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  1. Home
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  3. テカンジャパン
  4. JACLaS EXPO 2026 Exhibition
COMPANY NEW
  • Sep 01, 2026
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Sep 01, 2026

JACLaS EXPO 2026 Exhibition

テカンジャパン テカンジャパン
Dates: October 8 (Thursday) to October 10 (Saturday), 2026 Venue: Kobe International Exhibition Hall Tekan Booth: Hall 3 D-29 Tekan utilizes highly reliable liquid handling and robotic technology to provide a variety of OEM equipment and components in the fields of clinical testing and life sciences. From developing optimal equipment concepts for the global market to complying with regulations in various countries and providing local services, Tekan leverages its abundant resources to offer support. If you have challenges or goals such as the following, please visit the Tekan booth: - You want to develop and improve preprocessing devices or next-generation devices for your current systems. - You want to launch high-quality in-house preprocessing and automated analysis devices. - You want to achieve development that exceeds market expectations through strategic industrial and UI/UX design.
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xLp6000.jpg

Development of a device requiring titration function with pump XLP6000.

Syringe pump for adjusting the discharge volume from 1nl and monitoring the discharge volume.

Significant achievements in semiconductor manufacturing and plating solution management devices. High reproducibility and easy precise flow rate adjustment, achieving CV of 0.05% at a low cost. Optimizing flow rate and flow volume based on solution material is extremely simple! Liquid volume range for a single delivery: 1nl to 50ml Liquid volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec to) (※) ※ Depends on the capacity of the syringe installed Example: When a 250μl syringe is installed Liquid volume adjustment unit: minimum 5nl Flow rate range: 1.6μl/min to 12.5ml/min (26nl/sec to 208μl/sec) Flow rate adjustment unit: 313nl/min to (5nl/sec to) Example: When a 10ml syringe is installed Liquid volume adjustment unit: minimum 0.2μl Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Robust design reduces service costs for embedded devices. Contributes to a decrease in the failure rate of the equipment. High resolution of 6000 or 48,000 steps. Three-way valves to 12-port valves for liquid path switching can be installed.

  • Syringe Pump
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Development of a pump XLP6000 for a metal ion solution without waste and a pH reagent replenishment device.

A syringe pump that allows for free adjustment of the discharge liquid flow rate in units of 0.3 nl/second and can also monitor the discharge volume.

Fully compatible with semi-additive manufacturing methods, achieving high reproducibility and easy precise flow rate adjustment, realizing CV of 0.05% at a low cost. Flow rate control from the start with a liquid delivery unit that does not depend on external pressure! Volume range for a single delivery: 1nl to 50ml Volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec to) (※) ※ Depends on the capacity of the installed syringe Example: When a 250μl syringe is installed Volume adjustment unit: minimum 5nl Flow rate range: 1.6μl/min to 12.5ml/min (26nl/sec to 208μl/sec) Flow rate adjustment unit: 313nl/min to (5nl/sec to) Example: When a 10ml syringe is installed Volume adjustment unit: minimum 0.2μl Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution of 6000 or 48,000 steps. Three-way valves to switch liquid paths and 12-port valves can be installed.

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xLp6000.jpg

Confidence in micro to large volume dispensing Syringe Pump XLP6000

Tekan's 48,000-step high-resolution syringe pump. Compatible with 50 ml at a stroke of 6 cm. Proven track record of introduction to many analyzers.

Proven performance in a wide variety of applications. Rugged design reduces service costs for embedded devices. Contributes to a decrease in device failure rates. High resolution: 6000 or 48,000 steps. No calibration required. A hit product used in large quantities worldwide.

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Improvement of the Liquid Delivery System (LDS) with Centris Pump.

Improvement of precursor liquid supply accuracy for ALD/CVD: Liquid volume adjustment in 0.3 nl increments and flow rate adjustment in 17 nl/min increments are possible. Ideal for optimized liquid delivery.

High-precision pumps supplied by the world's top manufacturer, Tecan, in the embedded syringe pump market. Many devices have been introduced domestically as well. They are widely used for liquid delivery purposes due to their non-pulsating, accurate, and highly reproducible performance. Centris Liquid delivery volume range per operation: 0.3nl to 12.5ml (*) Volume adjustment unit: minimum 0.3nl Adjustable flow rate range: 17μl/min to 750ml/min (0.3nl/sec to 12.5ml/sec) Flow rate adjustment unit: 17nl/min (0.3nl/sec) * Depends on the syringe capacity installed (50ul to 12.5ml) Example: When a 5ml syringe is installed Volume adjustment unit: minimum 104nl Adjustable flow rate range: 1.62μl/min to 300ml/min (0.3nl/sec to 5ml/sec) Flow rate adjustment unit: 1.62μl/min (28nl/sec) With a resolution of 181,490 steps for the installed syringe, it enables highly precise liquid handling. Additionally, it can be equipped with liquid path switching valves ranging from 3 ports to 12 ports, allowing for the suction of solutions from multiple liquid sources. A mechanism that constantly monitors the delivery volume and flow rate automatically alerts users to abnormalities with error codes.

  • Syringe Pump

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Cavro XCalibur Syringe Pump 【Case Study】

Supporting the Earth Environment Observation Research of the Japan Agency for Marine-Earth Science and Technology! Additionally, ultra-low temperature durable syringes will be provided with other pumps.

The Japan Agency for Marine-Earth Science and Technology (JAMSTEC) conducts extensive foundational research and development related to the ocean, including observations and predictions of the Earth's environment, studies of Earth's internal dynamics, and research on organisms in extreme environments. To support research on Earth's environmental observations, we have developed a compact observation device for measuring carbon dioxide in seawater using the Cavro® XCalibur (Excalibur) Pump from Tecan, which enables precise automatic pipetting. For more details, please contact us or download the catalog.

  • Syringe Pump

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【Semiconductor Manufacturing Process】Low Pulsation / Micro / Ultra High Resolution Syringe Pump

It enables extremely precise flow control, achieving a very low pulsation and smooth flow of liquid.

