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  2. Industrial Electrical Equipment
  3. テルモセラ・ジャパン 本社
  4. □■□【MiniLab-080】Flexible Thin Film Experimental Device□■□ Can be configured flexibly according to requirements for processes such as deposition, sputtering, EB deposition, and organic deposition.
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  • Jul 27, 2026
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Jul 27, 2026

□■□【MiniLab-080】Flexible Thin Film Experimental Device□■□ Can be configured flexibly according to requirements for processes such as deposition, sputtering, EB deposition, and organic deposition.

テルモセラ・ジャパン テルモセラ・ジャパン 本社
The ML-080, with a volume of 80 liters and dimensions of 400(W)x400(D)x570(H)mm, is composed of a D-type box chamber. It has the same configuration as the 070 model but features a taller chamber, which extends the TS distance adjustment range and improves film uniformity during deposition on large-diameter substrates, making it an optimal model for vacuum deposition. It is a higher-end model than the ML-070, which can also add a load lock mechanism. Like the 070, it is compact yet supports a wide range of applications including resistance heating deposition (for metals, insulators, and organic materials), EB deposition, RF/DC/PulseDC compatible magnetron sputtering, RIE plasma etching, and annealing. - Maximum substrate size: Φ11 inch - Resistance heating deposition sources x up to 4 units - Organic deposition sources x up to 4 units - Magnetron sputtering cathodes x 4 units - Electron beam deposition - Substrate heating stage (standard 500℃, Max 1000℃) - *Plasma etching / <30W soft etching *Plasma etching can be installed in both the main chamber and the load lock chamber.
MiniLab-080 Flexible Thin Film Experimental Device
MiniLab-080 Flexible Thin Film Experimental Device
Suitable for vacuum deposition with a long throw T/S distance, capable of a mixed configuration of resistance heating, organic, and EB.
Suitable for vacuum deposition with a long throw T/S distance, capable of a mixed configuration of resistance heating, organic, and EB.
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Related Documents

MiniLab-080_2026.pdf[2814163]

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MiniLab series Sputtering Deposition EB RIE Etching | Thermocera Japan Ltd.
MiniLab Series Flexible Thin Film Experimental Device
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MiniLab-080-550_2020.jpg

□■□【MiniLab-080】Flexible Thin Film Experiment Device□■□

Flexible configuration available upon request for processes such as evaporation, sputtering, and EB. Adopts a tall chamber with a height of 570mm, contributing to improved uniformity during evaporation.

The ML-080, composed of a D-type box chamber with a volume of 80 liters and dimensions of 400(W)x400(D)x570(H)mm, features a higher chamber compared to the 060 model, resulting in a longer TS distance adjustment range and improved film uniformity during deposition on large-diameter substrates. It is an optimal model for vacuum deposition and is a higher-end version of the ML-060, which can also accommodate a load lock mechanism. Like the 060, it is compact yet supports a wide range of applications including resistance heating deposition (for metals, insulators, and organic materials), EB deposition, RF/DC/Pulse DC compatible magnetron sputtering, RIE plasma etching, and annealing. - Maximum substrate size: Φ10 inch - Resistance heating deposition sources: up to 4 sources - Organic deposition sources: up to 4 sources - Magnetron sputtering cathodes: 4 sources - Electron beam deposition - Substrate heating stage (standard 500℃, max 1000℃) - *Plasma etching / <30W soft etching *Plasma etching can be installed in both the main chamber and the load lock chamber.

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Vacuum Deposition Device "MiniLab-026"

Compact and space-saving! Ideal for research and development, flexible configuration for purposes such as deposition, sputtering, and annealing.

This is a flexible thin film experimental device for R&D that achieves minimal waste, compact size, simple operation, and high cost performance by integrating the necessary minimum modules and controllers into a 19" compact rack with a Plug&Play feel. It supports magnetron sputtering (up to 3 sources) or resistance heating evaporation (metal sources up to 4, organic materials x4), and can be equipped with a substrate heating stage, allowing for the production of annealing devices and plasma etching. There is also a glove box storage type available (specifications to be discussed). A wide range of optional components that can be flexibly customized is available. ◉ Maximum substrate size: Φ6 inch ◉ Resistance heating evaporation source filament, crucible, boat type (up to 4 sources) ◉ Organic evaporation source: 1cc or 5cc ◉ Φ2 inch magnetron cathode (up to 3 sources) ◉ Dry etching ◉ Glove box compatible (optional, specifications to be discussed) ◉ Other options: simultaneous deposition from 2 sources, HiPIMS, automatic thin film controller, custom substrate holders, substrate rotation/lifting, substrate heating, and many more options available. * Please first contact us with your required specifications, and we will configure the system according to your needs.

