High quality, high throughput, and energy-saving! Compliant with SEMI standards, as well as UL and CE standards.
The "UPC-12500 SORA" is a fully automated FOUP cleaning system that has been improved with the concepts of high quality, high throughput, and energy efficiency, which are essential for modern semiconductor manufacturing. It complies with SEMI standards as well as CE standards. It is compatible with automated material handling systems (AMHS), and the communication protocol is compatible with GEM300, making it suitable for online management. 【Features】 ■ Improved throughput ■ Energy-saving measures ■ Space-efficient design ■ GEM300 compatibility ■ Enhanced maintainability *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications (Excerpt)】 ■Dimensions: 2,200(W) × 3,230(H) × 2,500(D) mm ■Weight: 3,200kg (when pure water tank is full) ■Power Supply: 3-phase AC 200V ±10%, rated 26.0kVA ■Pure Water: 15L/min ■CDA1 (for drying): 4,000 to 4,500L/min, 0.7 ± 0.05MPa ■CDA2 (for driving): 500L/min, 0.7 ± 0.05MPa *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
Company information
Hugle started in 1969 as the Far East branch of the American company Hugle Industries, a world leader in semiconductor manufacturing equipment during the early days of the semiconductor industry. Taking advantage of this first-mover advantage, it established a foundation as an independent manufacturer in 1971. Since then, in the ever-evolving world of semiconductors and flat panels such as LCDs, we have consistently developed and provided numerous innovative products ahead of the times. What we particularly want to highlight is our unwavering commitment to originality, focusing on equipment and devices related to a "pure and clean production environment," which are not commonly addressed by others and significantly impact quality. As you know, semiconductor technological innovation aims for limitless miniaturization, which inevitably requires "ultra" levels of cleanliness and purity in production and inspection environments. Therefore, we have prominently embraced the philosophy of "Clean & Quality," striving to refine our available technologies to realize a more advanced production environment.
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