Non-contact chuck of the vertical gas jet method at the Solar Research Institute.
The "non-contact chuck" of the Solar Research Institute's vertical gas jet method can suspend and transport glass substrates in a non-contact state by ejecting air towards the glass substrate, allowing it to float in mid-air. ● Compatible with a wide variety of workpieces Users come from various industries, including semiconductors, FPD, polarizers, films, optics, electronics, paper, and textiles, with delivery records reaching several hundred. The size of the workpieces ranges from chips/lenses a few millimeters square to glass several meters square, with thicknesses also varying from a few micrometers. The characteristics of the workpieces are diverse, including warped wafers, through-holes, breathable and flexible workpieces, and surface-coated workpieces.
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basic information
The "non-contact chuck" of the Solar Research Institute employs a vertical gas jet method, which ejects air towards the glass substrate, allowing the glass substrate to be suspended in a non-contact state in mid-air for transportation. When the gap between the operating surface and the workpiece is large, the gas ejection nozzle, cushion chamber, and the gap between the operating surface and the workpiece function as the nozzle, vacuum chamber, and diffuser of an ejector, respectively. As a result, a negative pressure is generated in the cushion chamber, pulling the workpiece closer. When the workpiece is drawn in and the gap with the operating surface decreases, the cushion chamber functions as a pressure chamber type air cushion (hovercraft), causing the pressure in the cushion chamber to rise sharply and separating the workpiece. The distance between the operating surface and the workpiece is automatically maintained at a distance that keeps the pressure in the cushion chamber balanced, allowing the workpiece to be suspended in a non-contact state in mid-air.
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Applications/Examples of results
Semiconductor wafers, liquid crystal glass substrates, functional films, lenses, microchips, ceramic green sheets, non-woven fabrics, and others.
Company information
Manufacturing of non-contact transport devices and application devices for wafers, liquid crystal glass substrates, PDPs, ceramics, printed circuit boards, FPC substrates, films, paper, cloth, etc., using our patented non-contact transport device "Float Chuck" based on the vertical gas jet method developed by our company.
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