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Sputtering device "MiniLab-060"

A semi-custom-made thin film experimental device that can be assembled with the desired configuration for processes such as sputtering, EB (electron beam), and annealing.

Compact/Space-saving, High-spec Thin Film Experiment Device Combination possible from the following deposition sources: - Resistance heating deposition source x up to 4 - Organic deposition source x up to 4 - Electron beam deposition - 2-inch sputtering cathode x 4 (or 3-inch x 3, 4-inch x 2) - Plasma etching: Can be installed in either the main chamber or the load lock chamber 【Small Footprint/Space-saving】 - Dual rack type (MiniLab-060): 1200(W) x 590(D)mm 【Excellent Operability/Intuitive Operation Screen】 Windows PC or 7” touch panel. Easy operation regardless of skill level, with maximum safety considerations.

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MiniLab-080-550_2020.jpg

Vacuum Deposition Device "MiniLab-080"

Flexible configuration available upon request for methods such as deposition, sputtering, and EB. Adopts a tall chamber with a height of 570mm, contributing to improved uniformity during deposition.

The ML-080, with a volume of 80 liters and dimensions of 400(W)x400(D)x570(H)mm, is composed of a D-type box chamber. It has the same configuration as the 060 model but features a taller chamber, which extends the TS distance adjustment range and improves film uniformity during deposition on large-diameter substrates, making it an optimal model for vacuum deposition. It is a higher-end model than the ML-060, which can also accommodate a load lock mechanism. Like the 060, it is compact yet supports a wide range of applications including resistance heating deposition (for metals, insulators, and organic materials), EB deposition, RF/DC/PulseDC compatible magnetron sputtering, RIE plasma etching, CVD, and annealing. - Maximum substrate size: Φ10 inches - Resistance heating deposition sources x up to 4 sources - Organic deposition sources x up to 4 sources - Magnetron sputtering cathodes x 4 sources - Electron beam deposition - Substrate heating stage (standard 500°C, max 1000°C) - *Plasma etching / <30W soft etching - CVD (thermal CVD, PECVD) *Plasma etching can be installed in both the main chamber and the load lock chamber.

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MiniLab-090-550_2020.jpg

Vacuum deposition device 'MiniLab-090' (for glove box)

Storage-compatible glove box PVD flexible thin film experimental device, featuring a tall chamber with a height of 570mm, contributes to improved uniformity during deposition.

MiniLab-080 glove box model with an 80ℓ large capacity chamber designed to be stored within a glove box bench. It features a slide-open and close chamber that maximizes the use of the workbench, and a rear-opening door designed with maintenance in mind. Samples processed can be consistently handled within a controlled environment inside the glove box without exposure to the atmosphere or moisture. For specifications of the GB gas purification unit, please refer to the GB model. ◉ Resistance heating evaporation source x up to 4 ◉ Organic evaporation source x up to 4 ◉ Magnetron sputtering cathode x 4 ◉ Electron beam evaporation ◉ Dry etching ◉ Annealing

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ML-S125-iPROS_550-1.jpg

Multivariate Multi-Sputtering Device [MiniLab-S125A]

High-performance multi-sputtering device 6-element multi-sputter (for Φ4 inch) 4-element multi-sputter (for Φ6, 8 inch)

Continuous multilayer film, simultaneous film formation (2-6 elements simultaneous film formation: RF, DC can be freely switched from HMI) High-power RF, DC power supplies, and pulse DC power supplies can be flexibly configured for multi-cathode using our unique 'Plasma Switching Relay' module, allowing for various applications. High-temperature substrate heating stage (double jacket water-cooled) options: -1) Max 600℃ (lamp heating) -2) Max 1000℃ (C/C composite) -3) Max 1000℃ (SIC coating) Reverse sputtering stage inside the load lock: -1) 300W, or -2) Soft-Etching (<30W) System main control: 'IntelliDep' control system Windows PC (or TP HMI) interface All operations are centrally managed from a single HMI screen.