The optimal solution for the needs of "uniform film thickness," "constant concentration of trace components," and "accurate liquid cut-off at the nozzle tip" in semiconductor manufacturing! Please consider our low-pulse, high-reproducibility syringe pump. ===== Overview ===== The Centris Pump is a compact syringe pump module with high accuracy, reliability, and reproducibility. Its simple yet robust mechanical design requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. ★ Please download the catalog to view the technical specifications of the Centris Pump ★ ===== Features ===== - Long-life ceramic valves and ceramic syringes Capable of handling high liquid temperatures - High reproducibility: less than 0.05% CV/FS - High resolution: 181,490 steps - Programmable flow rate: 5 nl/s to 5 ml/s - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

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Centris.jpg

Small Syringe Pump Centris Pump

Supports ultra-slow and low-pulsation dispensing.

Long-lasting New Concept Syringe Pump Now Available ===== Overview ===== The Centris Pump is a compact syringe pump module for OEM laboratory equipment that offers high accuracy, reliability, and reproducibility. The new Centris Pump features a simple yet robust mechanical design that requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. ★ For technical specifications of the Centris Pump, please download the catalog ★ ===== Features ===== - Utilizes long-life ceramic valves and ceramic syringes Capable of handling high liquid temperatures - High reproducibility: less than 0.05% CV/FS - High resolution: 181,490 steps - Programmable flow rate: 5 nl/s to 5 ml/s - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

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XMP6000.jpg

Multi-channel Syringe Pump XMP6000 (Catalog Information)

Tekan's proud multi-syringe pump boasts numerous achievements worldwide. Suitable for applications handling a variety of solutions. 48,000 steps.

A multi-channel syringe pump for device integration, renowned for its reliability. It can accommodate arrangements of 2, 4, 6, or 8 syringes. By consolidating high-precision syringe pumps, it provides more space within the measurement device and contributes to miniaturization. It also helps reduce the dead volume of precious reagents. The pump address is unified for operation. It is optimal for automatic measurement devices for in vitro diagnostic reagents, reactions that require the addition of various reagents, and handling various applications with a single unit. It can be controlled with minimal space and the fewest commands relative to the number of liquid types. Usage examples: Simultaneous dispensing into multi-well plates, manufacturing systems requiring simultaneous discharge, blood cell processing systems, analytical devices handling multiple solutions, and analytical devices for in vitro diagnostic reagents. Please refer to the catalog for available syringe capacities.

  • Syringe Pump
  • Lab Syringe Pump
  • Lab metering pump

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[Case Study Collection] Examples of Utilizing Omni's Embedded Robot Arm for Liquid Dispensing

Examples of applications in the field of in vitro diagnostic reagents and scientific analytical instruments.

A dispensing device and analysis device can be easily constructed in a short time! This dispensing system is supplied in a nearly complete state so that it can be directly integrated into your devices or systems. Other devices can be installed here, and all that remains is to adapt the software for end users and apply your company logo. It meets the requirements of ISO 13485, 9001, FDA 21 CFR Part 820, is UL certified, and complies with regulations such as RoHS and REACH for in vitro diagnostic analysis devices and preprocessing devices.

  • Dispenser
  • Automatic Dispensing Device
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TEC003555I.jpg

[Case Study Collection] In Such Places! Tekan's ADP Pipette Module

Here are examples of the use of OEM pipette units in devices used around the world. Numerous cases that have solved many problems.

Please click on the images of the case studies displayed in the "catalog" below to download the case studies. Features of the ADP Pipetting Module: A hit product from Tecan (Demo and rental available.) ◎ Independent control with built-in firmware ◎ Double liquid level detection: Liquid levels can be detected through changes in pressure and capacitance within the pipette. ◎ Traceability: Monitoring of dispensing errors such as suction of solids, suction of bubbles, and air suction can be performed using analytical instruments and in vitro diagnostic devices. ◎ Manufacturing management: Monitoring of liquid dispensing operations during the manufacturing process ◎ Detection of non-conductive solutions (such as organic solvents) is also possible ◎ High precision and reproducibility (5-digit step/increment control) ◎ Freely control pipetting speed to accommodate the properties of liquids ◎ No chip eject tool required (the module automatically ejects the pipette tip, minimizing liquid splash contamination during ejection) ◎ Compact We are currently offering this dispensing know-how (speed control and multi-pipetting expertise). If you are interested, please contact Tecan Japan Co., Ltd. http://www.tecan.co.jp/about/profile.html

  • Syringe Pump
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  • pipette

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TEC003555I.jpg

Rapid development of virus testing equipment! Pipetter for device integration ADP

No need for liquid path design or motor adjustments. Proven accuracy, liquid level detection, and other multifunctional capabilities, with numerous use cases worldwide in infectious disease and immunological testing using disposable chips.

Numerous achievements in the integration of industry-leading medical genetic testing and high-sensitivity immunoassay devices worldwide. Short-term development of devices that can reliably screen for infectious disease carriers individually or collectively during outbreaks. Additionally, for immunoassay devices that want to prevent cross-contamination. *The new product ADP Detect has also been released! - Wearable disposable chips: Various specifications of chips in different sizes can be attached using a single type of unit, tailored to the purpose and liquid volume. Chips suitable for PCR testing gene samples are also provided. Types that prevent false positives in genetic testing and high-sensitivity immunoassays are also available. - Easy device integration and liquid control: Communication and power supply are managed with just the DA15 adapter. Liquid suction, discharge, and speed control can be easily managed via commands without directly controlling the stepper motor. No liquid path design is required, making adjustments simple. - Easy dispensing sequence design and operational assurance: Various convenient features are equipped, including liquid level detection (to prevent cross-contamination and accuracy fluctuations). At the same time, there are many functions that monitor the liquid operations to ensure that the operations of the integrated medical devices are reliably performed. *For more details, click the "Download Catalog" button below. ↓

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TEC003555I.jpg

Precision dispenser ADP using pipette tips - also detects liquid levels!

