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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Wafer processing/polishing equipment
  6. Flat panel exposure device <super large vertical exposure>

Flat panel exposure device <super large vertical exposure>

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last updated:Feb 29, 2012

清和光学製作所
清和光学製作所
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Significantly reduce the bending of large panel masks!!

<Features> This is a vertical exposure device for masks that minimizes the bending of large panel masks. It performs exposure of multi-faceted, large panels in X-steps with high alignment accuracy. The device features precise temperature control for both the mask and the panel, resulting in a reduced total pitch.

    Wafer processing/polishing equipmentOther semiconductor manufacturing equipmentOther surface treatment equipment
SuperLargeVertical

Flat panel exposure device <super large vertical exposure>

SuperLargeVertical small size.gif
SuperLargeVertical small size.gif
  • Related Link - http://www.seiwaopt.co.jp/products/equip/exposure.…

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basic information

<Specifications> Applicable Sizes: : 150-inch compatible X-step exposure : 50-inch 12-facet X-step : 42-inch 8-facet single grouping Method: Vertical mask Lamp House: Utilizes lamps of 16KW, 25KW, and up to 35KW, ensuring high brightness, irradiation distribution within ±5%, and optimal light parallelism.

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Flat panel vertical exposure

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清和光学製作所

清和光学製作所

Electronic Components and Semiconductors

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We will challenge the unknown world based on optics. The 21st century is said to be the "age of light," with remarkable advancements in optical technology. In our manufacturing company, we aim to accelerate future-oriented technological capabilities centered around "optical technology," actively tackling the information technology, ultra-fine technology, and scientific technology that the times require, and to be a dynamic company that acts swiftly. At the same time, we are committed to continuously promoting innovations suitable for the new century, striving to create safe and reliable products, and to remain a company that is needed by the world, actively working towards a richer society. We sincerely ask for your continued guidance and support.

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