  • Sputtering Equipment
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Sputtering/Dual Chamber System [MiniLab]

Two thin film experimental devices are connected with a load lock mechanism. Different film deposition devices (sputtering, evaporation, etc.) are seamlessly connected with the load lock.

Two thin film experimental devices are connected with a load lock mechanism. Different film deposition devices (sputtering, evaporation, etc.) are seamlessly connected via the load lock. With Moorfield's unique load lock system, connections to the process chamber on the left, right, and rear are also possible.

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MiniLab-026/090 Glove Box Thin Film Experiment Device

Compact and space-saving! Ideal for organic thin film development, all processes such as deposition, sputtering, and annealing can be seamlessly performed within the glove box.

In the film formation process of 2D materials such as OLED (Organic EL), OPV (Organic Photovoltaic), OTFT (Organic Thin Film Transistor), graphene, and TMD (Transition Metal Dichalcogenides), it is necessary to handle samples in an inert gas atmosphere isolated from oxygen and moisture. The MiniLab-026/090-GB achieves a "oxygen and moisture-free" experimental environment for organic film applications by housing the PVD chamber within the GB, creating a compact and space-saving environment. 【Features】 ◉ A series of processes such as PVD film formation, spin coating, and hot plate baking can be performed seamlessly within the GB without exposing them to the outside air. ◉ Space-saving: The chamber does not protrude from the back, so it does not take up space. 【MiniLab Models】 ◉ MiniLab-026 (26ℓ volume): Metal/insulator/organic material deposition, sputtering, plasma etching, annealing ◉ MiniLab-090 (90ℓ volume): Metal/insulator/organic material deposition, EB deposition, sputtering, plasma etching, annealing * Please first contact us with your required specifications, and we will configure the system according to your needs.

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Sputtering device 'nanoPVD-S10A'

High-performance, cost-effective RF/DC magnetron sputtering device for research and development.

High-performance RF/DC magnetron sputtering system ● Achievable pressure: 5 x 10^-5 Pa (*1 x 10^-4 Pa in as fast as 30 minutes!) ● Sputter sources x 3: Continuous multilayer film control, simultaneous film deposition ● Film uniformity ±3% ● Various options: Up/down rotation, heater, cathode for magnetic materials, and more ◉ nanoPVD can be used for various purposes, including up to 3 sputter sources + 3 systems (MFC control), expansion of RF/DC PSU (up to 2 power supplies), continuous multilayer film, and simultaneous deposition from 2 sources (RF/DC or DC/DC only). - Insulating films - Conductive films - Compounds, and more 【Main Features】 ◉ Compatible substrates: 2" (1 to 3 sources) or 4" (1 source) ◉ 2" cathode x up to 3 sources ◉ 7" touch panel for easy operation with PLC automatic process control ◉ High-precision process control with MFC ◉ 1 Ar gas system (standard) + up to 3 additional systems for N2, O2 ◉ Connect to a Windows PC via USB port to create and save recipes for up to 1000 layers and 50 films. Data logging on PC. ◉ Other various options available.

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nanoPVD-T15A_550.jpg

◆nanoPVD-T15A◆ High-performance Organic and Metal Film Deposition Equipment

We have incorporated all the latest vacuum deposition technology into a compact benchtop-sized device that can effectively utilize limited lab space.

High-performance organic source LTE (up to 4 sources) with excellent temperature responsiveness/stability for organic materials such as OLED, OPV, and OTFT, and a metal deposition source TE (up to 2 sources) that allows for easy exchange and maintenance. It can operate in manual mode, as well as in automatic mode for continuous multilayer film deposition and simultaneous film formation. Despite its compact size, it achieves performance comparable to that of large standalone machines without sacrificing basic performance, film quality, uniformity, or operability. Additionally, it features fully automatic control via a simple touch panel with PLC. The user-friendly HMI allows anyone to operate it intuitively without requiring complicated operating procedures. It comes with remote software "IntelliLink," which connects to a Windows PC via USB cable, enabling monitoring of the device's operating status, log saving, online/offline recipe creation and storage, and fault analysis. This compact vacuum deposition system is designed to maximize the effective use of limited development and lab space while also excelling in maintenance.