No need for liquid path design or motor adjustment. With proven accuracy, liquid level detection, and chip eject functions, a high-throughput infectious disease analysis device has been completed in a short time.

Achievements in the introduction of PCR devices for the detection of the novel coronavirus by manufacturers worldwide. Numerous implementations in high-sensitivity immunoassay devices. Short-term development of devices that reliably detect infectious diseases. - Wearable disposable chips: A single type of unit can accommodate chips ranging from 10μl to 1ml (liquid volume range: less than 1μl to 1000μl). Grades for genetic samples for PCR testing are also provided. Filters to prevent false positives in genetic testing are available. - Easy device integration and liquid control: Communication and power supply are managed solely through the DA15 adapter. Liquid suction, discharge, and speed control can be easily managed via commands without directly controlling the stepper motor. No need for liquid path design, making adjustments simple. - Simple dispensing sequence design and operation assurance: Liquid level detection (to prevent cross-contamination and accuracy fluctuations) and automatic chip ejection can be executed with a single command. Liquid delivery operation confirmation via encoder. Recognition of chip installation and pressure monitoring during liquid suction (detecting air suction, clogging from floating particles, bubble suction, etc.) ensure reliable dispensing operations. *For more details, please click the "Download Catalog" button below.↓

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Cavro Pumps.png

Syringe pump capable of accurate and precise liquid delivery for semiconductor manufacturing equipment.

Applying chemicals in semiconductor manufacturing 'more accurately and precisely.' Easily meet the equipment specifications.

In semiconductor manufacturing, where precise pattern formation and advanced process control are required, accurate dispensing of chemicals is essential. The Cavro pump series from Tecan provides optimal solutions for precise liquid delivery in the range of 1μl to 50ml, making it easy to integrate into customers' equipment. Syringe Pumps: Centris, Xcalibur, XLP6000 Multi-channel Syringe Pump: XMP6000 Delivery Speed: 17nl/min to 2.4L/min (actual dispensing volume monitored via encoder) Reliable liquid delivery at actual capacity without relying on flow controller adjustments. [Application Scenes] - Spin coating - Spray coating - Precise droplet dispensing of photoresist onto wafers - Slurry addition in chemical mechanical polishing (CMP) - Chemical formulation in cleaning and etching processes - Automatic titration adjustment - Automatic dilution - Additive management in plating processes (electrolytic and non-electrolytic) - Packaging processes, etc.

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[Case Study Collection] Ultra-High Precision Syringe Pump - Tecan's Centris

Examples of utilizing a high-precision syringe pump capable of delivering and dispensing liquids finer than nanoliter units. Supports low-pulsation dispensing.

Please click on the "catalog" example collection below to download the examples. Centris Pump The Centris Pump is a compact syringe pump module for device integration that offers high accuracy, reliability, and reproducibility, with extremely low pulsation. The new Centris Pump requires almost no maintenance due to its simple and robust mechanical design. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. ★ Please download the catalog to view the technical specifications of the Centris Pump ★ ===== Features ===== - Long-life ceramic valves can also be equipped Capable of handling high liquid temperatures - High reproducibility: less than 0.05% CV/FS - High resolution: 181,490 steps (liquid delivery volume and flow rate can be adjusted in 0.3 nl increments) - Programmable flow rate: 5 nl/s to 5 ml/s (up to one stroke in 50 hours) - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

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Omni, a compact auto-sampler for immediate automatic analysis device creation under our company name.

Low-cost, quick development of our own brand of dispensing devices, analytical instruments, and measuring equipment. A compact sample processor designed for narrow inspection rooms and laboratories.

Get your own brand's pre-treatment device right now! An auto-sampler that provides optimal OEM pre-treatment and dispensing for manufacturers. Equipped with various containers, applications, and components according to your needs. Covers validation and regulatory compliance as well. While we cannot disclose the name, we have successfully transformed the appearance of our OmniFlex, allowing analysis equipment manufacturers worldwide to adopt it and achieve rapid development and production of small quantities of devices. Particularly when the required production volume is low, in-house production or outsourcing to design companies can be too costly. The simplest way to produce your original automatic analysis or pre-treatment device in small quantities and in a short time is to combine components like a model kit within the framework of a somewhat completed device. If you are considering something compact, the small-sized MSP is ideal. We also offer consulting for combinations tailored to your needs. Please feel free to reach out to us. We are also available to discuss various support options that manufacturers should provide to customers. *For detailed information, please click the "Download Catalog" button below.

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xLp6000.jpg

Development of an automatic management system for plating solution - Syringe Pump XLP6000

Ideal management of plating solutions for semiconductors and electronic components with high reproducibility and precise flow control of the liquid delivery.

Fully compatible with semi-additive manufacturing methods, achieving high reproducibility and easy precise flow rate adjustment, realizing CV of 0.05% at a low cost. Flow rate control from the start with a liquid delivery unit that does not depend on external pressure! Liquid delivery volume range per operation: 1nl to 50ml Volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec) (※) ※ Depends on the capacity of the installed syringe Example: When a 250μl syringe is installed Volume adjustment unit: minimum 5nl Flow rate range: 1.6μl/min to 12.5ml/min (26nl/sec to 208μl/sec) Flow rate adjustment unit: 313nl/min to (5nl/sec) Example: When a 10ml syringe is installed Volume adjustment unit: minimum 0.2μl Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution of 6000 or 48,000 steps. Three-way valves to switch liquid paths and up to 12-port valves can be installed.

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  • Syringe Pump
  • Special Pump

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High-performance syringe pump suitable for managing chemicals in semiconductor manufacturing processes.

A slim and high-performance syringe pump that simplifies the design of flow path systems and their integration into devices.

