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  5. Evaporation Equipment
  6. Real-time measurement of optical properties: 'Vacuum Ellipsometer Deposition System'

Real-time measurement of optical properties: 'Vacuum Ellipsometer Deposition System'

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last updated:Sep 30, 2024

エイエルエステクノロジー
エイエルエステクノロジー
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A deposition device for ellipsometry that can measure optical properties in real time during vacuum deposition.

Our company designs, manufactures, and sells a "vacuum ellipsometer deposition system" that can measure the optical properties of thin films in real-time during deposition. 【Deposition System Main Specifications】 ○ Main Body and Chamber → Deposition chamber dimensions: 280mm (width) × 290mm (depth) × 410mm (height) → Ellipsometer mounting flange: angle selectable 100°/120°/140° → Aluminum door: viewing window (effective visible diameter: φ96mm) → Three ports for external feedthrough (NW40) → One port for vacuum exhaust (NW40) ○ Substrate Holder Structure → Maximum substrate size: φ110mm → Substrate heating or cooling structure

    Evaporation Equipment
als_jotyaku.jpg

Real-time measurement of optical properties: 'Vacuum Ellipsometer Deposition System'

als_jotyaku.jpg
als_jotyaku.jpg
  • Related Link - https://als-technology.com/index.html
  • Special site - Product/service details - https://pr.mono.ipros.com/als-tech/product/

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【Purpose】 ○ For in-situ ellipsometry deposition equipment ● For more details, please contact us.

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Real-time measurement of optical properties: 'Vacuum Ellipsometer Deposition System'

Real-time measurement of optical properties: 'Vacuum Ellipsometer Deposition System'

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ALST Technology Co., Ltd. Company Profile

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エイエルエステクノロジー

エイエルエステクノロジー

Testing, Analysis and Measurement

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Our company was established to manufacture and sell research vacuum equipment for use in university laboratories and general corporate research facilities, with the aim of providing devices that achieve high customer satisfaction. We will fully utilize the vacuum technology design skills and thin film process technologies that we have accumulated over the years to design and manufacture optimal devices from the perspective of the researchers who will be using them. Due to their characteristics, vacuum devices are expensive compared to general consumer goods such as household appliances. To provide you with reliable, high-quality devices and components at a lower cost, we will make the following efforts: ● All vacuum devices will be designed optimally after sufficient exchange of opinions based on your specifications. ● We will handle a wide range of products, from individual vacuum components to high-performance vacuum devices, to meet your diverse needs. ● We will actively conduct research to gather better vacuum components from a global perspective and utilize them in our devices. ● To make effective use of your existing vacuum devices, we will assist with modifications and the production of vacuum components and devices that require advanced technology. ● In line with your budget, we will maintain performance and reduce costs through modifications of used devices and the use of second-hand units.

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