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Soft Etching Device [nanoETCH]

<30W Low power - Etching control precision 10mW Achieving damage-free and delicate etching processing.

【nanoETCH】Model. ETCH5A Achieves fine and damage-free etching processing with low output RF etching at <30W (control accuracy 10mA). A jointly developed product with the graphene research group at the University of Manchester, led by Nobel Prize winners who discovered graphene in 2010.

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Sputtering and deposition source composite thin film deposition device [nanoPVD-ST15A]

Sputter Cathode and Co-evaporation Source Mixed Thin Film Experimental Device: Metal deposition, organic deposition, and sputter cathode installed in a compact frame.

Three types of film formation components are installed in the chamber: resistance heating evaporation source (metal evaporation), organic evaporation source (organic materials), and magnetron sputtering (metal and insulating materials), allowing for various thin film experimental setups to be accommodated within a single chamber. ◉ Three combinations are available: 1. Sputter cathode + resistance heating evaporation source x2 2. Sputter cathode + organic evaporation source x2 3. Sputter cathode + resistance heating source x1 + organic evaporation source x1 (*DC sputtering only) - Evaporation range: Φ4 inch / Φ100 mm - Vacuum exhaust system: Turbo molecular pump + auxiliary pump (rotary or dry scroll pump) - Substrate rotation and vertical lifting stage - Max 500℃ substrate heating heater - Quartz oscillator film thickness sensor - 7” touch panel HMI operation (includes 'IntelliLink' Windows PC remote monitoring software)

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Annealing furnace "Mini-BENCH-prism ultra-high temperature experimental furnace"

Maximum operating temperature 2000℃ Semi-automatic control Ultra-high temperature experimental furnace (carbon furnace, tungsten metal furnace) Compact and space-saving experimental furnace

◉ Maximum operating temperature Max2000℃ ◉ Customizable heater structure: - Cylindrical heater: for sintering samples inside a crucible (for solid, powder, granule, and pellet-shaped samples) - Flat heater: for sintering Φ1" to Φ6" wafers and small chip samples ◉ PLC semi-auto control All operations except for temperature adjustment are performed on a touch panel screen. No need for cumbersome valve opening/closing or pump activation; the "vacuum/purge" cycle before sintering and "vent" after sintering are automatically sequenced with one button. ◉ Up to 3 MFCs for automatic flow control (or manual adjustment) ◉ APC automatic pressure control ◉ Ensuring safety during operation Monitoring for cooling water abnormalities, chamber temperature abnormalities, and overpressure abnormalities. Made of SUS, the robust water-cooled chamber can be safely used even during continuous operation at maximum temperature. ◉ Compact and space-saving Width 603 x Depth 603 x Height 1,160mm (*installed inside rotary pump housing) Various sample heating experiments, such as ultra-high temperature heating of small samples in laboratories and new material research and development, can be easily conducted. The main unit is compact yet suitable for research and development in a wide range of fields.

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Vacuum Furnace "Mini-BENCH Ultra-High Temperature Tabletop Experimental Furnace"

Tabletop small-sized experimental furnace - space-saving with a maximum operating temperature of 2000℃! We also manufacture metal furnaces for reducing atmospheres.

◉ Tabletop size, space-saving: 328(W) x 220(D) x 250(H) mm (*Reference value for 2-inch chamber) ◉ Customizable heater structure: - Cylindrical heater: For sample sintering in crucibles (for solid, powder, granular, and pellet-shaped samples) - Flat heater: For sintering Φ1" to Φ6" wafers and small chips ◉ Fast heating time of approximately 15 minutes (up to 1500℃), cooling from 1500℃ to 100℃ takes about 40 minutes (in vacuum and gas replacement atmosphere) ◉ High specification & high cost performance ◉ Simple configuration, excellent operability Various sample heating experiments, such as ultra-high temperature heating experiments for small samples in laboratories and new material research and development, can be easily conducted with simple operations. The main unit is compact yet suitable for research and development in various fields.