This is a high-performance compact-type syringe pump for embedded use, featuring various valve specifications. It can accommodate a variety of syringes and achieves excellent accuracy and reproducibility. This pump is not only suitable for analytical devices in the medical and scientific fields, factory automation, and sealed tube sampling under positive pressure or vacuum, but it is also highly recommended for semiconductor manufacturing processes that require precise and uniform liquid control in small quantities.

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<Suitable for slow liquid delivery> Syringe Pump Cavro Centris

One stroke of the syringe takes 50 hours.

Long-lasting New Concept Syringe Pump Now Available ===== Overview ===== The Centris Pump is a compact syringe pump module for laboratory equipment that offers high accuracy, reliability, and reproducibility. The new Centris Pump features a simple yet robust mechanical design that requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. ★ For the technical specifications of the Centris Pump, please download the catalog ★ ===== Features ===== - Utilizes long-life ceramic valves and ceramic syringes Capable of handling high liquid temperatures - High reproducibility: below 0.05% CV/FS - High resolution: 181,490 steps - Programmable flow rate: 5 nl/s to 5 ml/s - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

  • Syringe Pump
  • Lab metering pump
  • pump

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Cavro(R) Centris Syringe Pump 【Case Study】

Case study of the introduction of Cavro® Centris syringe pump to Picarro's atmospheric water vapor isotope analyzer.

Picarro, Inc. uses the Cavro(R) CentrisPump as a component of its atmospheric water vapor isotope analyzer. The company's high-sensitivity devices are designed to operate fully automatically in remote locations, providing environmental scientists with data that helps understand the Earth's climate. For more information, please contact us or download the catalog.

  • Syringe Pump

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Low-flow application compatible ultra-high resolution syringe pump Centris

High-precision syringe pump capable of adjusting liquid delivery volume and flow rate from the nanoliter unit.

The Centris Pump is a compact syringe pump module for device integration that offers high accuracy, reliability, and reproducibility, with extremely low pulsation. The new Centris Pump features a simple and robust mechanical design that requires minimal maintenance. It has the smallest footprint among OEM syringe pumps and is fully RoHS compliant. Applications: Flow cytometers, micro-dosing in wafer manufacturing, titration devices, microfluidics, thin-layer chromatography production, pathogen detection devices, atmospheric analysis devices, and more. ★ Please download the catalog to view the technical specifications ★ ===== Features ===== - Can be equipped with long-life ceramic valves - High reproducibility: 0.05% CV or less/FS - High resolution: 181,490 steps (liquid delivery volume and flow rate can be adjusted in increments of 0.3 nl) - Programmable flow rate: 5 nl/s to 12.5 ml/s (up to one stroke possible in 50 hours) - Compact size (installation space: 69×45 mm) * For more details, please download the PDF or contact us.

  • Other pumps
  • Dispenser
  • Water quality testing

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Automatic Liquid Sample Collection Micro Pump for Water Quality Testing

Achieve high-precision liquid sample collection with easy operation.

In the water treatment industry, accurate sample collection in water quality testing affects the reliability of test results. Particularly when analyzing trace components or when continuous monitoring is required, precise sample collection and stable supply are essential. Inaccurate sample collection can lead to incorrect analysis results, potentially lowering the accuracy of water quality management. Our micro pumps support accurate sample collection in water quality testing with high-precision dispensing capabilities and a variety of interfaces. 【Usage Scenarios】 - Water quality testing laboratories - Wastewater treatment facilities - Water quality monitoring of rivers and lakes - Drinking water production processes 【Benefits of Implementation】 - Improved reliability of analysis results through accurate sample collection - Enhanced work efficiency through automation - Adaptability to various samples - Reduction in running costs

  • Syringe Pump
  • Positive Displacement Pump
  • dispenser

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Automatic sampling of liquid samples on the manufacturing line using syringe pump XLP6000.

Tekan's 48,000-step high-resolution syringe pump. Compatible with 50 ml at a stroke of 6 cm. Proven track record in many analytical devices and FA (factory automation).

Calibration is completely unnecessary. Proven performance in a wide variety of applications (production automation involving liquid dispensing, automatic sample collection within factories, in vitro diagnostic analysis devices, chemical analysis devices, etc.). Rugged design reduces service costs for embedded devices. Contributes to a reduction in equipment failure rates. High resolution: 48,000 steps 2-year warranty Easy integration and management in simple production equipment - Commands can be easily controlled via serial communication (RS232, RS485) or CAN communication, such as with PLCs. - In case of trouble, quick root cause resolution with error codes. Complete recovery with initialization. - Power-on counts and plunger operation counts are recorded in firmware. Easy retrieval. - Self-diagnostic switch allows for immediate checking of mechanism integrity. - Consumable parts (syringes and valves) can be easily replaced.

  • Syringe Pump
  • Positive Displacement Pump
  • dispenser

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Development of superior coating equipment: Syringe Pump XLP6000

The flow rate of the expelled liquid can be adjusted to 0.3 μl/min, minimizing the use of expensive photoresist with nanoliter-level liquid volume adjustments!

Optimal for dropping resist liquid with spin coaters and slit coaters. Affordable with high reproducibility (CV value: 0.05%). Flow rate control from the start by a delivery unit that does not depend on external pressure and flow controllers! Single delivery volume range: 1nl to 50ml Volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec) (※) ※ Depends on the capacity of the installed syringe Example: When a 10ml syringe is installed Volume adjustment unit: minimum 0.2μl to Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Equipped with a thorough management function for discharge volume and speed using an encoder, as well as a reporting function to notify errors in case of abnormalities. Easy operation linkage with I/O terminals. Maintenance timing is easily managed with the operation amount memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution command with 6000 or 48,000 steps. Three-way valves to switch liquid paths and 12-port valves can be installed.

  • Syringe Pump
  • Positive Displacement Pump
  • dispenser

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Fluid control syringe pump XLP6000 that does not waste EUV resist.

The flow rate of the ejected liquid can be adjusted to 0.3 μl/min, minimizing the use of expensive photoresist with nanoliter-level liquid volume adjustments!

