High-precision and reliable metal seal model
The FC-R7800 series not only provides high-precision flow control but also features excellent high airtightness with metal seals, making it suitable for major gas control applications. It offers the convenience of choosing between industry-standard or Aera's proprietary electrical connections, allowing for quick and easy replacement of existing mass flow controllers (MFCs).
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basic information
Features - High-speed response - Flow stabilizes in less than 1 second after setting input - Corrosion-resistant design - Metal seal adopted - VCR-compliant connection - Full-scale flow range from 10 sccm to 200 slm - Normally closed or normally open solenoid control valve - External leak rate of less than 1x10^-11 Pa·m³/sec (He)
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Applications/Examples of results
In the markets for semiconductors, FPD, data storage devices, industrial vacuum equipment, industrial coatings, etc., applications using non-corrosive gases, including CVD, PVD, etching, ion implantation, sputtering, thermal oxidation films, optical glass coatings, optical fibers, surface treatment, and other coating processes are included.
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Company information
Thank you for your continued support. Since our establishment as Tokiko Pressure Gauge Co., Ltd. in 1964 through a joint investment by Tokiko Co., Ltd. (now Hitachi Automotive Systems, Ltd.) and Nagano Keiki Co., Ltd., we have continuously grown across a wide range of fields, including general industrial equipment, railway vehicles, office supplies, home appliances, medical devices, and infrastructure-related industries, and we have celebrated our 50th anniversary thanks to your support. In 2015, while centering on the products of Hitachi Automotive Systems, Ltd. and Nagano Keiki Co., Ltd., we transformed into Hitachi Automotive Systems & Nagano Co., Ltd. as a member of the Hitachi Group, aiming to create a safe, secure, and comfortable living environment and to challenge all industries, products, and services. Moving forward, in addition to our core products, we will strive to be a trusted comprehensive distribution company by expanding our trading company functions and enhancing our engineering capabilities, and we will work hard to propose systems that meet your satisfaction. We kindly ask for your continued strict guidance and warm support.