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Annealing furnace "MiniLab-WCF Ultra-High Temperature Wafer Annealing Furnace"

6 to 8 inch ultra-high temperature wafer annealing equipment, a high-performance machine that widely supports various purposes from research and development to small-scale production.

◾️ Max 2000℃ ◾️ Effective heating range: Φ6 to Φ8 inch single leaf type, or batch type (multi-stage 5-sheet cassette) ◾️ Heater control: 1 zone or 2 zones (cascade control) ◾️ Heater material: ・C/C composite: Φ6 to Φ8 inch ・PG coated high purity graphite: Φ6 to Φ8 inch ◾️ Operating atmosphere: ・Vacuum (1x10-2 Pa), inert gas (Ar, N2) ◾️ PLC semi-automatic operation ・Automatic sequence control for vacuum/purge cycle and venting ・Fully automatic operation (optional) ・Touch panel operation, allowing centralized management without dispersed operations. ◾️ Process pressure control ・APC control (MFC flow, or automatic opening adjustment valve PID loop control) ・Maximum 3 systems of MFC flow automatic control, or manual adjustment of float meter/needle valve ◾️ PLOT screen graph display, CSV data output

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★【MiniLab-060】Flexible Thin Film Experimental Device★

★【MiniLab-060】Flexible Thin Film Experimental Device★

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MiniLab-026 Flexible Thin Film Experimental Device

MiniLab-026 Flexible Thin Film Experimental Device

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Multi-functional Sputtering Device 【MiniLab-S060】

Multi-functional Sputtering Device 【MiniLab-S060】

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Multifunctional Multi-Sputtering Device [MiniLab-S125A] Compatible with Φ8"

Multifunctional Multi-Sputtering Device [MiniLab-S125A] Compatible with Φ8"

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◆HTE Heater/OLED Organic Vapor Deposition・High-Temperature Metal Vapor Deposition Cell◆ Max 1500℃

◆HTE Heater/OLED Organic Vapor Deposition・High-Temperature Metal Vapor Deposition Cell◆ Max 1500℃

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Wafer Scale Graphene Synthesis Device [nanoCVD-WGP]

Wafer Scale Graphene Synthesis Device [nanoCVD-WGP]

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Glove Box Thin Film Experimental Device [MiniLab-026/090-GB]

Glove Box Thin Film Experimental Device [MiniLab-026/090-GB]

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★nano BenchTop Series Thin Film Experiment Device★

★nano BenchTop Series Thin Film Experiment Device★

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[nanoPVD-S10A] RF/DC Magnetron Sputtering Device

[nanoPVD-S10A] RF/DC Magnetron Sputtering Device

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◆nanoPVD-T15A◆ High-performance organic and metal film deposition device

◆nanoPVD-T15A◆ High-performance organic and metal film deposition device

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Magnetron Sputtering Cathode

Magnetron Sputtering Cathode

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Application note: Soft Etching

Application note: Soft Etching

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◆ANNEAL◆ Wafer Annealing Equipment

◆ANNEAL◆ Wafer Annealing Equipment

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Mini-BENCH-prism Semi-Automatic Ultra-High Temperature Experimental Furnace Max 2000℃

Mini-BENCH-prism Semi-Automatic Ultra-High Temperature Experimental Furnace Max 2000℃

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MiniLab-WCF Ultra High Temperature Wafer Annealing Furnace Max 2000℃

MiniLab-WCF Ultra High Temperature Wafer Annealing Furnace Max 2000℃

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【Mini-BENCH】Ultra-high temperature tabletop experimental furnace Max 2000℃