Ideal for dispensing resist liquid droplets for spin coaters and slit coaters. Affordable with high reproducibility (CV value: 0.05%). Flow rate control from the dispensing unit that does not depend on external pressure and flow controllers! Liquid volume range per dispensing: 1nl to 50ml Liquid volume adjustment unit: minimum 1nl (※) Flow rate range: 0.3μl/min to (5.2nl/sec to) Flow rate adjustment unit: 63nl/min to (1nl/sec) (※) ※ Depends on the capacity of the installed syringe Example: When a 10ml syringe is installed Liquid volume adjustment unit: minimum 0.2μl to Flow rate range: 62.5μl/min to 500ml/min (1μl/sec to 8.3ml/sec) Flow rate adjustment unit: 12.5μl/min to (0.2μl/sec to) Equipped with a thorough management function for discharge amount and speed using an encoder, as well as a reporting function to notify errors during abnormal conditions. Easy operation linkage with I/O terminals. Simple management of maintenance timing with operating amount memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment. High resolution command with 6000 or 48,000 steps. Three-way valves to switch liquid paths and up to 12-port valves can be installed.

  • Syringe Pump
  • Positive Displacement Pump
  • dispenser

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Automatic micro pump for liquid sample collection for semiconductor manufacturing.

Contributes to maintaining purity in semiconductor manufacturing lines with a high-precision syringe pump.

In the semiconductor manufacturing industry, managing the purity of liquids, which significantly affects product quality, is extremely important. The presence of trace impurities can lead to a decline in product performance and a deterioration in yield. Our micropump eliminates the need for calibration and enables high-precision liquid sample extraction, supporting the maintenance of liquid purity in the manufacturing process. 【Usage Scenarios】 - Sample extraction in quality inspection processes - Chemical supply in semiconductor manufacturing lines - Supply of wafer cleaning solutions 【Benefits of Implementation】 - Maintains liquid purity, contributing to improved product quality - Enhances yield - Achieves a stable manufacturing process

  • Syringe Pump
  • Positive Displacement Pump
  • dispenser

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Ultra-compact lightweight high-performance syringe pump Excalibur

A Techan syringe pump with proven performance suitable for product development requiring 24,000 steps and high dispensing precision. Compact yet ultra-durable design.

===== Overview ===== The Tekan Cavro XCalibur is a compact, lightweight OEM syringe pump with high dispensing accuracy. In recent years, the Excalibur has been applied to analytical devices and clinical diagnostic equipment worldwide due to its performance and robustness, and it is actively incorporated into our automatic dispensing systems. It is suitable for product development that requires space-saving and high dispensing accuracy. It is fully compliant with RoHS III. The valve supports various liquid path switching (from 3-way valves to 12-port valves). The photo shows a model equipped with a specially designed valve. Additionally, a new solenoid valve type has also been released. Usage examples: Blood sample pretreatment devices, in vitro diagnostic reagent analytical devices, analytical devices involving titration processes, coating and dispensing of semiconductor wafers, plating solution management, solid-phase extraction, automatic elemental analyzers, manufacturing of stick-type test reagents, and more. Features for continuously monitoring flow rate and flow speed are included. Compatible syringe capacities: 50μl to 5ml (please refer to the catalog). (*Demo and pump rental (including evaluation kits) are available.) For detailed specifications, please click "Download Catalog" below.

  • Syringe Pump
  • Other physicochemical equipment
  • Analytical Equipment and Devices

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Precision dispenser pump Excalibur for quarter developers.

Tekan's dispensing pump, which has a proven track record in the development of coating equipment that requires high precision and accuracy. It is compact yet designed to be extremely robust.

Fluid control syringe pump that prevents waste of expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) while being cost-effective. It allows for easy flow rate control from the start, independent of unstable external pressure and flow controllers. Volume range for a single delivery: 2nl to 5ml Volume adjustment unit: minimum 2nl and above Adjustable flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min and above (2nl/sec) *Depends on the syringe capacity used Example: When using a 2.5ml syringe Volume adjustment unit: minimum 104nl and above Adjustable flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min and above (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, as well as a reporting function to notify errors during abnormal conditions. Easy operation linkage via I/O terminals. Memory function for operating volume. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment.

  • Syringe Pump
  • Other physicochemical equipment
  • Analytical Equipment and Devices

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Fluid control of EUV resist without waste - Syringe pump Excalibur

Tekan's syringe pump, known for its proven track record in the development of coating equipment requiring high precision and accuracy. Compact yet designed to be extremely robust.

Fluid control syringe pump that does not waste expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) at a low cost. It allows for easy control of flow rate from the start, independent of unstable external pressure and flow controllers. Volume range for a single delivery: 2nl to 5ml (*) Volume adjustment unit: minimum 2nl (*) Flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min (*) *Dependent on the capacity of the installed syringe. Example: When a 2.5ml syringe is installed Volume adjustment unit: minimum 104nl Flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, and a report function to notify errors during abnormal conditions. Easy operation linkage via I/O terminals. It has a working volume memory function. Built robustly to reduce service costs for embedded devices and contributes to lowering the failure occurrence rate of the equipment.

  • Syringe Pump
  • Other physicochemical equipment
  • Analytical Equipment and Devices

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Development of superior coating equipment: Syringe Pump Excalibur

Tekan's syringe pump, known for its proven track record in the development of coating devices that require high precision and accuracy. It is compact yet designed to be extremely robust.

