Ideal for transporting thin wafers, glass substrates, metal foils, films, and more! Eliminates localized stress on the objects caused by conventional vacuum suction methods!
The "Soft Palm" is a handy type of electrostatic chuck that uses Coulomb force to contact and adsorb objects for handling. Its main feature is that it applies localized stress to thin materials due to its surface adsorption. Additionally, there are two types available: a battery-operated (rechargeable) cordless type and a semi-cordless type driven by a dedicated controller. 【Features】 ■ Portable anywhere due to being cordless ■ Can adsorb objects with uneven surfaces ■ The potential is minimized, so there is no dust adsorption on the backside *For more details, please request materials or view the PDF data available for download.
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basic information
【Lineup】 ■SP0510CL-10 (Cordless type) ■SP-SCL-100 (Semi-cordless type) *For more details, please refer to the catalog or feel free to contact us.
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Tsukuba Seiko Co., Ltd. is a company primarily engaged in the development, manufacturing, and sales of electrostatic adsorption systems. Our electrostatic chucks are designed to assist you in improving yield and production efficiency for your technological innovations. We can accommodate your specifications from prototypes to mass production, so please feel free to contact us.