial vehicles, allowing for laboratory testing of sensors, electro-optical systems, and other equipment that may be mounted later.

SIROCCO can reproduce operations with a maximum load of 2 tons. This hexapod can be used to study liquid movements, set motion models, or simulate vehicles. This solution can integrate a 6-degree-of-freedom measurement system independent of the motion generator, allowing for real-time control of the movable table's position.

AQUILON is the hexapod with the highest load capacity in the lineup. It can move weights of up to 6 tons. If necessary, versions with higher payload capacities can be realized. AQUILON is mainly used for wave simulation, sloshing, and defense (turret testing) applications.

A super-thin rotating stage with a super-large aperture utilizing a linear motor. Leveraging its features, it is suitable for alignment and active viewing when combined with a monolithic XY stage. Recommended for fine adjustments of large wafers! Please be sure to watch the video.