This is a device for storing concentrated solutions of 2 acidic and 1 alkaline liquid, and supplying the concentrated solutions through pressurized delivery using N2.
It is used for supplying concentrated liquid to CMP equipment. 【Features】 ■ Uses PTFE valves ■ Built-in exhaust damper * For more details about the product, please refer to the "PDF Download" button below. * Feel free to contact us with any inquiries.
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basic information
【Specifications】 〇Size ・ W1500×D600×H1300 (mm) 〇Chemicals ・ Acidic: H2O2, HF ・ Alkaline: NH4OH 〇Filter ・ Capsule filter, 0.1 micron, made of polysulfone 〇Valve ・ Air-operated valve, made of PTFE 〇Exhaust ・ Damper, built-in manometer
Price information
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Delivery Time
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Applications/Examples of results
【Purpose】 ■ Supply of raw liquid for CMP equipment
Line up（1）
| Model number | overview |
|---|---|
| P82 |
catalog（1）
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Company information
"Surely, for what is in the future." With this theme, we focus on the design and manufacturing of semiconductor manufacturing equipment and related devices, developing products that meet our customers' needs. We hope that the technologies we possess can be commercialized in various fields and be of benefit to our customers. Our entire staff is passionately engaged in the process of turning our customers' ideas into products, including research and development and prototyping. We sincerely look forward to your inquiries.
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