□■□【MiniLab-080】Flexible Thin Film Experimental Device□■□ Can be configured flexibly according to requirements for processes such as deposition, sputtering, EB deposition, and organic deposition.
The ML-080, with a volume of 80 liters and dimensions of 400(W)x400(D)x570(H)mm, is composed of a D-type box chamber. It has the same configuration as the 070 model but features a taller chamber, which extends the TS distance adjustment range and improves film uniformity during deposition on large-diameter substrates, making it an optimal model for vacuum deposition. It is a higher-end model than the ML-070, which can also add a load lock mechanism. Like the 070, it is compact yet supports a wide range of applications including resistance heating deposition (for metals, insulators, and organic materials), EB deposition, RF/DC/PulseDC compatible magnetron sputtering, RIE plasma etching, and annealing.
- Maximum substrate size: Φ11 inch
- Resistance heating deposition sources x up to 4 units
- Organic deposition sources x up to 4 units
- Magnetron sputtering cathodes x 4 units
- Electron beam deposition
- Substrate heating stage (standard 500℃, Max 1000℃)
- *Plasma etching / <30W soft etching
*Plasma etching can be installed in both the main chamber and the load lock chamber.

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MiniLab Series Flexible Thin Film Experimental Device
Supports various sources and component configurations depending on the desired process conditions.



















