Next-generation cleaning technology! Ultrasonic non-contact floating and transport device.
Ultrasonic non-contact floating and transportation
Non-contact transport of wafers and glass substrates using ultrasound! It's a clean transport technology! No contamination from contact! No contamination risk from air blow!
Compared to conventional solutions like Bernoulli chucks and air floating tables, ultrasonic non-contact transport technology has numerous advantages. ◆ No need for compressed air or compressors ◆ No air blowing in clean rooms ◆ No contamination risk from air blowing ◆ No risk of foreign object transfer due to contact ◆ Ultra-low energy transport technology ◆ Ultra-low running costs ◆ Transport with minimal load on the substrate and low damage rate
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basic information
<Principle of Ultrasonic Levitation> Ultrasonic non-contact levitation and transport technology generates a strong repulsive force through the squeeze film levitation effect between an ultrasonic generator and a flat substrate, creating an air film. This allows for the movement of workpieces without causing friction. The force profile is similar to that of a conventional air-based levitation table. However, the ultrasonic levitation system does not require a compressor or air pump. This ultrasonic technology utilizes the air or (process) gas around the interface to generate pressure. This technology has applications in the semiconductor industry for wafer transport, in the solar cell industry for wafer, module, and flat panel handling, in the battery industry for non-contact transport of electrodes and plates, and in roll-to-roll processes for non-contact, ultra-low friction guide rolls.
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Applications/Examples of results
Applications ■ Battery electrodes and plates ■ Semiconductor wafers and components ■ Solar cell wafers and modules ■ TFT (Thin Film Transistor) ■ Flat panel coated glass (from small to large) ■ MEMS and MOEMS ■ Biochips ■ Machined surfaces ■ Special coatings and lacquered sheets ■ Scratch-sensitive parts ■ Printing sheets, paper, films
Company information
As a trading company specializing in industrial machinery, we have provided logistics and after-sales services under the motto of "Services that can be trusted by overseas partners and customers," and we have received high praise both domestically and internationally. If you are looking for any equipment or facilities, please feel free to contact us, regardless of whether it is one of our handled products.
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