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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Wafer processing/polishing equipment
  6. "Trinity-Y Series" EJD-6BY

"Trinity-Y Series" EJD-6BY

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last updated:Sep 19, 2014

日本エンギス
日本エンギス
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It is suitable for all types of slurries and is ideal for simultaneous grinding of difficult-to-machine materials on both sides.

A compact and multifunctional CMP-compatible double-sided polishing device in size 6B has been developed from the "Trinity-Y" series. It is made using full stainless steel dust covers and thoroughly corrosion-resistant materials throughout, making it suitable for all types of slurries and ideal for simultaneous double-sided polishing of difficult-to-machine materials. Additionally, by combining it with other Trinity-Y devices, space-saving can be achieved, allowing for the construction of a highly functional processing system without waste. 【Specifications】 ○ Polishing plate outer diameter φ386 × inner diameter φ148 mm ○ Plate rotation speed maximum 10–60 r.p.m. For more details, please contact us or download the catalog.

    Wafer processing/polishing equipment
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"Trinity-Y Series" EJD-6BY

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  • Related Link - http://www.engis.com/
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basic information

【Specifications】 ○ Main Motor: 2.2Kw 200V 3-phase ○ Drive Method: 4WAY 5 Carrier ○ Control Panel: LCD Touch Panel Type 7.4 inch Color ○ Utility: Power 200V 3-phase 30A, Air CDA 0.5Mpa ○ Equipment Dimensions: 800×800×1920 (mm) ● For more details, please contact us or download the catalog.

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Handbook of Basic Knowledge for Wrapping & Polishing

Handbook of Basic Knowledge for Wrapping & Polishing

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日本エンギス

日本エンギス

Industrial Machinery

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Our company is committed to providing cutting-edge lap technology based on the know-how of diamond wrapping that our sister companies in the United States and various European countries have accumulated over many years. All of our staff sincerely look forward to serving customers who seek higher precision and quality in wrapping process technology.

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