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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. CVD Equipment
  6. High-frequency laser CVD device

High-frequency laser CVD device

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last updated:Dec 06, 2019

和泉テック
和泉テック
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Easily set up the sample! You can introduce the YAG laser from the external viewport to perform film deposition.

This product is a CVD device that allows film formation by introducing a YAG laser from an external viewport, with a sample stage (equipped with an automatic rotation mechanism) located at the center of a high-frequency heating coil. The sample inlet is located on the side of the chamber and can be opened and closed from both sides, making it easy to set the sample. It is also possible to install a gas supply system (up to 5 systems) at the top of the chamber as an option. 【Features】 ■ Film formation can be achieved by introducing a YAG laser from an external viewport ■ The sample inlet is located on the side of the chamber and can be opened and closed from both sides ■ Easy sample setup ■ Option to install a gas supply system (up to 5 systems) at the top *For more details, please refer to the external link page or feel free to contact us.

    CVD Equipment
2019-12-06_14h52_41.png

High-frequency laser CVD device

2019-12-06_14h52_41.png
2019-12-06_14h52_41.png
  • Related Link - http://www.izumi-tec.co.jp/product1.html

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basic information

【Specifications】 ■Exhaust system: Rotary pump (please consult separately for turbo pump requests) ■Sample stage size: 20 × 40 ■Sample stage rotation mechanism: Stepper motor (variable rotation speed) ■Vacuum gauge: Pirani vacuum gauge ■Laser entry device: With positioning mechanism (X, Y, goniometer mechanism) ■Chamber with water cooling mechanism *YAG laser is not included in the price. *For more details, please refer to the external link page or feel free to contact us.

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和泉テック

和泉テック

Industrial Machinery

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Izumi Tech Co., Ltd. primarily engages in the sale of scientific and physical instruments, and also conducts design and manufacturing activities as a trading company capable of producing goods. We specialize in manufacturing related to new industrial materials, environment, science, physics, electricity, architecture, and civil engineering. Please feel free to contact us if you have any requests.

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