The transport section contributes to the miniaturization of the vacuum transfer chamber.
Industry's smallest class, enabling device miniaturization Our standard atmospheric aligner: 80% footprint reduction (□85x100mm), 80% volume reduction Contributes to a variety of transport scenarios through combinations Compatible with transparent and translucent materials respectively
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basic information
Transported item: 2-inch silicon wafer Positioning accuracy: Centering: within ±0.3mm Orifla locate: within ±0.3 degrees Positioning time: Centering to Orifla approximately 10 seconds Sensor: Orifla search sensor Wafer holding method: During alignment: positioning with edge grip mechanism driven by air cylinder During Orifla search: wafer on spindle held by vacuum suction Cleanliness: ISO Class 2 (during exhaust of drive unit) Drive method: 2-phase stepping motor used on 1 axis (motor driver is built-in) Utility: Power supply: DC24V±10% 2A
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
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