Compact small-diameter thin wafer transfer device
The "Sic Holder Transfer Machine" is a device for transferring wafers from a horizontal oxidation/diffusion furnace wafer boat to a process cassette. We will provide it within 3 months after order and 3 days for startup adjustment. Please feel free to contact us if you have any requests. *For more details, please download the PDF or contact us.
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basic information
【Specifications】 ■Wafer Specification: 5 inches, 210–600μm ■Cassette: 50 pieces, Pitch: 2.38mm, PFA ■Cassette Charge: 4 cassettes / 8 cassettes ■Holder: 200–220 slots, Pitch: 2.38mm ■Charge Quantity: 200 pieces ■Throughput: 15 minutes / 200 pieces *For more details, please download the PDF or contact us.
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Since its establishment in 1977, our company has pursued advanced technology as a manufacturer of semiconductor cleaning equipment, designing and producing cleaning devices for ultra-LSI that boast high performance and high reliability through mechatronics and clean technology, even in the rapidly innovating semiconductor industry, and providing them to semiconductor manufacturers both domestically and internationally. In recent years, we have also been providing precision parts cleaning equipment that leverages our know-how in semiconductor cleaning equipment.
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