It is a device that performs macro inspection of wafers and micro inspection using a microscope.
- Macro inspection uses an outer peripheral chuck and allows for inspection of both sides of the wafer by adjusting the wafer tilt and horizontal rotation with a joystick. - In micro inspection, it is possible to specify inspection points via a recipe. - The extraction of wafers from the cassette, transportation to each inspection unit, and storage back into the cassette are all performed by an automatic wafer transfer robot. - The wafer transfer robot employs a Bernoulli-type hand, enabling it to handle thin and warped wafers. - Equipped with an FFU (PTFE specification) and an all-stainless steel frame, it can support a high-cleanliness environment. - Communication with the factory HOST is also possible.
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basic information
- The micro examination results will be saved to a file. - The camera images from the microscope can be saved to the PC.
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Applications/Examples of results
We have received orders from the semiconductor industry.
Company information
☆Dedicated Semiconductor Website Now Open!! https://www.wafer-measurement-inspection.com/ At Justem Co., Ltd., we design, manufacture, and sell automation and labor-saving machines for the wafer manufacturing process, including non-contact thickness measurement machines for wafers, wafer thickness sorting machines, automated lapping and polishing machines, and wafer transfer machines, targeting materials such as Si, SiC, and sapphire, through our unique technology development. We have provided these to many customers. We also design, manufacture, and sell specialized machines for electronic component processing and automotive parts processing. We also accept demo measurements for thickness measurement of various materials.
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