Next-generation PI technology that meets tomorrow's process needs.
This groundbreaking technology platform improves responsiveness, gas flow stability, and measurement accuracy compared to conventional technologies, demonstrating excellent performance in real-time process control. Its superior flow stability enhances process reproducibility between chambers and improves production yield. The PI-980 series reduces the need for expensive gas panel components traditionally used in conventional thermal structures by integrating pressure sensors, temperature sensors, and our proprietary NeuralStep control technology. Additionally, the multi-gas, multi-range functionality dramatically reduces the need for spare inventory, further contributing to cost efficiency. This next-generation MFC technology, combined with the integrated diagnostic capabilities and the platform of our proven D980 series products in the field, enhances equipment uptime and enables rapid and easy troubleshooting.
![mass-flow-pi980-ph02[1].jpg](https://image.mono.ipros.com/public/product/image/ba7/2000254708/IPROS6448451528859536332.jpg?w=280&h=280)
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basic information
Features - Pressure-insensitive control is possible - High measurement accuracy and reproducibility - Compatible with IGS method - Accuracy verified with real gases, supports multi-gas and multi-range - Programmable in the field - DeviceNet, RS-485, analog control - Equipped with a display - Built-in self-diagnostic function - 100% metal seal, high purity specifications
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Applications/Examples of results
In the markets for semiconductors, FPD, data storage devices, industrial vacuum equipment, industrial coatings, etc., applications using non-corrosive gases, including CVD, PVD, etching, ion implantation, sputtering, thermal oxidation films, optical glass coatings, optical fibers, surface treatment, and other coating processes, are included.
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Company information
Thank you for your continued support. Since our establishment as Tokiko Pressure Gauge Co., Ltd. in 1964 through a joint investment by Tokiko Co., Ltd. (now Hitachi Automotive Systems, Ltd.) and Nagano Keiki Co., Ltd., we have continuously grown across a wide range of fields, including general industrial equipment, railway vehicles, office supplies, home appliances, medical devices, and infrastructure-related industries, and we have celebrated our 50th anniversary thanks to your support. In 2015, while centering on the products of Hitachi Automotive Systems, Ltd. and Nagano Keiki Co., Ltd., we transformed into Hitachi Automotive Systems & Nagano Co., Ltd. as a member of the Hitachi Group, aiming to create a safe, secure, and comfortable living environment and to challenge all industries, products, and services. Moving forward, in addition to our core products, we will strive to be a trusted comprehensive distribution company by expanding our trading company functions and enhancing our engineering capabilities, and we will work hard to propose systems that meet your satisfaction. We kindly ask for your continued strict guidance and warm support.
![[Case Study] Plasma Analysis of "Particle-PLUS" Dual Frequency CCP](https://image.mono.ipros.com/public/product/image/aec/2000679537/IPROS56625809199193232139.jpeg?w=280&h=280)
