High-performance syringe pump suitable for managing chemicals in semiconductor manufacturing processes.
Cavro XCalibur
A slim and high-performance syringe pump that simplifies the design of flow path systems and their integration into devices.
This is a high-performance compact-type syringe pump for embedded use, featuring various valve specifications. It can accommodate a variety of syringes and achieves excellent accuracy and reproducibility. This pump is not only suitable for analytical devices in the medical and scientific fields, factory automation, and sealed tube sampling under positive pressure or vacuum, but it is also highly recommended for semiconductor manufacturing processes that require precise and uniform liquid control in small quantities.
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basic information
■ Ideal for aspirating, diluting, and dispensing liquids from 5 μl to 5 ml ■ Various valve options available ■ Glass syringe options: 50 μl, 100 μl, 250 μl, 500 μl, 1 ml, 2.5 ml ■ Resolution: 3,000 steps (24,000 steps in micro-stepping mode) ■ Material options for glass syringe contact parts: PTFE, UHMWPE ■ Dimensions: 127 (H) × 46 (W) × 114 (D) mm ■ Dispensing accuracy: 0.05% CV/FS ■ Interface: RS232, RS485, or CAN BUS
Price information
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Delivery Time
※The delivery time varies depending on the quantity, so please inquire.
Applications/Examples of results
■ Analytical devices in the medical and scientific fields ■ Factory automation ■ Sealed tube sampling under positive pressure or vacuum ■ Management of chemical solutions in semiconductor manufacturing processes (coating, cleaning, etching, etc.)
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![[Case Study] Utilization of the OmniFlex Liquid Dispensing Robot and XCalibur Pump in the CD Spectrometer Sample Automation Device.](https://image.mono.ipros.com/public/catalog/image/01/cea/696408/IPROS28780544958347601850.jpeg?w=120&h=170)
Company information
Tecan is a company that was established in Switzerland in 1980, specializing in the manufacturing and development of life science research support equipment. With the support of many customers, we were able to celebrate our 30th anniversary in Japan in 2022. Tecan Japan operates two businesses. One is the life sciences business, which delivers Tecan-branded products such as automated pipetting systems and microplate readers to end-users. The other is the partnering business, which provides components and equipment as OEM products for partner companies. Our customers span a wide range of fields, including disease research, drug discovery, biotechnology, clinical testing (such as cancer diagnosis, infectious disease diagnosis, and testing centers), scientific analysis, and robotic surgery. Our mission is to improve people's lives and health. Tecan Japan aims to contribute to global health care innovation from the life sciences industry to clinics by supporting our customers' daily activities.