Fluid control syringe pump that does not waste expensive EUV resist. It is optimal for resist droplets under spin coaters and slit coaters. Additionally, it achieves high reproducibility (CV value: 0.05%) while being cost-effective. It allows for easy control of flow rate from the start with a delivery unit that does not depend on unstable external pressure and flow controllers. Volume range per delivery: 2nl to 5ml (*) Volume adjustment unit: minimum 2nl (*) Flow rate range: 5μl/min to 250ml/min (83nl/sec to 4.16ml/sec) Flow rate adjustment unit: 208nl/min (*) * Depends on the capacity of the installed syringe. Example: When using a 2.5ml syringe Volume adjustment unit: minimum 104nl Flow rate range: 250μl/min to 125ml/min (4.1μl/sec to 2.08ml/sec) Flow rate adjustment unit: 6.24ml/min (104nl/sec) Features: Equipped with management functions for discharge volume and flow rate via an encoder, and a report function to notify errors during abnormal conditions. Easy linkage operation with I/O terminals. Has a working volume memory function. Robust design reduces service costs for embedded devices and contributes to a lower failure rate of the equipment.

  • Syringe Pump
  • Other physicochemical equipment
  • Analytical Equipment and Devices

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Centris syringe pump for liquid precursor supply in ALD/CVD.

For the supply of liquid precursors for ALD/CVD! It allows for liquid volume adjustment in 0.3 nl increments and flow rate adjustment in 17 nl/min increments. Ideal for pumping that requires strict optimization.

A high-precision pump supplied by the world's top manufacturer, Tecan, in the embedded syringe pump market. Many devices have been introduced domestically. It is widely used for liquid delivery purposes that require non-pulsating, accurate, and highly reproducible performance. Centris Volume range for a single delivery: 0.3 nl to 12.5 ml (*) Volume adjustment unit: minimum 0.3 nl Flow rate range: 17 μl/min to 750 ml/min (0.3 nl/sec to 12.5 ml/sec) Flow rate adjustment unit: 17 nl/min (0.3 nl/sec) * Depends on the syringe capacity installed (50 μl to 12.5 ml) Example: When a 5 ml syringe is installed Volume adjustment unit: minimum 104 nl Flow rate range: 1.62 μl/min to 300 ml/min (0.3 nl/sec to 5 ml/sec) Flow rate adjustment unit: 1.62 μl/min (28 nl/sec) This pump has a resolution of 181,490 steps relative to the installed syringe, enabling highly precise liquid handling. Additionally, it can be equipped with liquid path switching valves ranging from 3 ports to 12 ports, allowing for the suction of solutions from multiple liquid sources. A mechanism is incorporated to continuously monitor the delivery volume and flow rate, automatically notifying of any abnormalities with error codes.

  • Syringe Pump

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Centris pump for precise pulse supply in semiconductor ALD and CVD.

For the supply of liquid precursors for ALD/CVD! It allows for liquid volume adjustment in 0.3 nl increments and flow rate adjustment in 17 nl/min increments. Ideal for pumping that requires strict optimization.

A high-precision pump supplied by the world's top manufacturer, Tecan, in the embedded syringe pump market. Many devices have been introduced domestically. It is widely used for liquid delivery purposes that require non-pulsating, accurate, and highly reproducible performance. Centris Liquid delivery volume range per operation: 0.3nl to 12.5ml (*) Volume adjustment unit: minimum 0.3nl Flow rate range: 17μl/min to 750ml/min (0.3nl/s to 12.5ml/s) Flow rate adjustment unit: 17nl/min (0.3nl/s) * Depends on the syringe capacity installed (50ul to 12.5ml) Example: When a 5ml syringe is installed Volume adjustment unit: minimum 104nl Flow rate range: 1.62μl/min to 300ml/min (0.3nl/s to 5ml/s) Flow rate adjustment unit: 1.62μl/min (28nl/s) This pump has a resolution of 181,490 steps relative to the installed syringe, enabling highly precise liquid handling. Additionally, it can be equipped with liquid path switching valves ranging from 3 ports to 12 ports, allowing for the suction of solutions from multiple liquid sources. A mechanism is incorporated to continuously monitor the delivery volume and flow rate, automatically notifying of any abnormalities with error codes.

  • Syringe Pump

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Holy Sword Integrated Syringe Pump Excalibur (XCalibur)

A proven Techan syringe pump with 24,000 steps, ideal for product development that requires high dispensing precision. Compact yet ultra-durable design.

===== Overview ===== The Tekan Cavro XCalibur is a compact, lightweight OEM syringe pump with high dispensing accuracy. In recent years, the Excalibur has been applied in chemical analysis instruments and clinical diagnostic devices worldwide due to its performance and durability, and it is actively incorporated into our automated dispensing systems. It can perform various operations with simple commands and notifies users of errors with error codes in case of issues. It is ideal for product development that requires space-saving and high dispensing accuracy. It is fully compliant with RoHS3. (*Demo and loan units are available) *For detailed specifications, please click "Download Catalog" below.

  • Other pumps
  • Syringe Pump
  • dispenser

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Development of maintenance-free POCT and in vitro diagnostic devices with a pump that withstands 5 million cycles.

A new piston pump that achieves lightweight, high precision, low cost, and high durability: the maintenance-free pulser PBC that maintains precision even after 5 million cycles.

High-precision components that bring maintenance-free operation for long periods, short development times, low cost, and compactness to in vitro diagnostic analyzers and POCT analyzers. *For detailed specifications, please click "Download Catalog" below.* - Improved accuracy and reduced tact time through backlash compensation mechanism. - Maintenance-free for long periods: No regular replacement parts. Durability of 5 million cycles. Options for materials resistant to strong liquids. - Less than CV 0.05% at full stroke, similar high precision even with piston micro-movements. - Short development time: Quick optimization through base options. Meets ISO 13485, FDA 21 CFR Part 820 requirements, UL approval, RoHS compliance, and REACH compliance. - No need for validation or calibration (backlash compensation structure). - Option to choose whether to include a control board. (Control board: Easily controls subtle liquid movements via commands. Diverse error logs are also automatically generated.) - Low cost. - Short lead times even as of 2022. - Pressure sensor: Detects liquid leakage as small as 1μl. - Compact and lightweight. *For more details, please download the PDF or contact us.*

  • Syringe Pump
  • Analytical Equipment and Devices
  • X-ray fluorescence analyzer

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Freely customizable arm - Liquid handling Cartesian robot Omni

The most versatile liquid handling arm. It offers flexibility tailored to your needs with a quiet and smooth modular design.