【Mini-BENCH】Ultra-high temperature tabletop experimental furnace Max 2000℃

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Hyper CLT flooring panel

Lightweight flooring that transforms on-site work | Hyper CLT flooring

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The boards used at civil engineering sites are important materials related to the safety and work efficiency of the site, including temporary roads, access roads, heavy machinery work yards, material storage areas, and worker pathways. Traditional steel plates are durable and widely used, but their weight can make transportation, installation, and removal cumbersome. Hyper CLT boards are civil engineering materials that utilize wood CLT. The 5×10 board weighs about 230 kg, and the 5×20 board weighs about 460 kg, making them lightweight and easy to handle even with small machinery, providing excellent maneuverability on site. They can be used in various civil engineering projects as an alternative to steel plates for mud prevention, ground protection, heavy machinery scaffolding, and ensuring work pathways. Using lightweight boards is expected to reduce the burden of work and improve construction efficiency. Additionally, the unique properties of wood contribute to glare reduction, noise reduction, and CO2 fixation, leading to environmentally friendly proposals. As a registered technology under the Ministry of Land, Infrastructure, Transport and Tourism's NETIS "TH-250021-A," it is also recommended for innovative ideas and safety measures in public works. Companies looking to streamline their operations on site are encouraged to consider Hyper CLT boards.

Aug 02, 2026

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We will be exhibiting at JIMTOF 2026 from October 26 to October 31.

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Technocoat Co., Ltd. will be exhibiting at JIMTOF 2026, which will be held at Tokyo Big Sight from October 26 to 31. 【Exhibition Details】 ■ Dates: October 26 (Monday) to October 31 (Saturday), 2026 10:00 AM to 5:00 PM (until 4:00 PM on the last day) ■ Venue: Tokyo Big Sight We invite you to visit our booth during this opportunity.

Aug 02, 2026

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Signed a supporting partner agreement with the Tokyo Marathon Foundation, a general incorporated foundation.

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Netwell System Co., Ltd. (Headquarters: Shinjuku, Tokyo; President: Akimi Tomita; hereinafter referred to as "Netwell System") is pleased to announce that it has entered into a supporting partner agreement with the Tokyo Marathon Foundation, a general incorporated foundation. Our company aims to support runners participating in the "Tokyo Marathon 2027" by helping them understand their own condition and creating an environment where they can participate safely and securely. Through this initiative, we will support the Tokyo Marathon Foundation's goal of achieving "sustainable event management" and ensure that runners participating in the 20th anniversary Tokyo Marathon in 2027 can approach the event in optimal condition. For more details, please refer to the attached release materials.

Aug 01, 2026

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Notice of Summer Vacation | Closed from August 8 (Saturday) to August 16 (Sunday), 2026; regular business will resume on August 17 (Monday).

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Thank you very much for your continued support. We would like to inform you of our summer holiday schedule as follows: 【Summer Holiday Period】 From Saturday, August 8, 2026, to Sunday, August 16, 2026 *We will resume normal operations from Monday, August 17, 2026. Inquiries and requests for materials received during the holiday period will be addressed sequentially after August 17, 2026. We apologize for any inconvenience this may cause and appreciate your understanding.

Jul 31, 2026

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Hyper CLT flooring panel

Easy-to-use wooden flooring panels for residential construction | Hyper CLT flooring panels

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In civil engineering work conducted near residential areas, schools, hospitals, and stores, consideration for noise and neighboring properties is essential. In particular, the sound generated during vehicle passage and the installation and removal of temporary roads, access routes, and heavy machinery work yards can be concerning. Hyper CLT sheets are civil engineering materials that utilize wood CLT. As wooden sheets, they can be used as alternatives to steel plates, for muddy ground measures, ground protection, heavy machinery scaffolding, and worker pathways. Due to the unique properties of wood, they provide a different experience compared to metal sheets, making them easy to recommend in sites where reducing metal noise and considering neighboring properties are priorities. Additionally, the texture of wood can soften the impression of the site, contributing to the creation of environments that emphasize environmental consideration and safety awareness. The 5×10 sheet weighs approximately 230 kg, and the 5×20 sheet weighs about 460 kg, making them lightweight and easy to handle even with small machinery. They can also be utilized as a registered technology under the Ministry of Land, Infrastructure, Transport and Tourism NETIS "TH-250021-A" for innovative ideas, safety measures, and neighbor considerations in public works. We also accept requests for materials and consultations for implementation.

Jul 31, 2026

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  • 接続・締結の工数削減に 軽量・省スペース ボルト1本で締結簡単 V-クランプ 280 10個からの小ロットに対応
  • 排気熱風なく 気温-4.1℃の冷風を 工事不要で暑さ対策 店舗・工場の 安全対策に! 気化式スポットクーラー Pure Drive ピュアドライブ
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