[Aluminum Surface Treatment Problem Solving Case] Prevention of Foreign Matter Contamination in Semiconductor Manufacturing Equipment

Prevents the generation and contamination of dust due to film peeling with crackless hard anodizing that can withstand temperatures up to 350℃!

Fasteners such as jigs and bolts made of aluminum alloy used in the manufacturing process may undergo anodizing treatment, but there is a problem where the coating can crack or peel off at high temperatures. By applying a heat-resistant crack-free hard anodizing treatment called "TAF TR" to the surface of the parts, it is possible to prevent thermal cracking, which is the cause of coating loss, even in environments of 350°C without cracking. Not only is the issue of foreign matter contamination due to coating loss improved, but the roughness of the coating surface can also be enhanced compared to conventional hard anodizing, thereby improving the precision of the parts. [Challenges and Background] - Fasteners such as jigs and bolts made of aluminum alloy, when anodized, can experience cracking and peeling of the coating at high temperatures. - In the semiconductor manufacturing field, thorough quality control in the manufacturing site is required to address foreign matter issues that can particularly cause product defects. *For more details, please refer to the PDF document or feel free to contact us.*

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