You can experience the design of a dispensing robot arm with your desired specifications using the design link below! https://apps.kaonadn.net/5463001/robot/index.html#;5 You can design configurations tailored to your needs, such as selecting nozzles and disposable tips, moving tubes and multi-well plates, and automatically loading them into analytical devices. It is possible to have a frame that allows the device to stand alone or a specification without a frame that bridges between devices. This system features liquid handling arms (XYZ) and optional accessories (probes, grippers, etc.) supplied by Tecan, which is involved in the design and contract manufacturing of numerous high-throughput automatic dispensing devices, automatic purification pre-treatment devices, and automatic measurement devices for in vitro diagnostics worldwide. Options for with or without chassis are available. It enables the best arrangement according to your purpose and application using exactly the same components as our proven devices. Robustness with a 2-year warranty. *Click "Download Catalog" for specifications.*

  • Syringe Pump
  • Other industrial robots
  • Dispenser

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Tekan Liquid Dispensing Robot Arm Comprehensive Catalog

This is a comprehensive catalog of X, Y, and Z arms (cross-axis arms) for automatically performing liquid dispensing, enzyme reactions, and chemical reactions.

Essential items for more reliable and faster automatic liquid dispensing Flexible modular liquid dispensing arm for OEM There are three types of robots: the latest Omni Flex, Omni, and the proven RSP and MSP. Easy operation with teaching and commands. Precision pumps can also be controlled simultaneously via commands.

  • Syringe Pump
  • Other industrial robots
  • Dispenser

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High-precision and fast! XYZ robotic arm for dispensing - Omni

Choose your size and configuration freely with the XYZ arm for automatic analysis manufacturers. Bring the world-renowned Tecan robotic arm technology to your machines!

*About the demo: Please consult with us. *For detailed materials, click "Download Catalog" below. To achieve accuracy and speed that set you apart from your competitors, it is both time-efficient and risk-averse to introduce components from devices that already have a proven track record. Validated components that meet the requirements of ISO 13485 and ISO 9001, and comply with regulations in many regions. This arm contributes reliably to delivering safe finished products to the users of your equipment by freely combining validated components such as pumps.

  • Other industrial robots
  • Mechanical Design
  • Dispenser

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Presentation of the new edition of the syringe pump comprehensive catalog (Japanese version)

Which pump should I choose... Free gift included. Comparison chart provided. Popular uses and applications are also listed. Simple to select.

Includes a comparison table that clearly shows the features of the pumps. You can easily search for suitable pumps for product development by quickly understanding the valve and syringe options, as well as the specifications. It features pipette modules for simple device configurations, world-class syringe pumps with proven performance, and cost-effective piston pumps with high durability. *For more details, please download the PDF or contact us.*

  • Other machine elements

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Why is the syringe pump called Excalibur (XCalibur)?

A proven Techan syringe pump suitable for product development requiring 24,000 steps and high dispensing accuracy. Compact yet ultra-durable design.

===== Summary ===== The Tekan Cavro XCalibur is a compact and lightweight OEM syringe pump with high dispensing accuracy. In recent years, the Excalibur has been applied to analytical devices and clinical diagnostic equipment worldwide due to its performance and durability, and it is actively incorporated into our automatic dispensing systems. It is suitable for product development that requires space-saving and high dispensing accuracy. It is fully RoHS compliant. The valve supports various liquid path switching. The photo shows a model equipped with a specially designed valve. Additionally, a new solenoid valve type has also been released. (*Demo and pump loan (including evaluation kits) are available) *For detailed specifications, please click "Download Catalog" below.

  • Syringe Pump
  • Other physicochemical equipment
  • Analytical Equipment and Devices

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Pump in the analysis device <for liquid transfer of 1μl to 50ml>

Easily meet strict equipment specification requirements. More accurate and precise liquid transfer and dispensing conditions can be easily achieved! We offer price ranges and specifications that match your needs.

"September 2017 Updated Catalog" and each product catalog - Teledyne, which holds a top-level share as a precision pump and high-speed dispensing device for OEM equipment, generously provides its core technology, the pump. - A lineup of Teledyne Cavro pumps is featured to easily integrate Teledyne's dispensing technology into your equipment. - The lineup includes the conventional disposable tip dispensing module ADP, as well as the syringe pump XE1000, Excalibur, XLP6000, and Centris, along with new products such as ADP Detect and the Excalibur solenoid valve type. - A new product, the PBC piston pump, which is low-cost, highly accurate, and ultra-durable, is also available, satisfying those who are very concerned about manufacturing costs for scientific and medical analytical devices. - Products with control base specifications can be tested immediately (within 1 minute) under your preferred dispensing conditions after power connection. - Compliant with Class I medical device standards, ISO 13485, and environmental regulations RoHS 3. *For more details, please contact us or download the catalog materials below.

  • Syringe Pump
  • Positive Displacement Pump
  • dispenser

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Comprehensive catalog of the trusted Cavro brand dispensing nozzle (dispensing probe).

Nozzle (probe) for Tekan systems and devices designed for accurately dispensing liquids with various properties, from ultra-micro to large volumes, under various conditions.

Cavro's components have been providing innovative and reliable liquid dispensing technology to developers of devices and systems for over 40 years. To dispense liquids accurately, it is necessary to adjust the dispensing conditions of high-precision syringe pumps or pipette modules according to the volume and properties of the liquid. However, it is equally important to select the dispensing nozzle or probe that will be the tip for expelling or aspirating the liquid. This consideration becomes particularly crucial when dealing with volumes of 1 ml or less. In fact, our company has been providing dispensing probes for many years to establish reliable measurement systems in fields such as in vitro diagnostic analysis devices, analytical chemistry, and production facilities. These probes are also utilized in our high-throughput, high-precision dispensing systems that we offer.

