NIPPON FUSSO CO.,LTD. Product Lineup

High-purity fluoropolymer coatings prevent contamination of devices due to the leaching of metal ions.

The target of fluoropolymer coatings for semiconductor applications is primarily the components of semiconductor manufacturing equipment. The types of manufacturing equipment include cleaning devices, CMP devices, plating devices, transport and fixing applications, and exhaust and waste liquid systems. Fluoropolymer coatings are applied through melt bonding because they are thermoplastic resins. This means that the surface is leveled through melting, and there are virtually no gaps for particles to infiltrate. Similarly, the leveled surface maximizes the non-stick properties of the fluoropolymer, reducing the adhesion and carry-out of cleaning solutions, thereby increasing cleaning efficiency. From the above, we consider fluoropolymer coatings to be suitable surface treatments for cleaning devices. They are also actually used in various types of equipment. *For more details, please contact us or download and view the catalog.*

【Features】 - Excellent metal elution prevention performance with fluororesin lining - Peace of mind with a film thickness exceeding 1mm - Usable under negative pressure conditions. No vent hole required. - Seamless coating - Compatible with complex shapes PFA resin is widely used in the semiconductor industry, and PFA resin coatings and linings are also commonly adopted. In addition to chemical resistance, high purity is required to prevent metal elution. Our coatings/linings are characterized by their ability to withstand use under negative pressure and their seamless coating. We have now developed a high-purity PFA resin thick lining called 'Lithil Pure' that exceeds 1mm in thickness. - Insufficient strength with PTFE or PVC molded products - Want to use safely under negative pressure - Feel that the film thickness of PFA coatings is insufficient These challenges regarding high purity requirements are resolved with 'Lithil Pure.' *For more details, please contact us or download the PDF for more information.

Applying a fluororesin coating or lining to quartz is expected to provide the following benefits: 1. Cost reduction: Protecting the product from chemical solutions is expected to extend the lifespan of the quartz substrate. 2. Particle prevention: Eliminating wear on quartz due to wafer contact is expected to have a particle prevention effect. 3. Prevention of quartz and wafer damage: Due to its soft material, it is expected to prevent damage caused by contact between quartz and wafers. 4. Improved liquid drainage: High water repellency is expected to reduce the residue of chemical solutions, leading to reduced cleaning costs, and the cleaning solution is less likely to get dirty, further contributing to cost reduction. 5. Enhanced high purity: Preventing the generation of metal ions from the quartz substrate is expected to improve high purity.

Applying fluororesin lining to photoresist liquid manufacturing equipment is expected to provide the following benefits: 1. Improved high purity: It is expected to prevent the leaching of metal ions and enhance purity. 2. Enhanced liquid drainage: Due to its high water repellency, it is expected to reduce the residue of products and cleaning solutions, leading to improved quality and reduced production costs. 3. Chemical resistance: It is expected to protect the substrate from corrosion caused by chemicals, thereby extending the lifespan of the substrate. 4. Prevention of wear particle contamination: By selecting our non-metal PEC specifications, it is expected to prevent the contamination of wear particles generated from the shaft seal of the stirrer. Additionally, there is an antistatic specification that lowers the leakage resistance value of the fluororesin insulating film, allowing static electricity generated during stirring to dissipate in the volume direction, which is expected to prevent explosions and damage to the film and equipment caused by static electricity.