Silicon wafer crystal defect void inspection device 'X-CAS-2'

Automatically inspect crystal defect voids inside silicon wafers!

The "X-CAS-2" from iBit is a device that automatically inspects voids, which are crystal defects inside silicon wafers, using X-rays. By adopting an X-ray inspection method, it is possible to conduct inspections regardless of the wafer's resistance value and even in the state before polishing (immediately after slicing). The sizes of the silicon wafers to be inspected are 12 inches and 8 inches, with an option to add 6 inches. 【Features】 - Automatically inspects voids inside silicon wafers - Inspections can be performed regardless of the wafer's resistance value - Inspections can be conducted even in the state before polishing - Inspections are applicable for 12-inch, 8-inch, and optionally 6-inch silicon wafers *For more details, please refer to the catalog or feel free to contact us.

Semiconductor inspection/test equipmentX-ray inspection equipment