It contributes to the miniaturization of vacuum transfer chambers.
Industry's smallest class, enabling miniaturization of equipment. Our standard vacuum robot: 65% footprint (φ95mm), 75% reduction in volume. Arbitrary reach distance can be set by combining arms.
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basic information
Robot Specifications Robot Model: TSVCR3060N-020-PM Transported Item: 2-inch Silicon Wafer Wafer Holding Method: Rough guide method using drop-in Mechanical Structure Type: Cylindrical coordinate type Control Axes: 3 axes Motor Type: Encoder-equipped 2-phase pulse motor Operating Range: Arm (R-axis) ±119mm, Swing Angle (θ-axis) 360 degrees, Vertical Stroke (Z-axis) 20mm Transport Speed: Arm (R-axis) 230mm/sec, Swing Angle (θ-axis) 450 degrees/sec, Vertical Stroke (Z-axis) 40mm/sec Repeatability: Within ±0.1mm Cleanliness Measures: Addressed with magnetic fluid seals and filters Vacuum Resistance: 1.33×10^-6 Pa Utility: Power supply: DC24V±10% 4A Mass: Robot body approximately 7kg Controller Specifications Controller Model: C4301 Series Interface: RS232C, Parallel Photo I/O This specification represents the typical specifications of the TSVCR3060N-020-PM. It may vary depending on the transported item and chuck shape.
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
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