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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. 2D resistance heating vapor deposition device

2D resistance heating vapor deposition device

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last updated:Dec 06, 2019

和泉テック
和泉テック
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The vapor deposition source is of the boat type! The substrate is mounted on a plate on a support, and the height can be changed as desired.

The "2D Resistance Heating Vapor Deposition Device" is a system that allows for the easy vapor deposition of two materials using resistance heating. The deposition source is of the boat type, and the substrate is mounted on a plate supported by pillars, with adjustable height. The exhaust system utilizes both DP and RP, enabling high vacuum to be achieved in a short time. 【Features】 - The SUS upper chamber is equipped with two CF70 ports and two 50mm windows, while the lower chamber comes standard with six CF70 ports. - The upper chamber has a mechanism for vertical movement powered by electricity. - It comes standard with a film thickness gauge and can also operate in a gas atmosphere. - It allows for the easy vapor deposition of two different materials. *For more details, please refer to the external link page or feel free to contact us.

    Evaporation Equipment
2019-12-06_14h42_02.png

2D resistance heating vapor deposition device

2019-12-06_14h42_02.png
2019-12-06_14h42_02.png
  • Related Link - http://www.izumi-tec.co.jp/product1.html

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【Specifications】 ■SUS Chamber ■Achievable Pressure: 7×10^-2 Pa ■Substrate Holder: φ1 inch ■Resistance Heating Evaporation Source: W Boat Type, 2 units ■DP: 1500 L/s ■RP: 220 L/m ■Pirani Vacuum Gauge and Ion Vacuum Gauge: Standard Equipment ■Shutter Mechanism *For more details, please refer to the external link page or feel free to contact us.

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和泉テック

和泉テック

Industrial Machinery

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Izumi Tech Co., Ltd. primarily engages in the sale of scientific and physical instruments, and also conducts design and manufacturing activities as a trading company capable of producing goods. We specialize in manufacturing related to new industrial materials, environment, science, physics, electricity, architecture, and civil engineering. Please feel free to contact us if you have any requests.

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