  • nozzle
  • Other pumps
  • Syringe Pump

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Pumping module achieving low pulsation and ultra-high resolution for fuel cell manufacturing.

For supplying electrolyte in fuel cells! Improve performance and reliability with a high-end liquid delivery module.

In the manufacturing of fuel cells (MEA), the uniformity of the catalyst layer is a decisive factor that affects the cell's power generation efficiency and yield. Tekan's high-end liquid delivery module, Cavro Centris, achieves an ideal thin film coating through smooth motion. 【Application Scenarios】 - Liquid supply to die coaters or comma coaters for the formation of MEA (membrane electrode assembly) catalyst layers - Optimization of catalyst composition: Automatic and precise reproduction of fine variations in mixing ratios that are impossible to achieve manually - Hydrophilization treatment and surface modification of the electrolyte membrane (PEM): Droplet application and coating of modification liquid onto the electrolyte membrane 【Benefits of Introducing Cavro Centris】 - Dramatic improvement in coating quality due to pulsation-free liquid delivery - Minimization of loss of expensive catalyst materials through "drop" control - Robust design that withstands harsh slurry characteristics - Continuous flow achieved through tandem operation (using two units)

  • Syringe Pump
  • Positive Displacement Pump
  • pump

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Compact design precision liquid delivery unit for semiconductor manufacturing.

24,000 steps of high dispensing accuracy. Ideal for precision coating in semiconductor manufacturing processes.

The Cavro Xcalibur is a compactly designed precision liquid delivery engine that is ideal for semiconductor-related devices where miniaturization and high integration are required. Despite its slim housing with a 30mm stroke, it maintains the quantitative accuracy inherited from higher-end models. Its flexibility in installation allows for the construction of multi-channel liquid delivery lines with multiple pumps arranged in parallel, all within a minimal footprint. "I want to maintain high precision liquid delivery while making the device more compact" — this embodies the aesthetic functionality dedicated to making that ideal a reality. 【Usage Scenarios】 - Multi-channel chemical supply units: Suitable for multi-system supply systems that individually control and supply multiple different chemicals. - Benchtop and lab semiconductor evaluation devices: Ideal for integration into prototype coaters for research and development or small devices that evaluate material properties. - Integration into analysis and inspection modules: Functions as a sampling and dilution pump for analysis units that monitor chemical concentrations in real-time during semiconductor processes or impurity inspection devices. 【Why Xcalibur?】 - Short body design with a 30mm stroke. - Optimal for multi-channel liquid delivery. - Sufficient accuracy and reasonable introduction costs.

  • Syringe Pump
  • Other physicochemical equipment
  • Analytical Equipment and Devices

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Low-pulse, ultra-high-resolution dispensing solution for semiconductor manufacturing.

Semiconductor process optimization: low pulsation, ultra-high precision liquid delivery solution.

In the further miniaturization and high integration of semiconductor manufacturing, what influences product quality and yield is **"the extreme precision of liquid handling."** Particularly in next-generation processes where even slight flow variations can lead to catastrophic defects, challenges have emerged that conventional liquid delivery systems cannot address. The Cavro Centris Pump provides unprecedented stability in each process as miniaturization advances, thanks to its industry-leading resolution (up to 192,000 steps). 【Application Scenes】 - Precision dispensing of photoresist (lithography) - Supply of resin for nanoimprinting - Flow control for slit die coating (thin film formation) - Automatic adjustment of electroless plating solutions - Additive management for electroplating (ECP) - Inline blending of chemicals - Precise supply of slurry and additives in CMP (chemical mechanical polishing) processes 【Effects of Implementation】 The Centris Pump eliminates slight variations and pulsations in discharge volume that can cause coating inconsistencies, contributing to a dramatic improvement in yield. Its compact design, intended for integration into equipment, maximizes design flexibility for upgrading existing systems and developing next-generation devices.

  • Other pumps

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Perfect development in a short time! Techan's pump for dispensing from below 1μl to 50ml.

Advanced dispensing technology from Tekan is now at your fingertips! Achieve high-precision and fast liquid delivery and dispensing with exquisite control, all without the need for calibration.

"September 2017 Updated Catalog" - Featuring a lineup of Tecan Cavro pumps to easily integrate Tecan's dispensing technology into your equipment. - Tecan, known for providing high-throughput dispensing systems, has been supplying Cavro pumps used in these systems for over 40 years. - All products are validated. No calibration is required at all. - Easy integration of the system with command control, reporting functions, error code reporting, and self-diagnostic capabilities. Can also address various troubles. - The new piston pump is a recommended product that requires no maintenance even after 5 million piston cycles, and offers high precision at a low price. *For more details, please contact us or download the PDF materials.

  • dispenser

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[Information] A method for rapidly developing custom-specification molecular diagnostic devices.

Accelerating the custom development of molecular diagnostic devices! An explanation of collaboration with OEM partners and more.

This document is a white paper that explains how to rapidly develop custom-spec molecular diagnostic devices. It introduces the modular liquid handling platform "Cavro Omni Flex," which features selectable workspace sizes and various pipetting options. It also highlights the benefits of partnering with experienced OEM partners and points to facilitate smooth product development. We encourage you to read it. 【Contents (partial)】 ■ The option of OEM for achieving faster and more efficient molecular diagnostics ■ Cavro Omni Flex: A modular platform ■ Appropriate approaches for molecular diagnostics, pipetting with Cavro ADP ■ Simple system construction ■ Compliance ■ Customer feedback *For more details, please download the PDF or feel free to contact us.

  • Dispenser
  • Other analytical and testing equipment

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Hyper CLT flooring panel

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Please take a look at the technical document for the leak test, the "Technical Manual"!

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■■ Leak test for pouch containers such as packed rice! | MSQ-2003 series ■■ Packaging container air leak test device, pinhole inspection device, and full inspection device.

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Release of IsoLite Industrial's 3mm 1600SF Blanket.

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Fukuda's leak test, leak inspection, leak detection, leak test, integrity test.

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