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  4. Semiconductor Manufacturing Equipment
  5. Other semiconductor manufacturing equipment
  6. High-efficiency gas heating heater "WEX Series"

High-efficiency gas heating heater "WEX Series"

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WEX Series Heat Exchangers

last updated:Jul 16, 2024

ワッティー
ワッティー
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Compact, lightweight, and highly efficient! Equipped with standard thermocouples and thermostats, and supports changes in IN/OUT fittings.

The "WEX Series" provided by Watty is a high-efficiency gas heater made of all stainless steel (SUS316L) for gas heating, with joints and piping in the gas connection area. It offers specifications suitable for different sizes, with a minimum flow rate of 10L/min to a maximum flow rate of 100L/min, and can handle a maximum operating temperature of 300°C. It is equipped with standard features for temperature control and overheating prevention, and the wiring is also simple. The standard joint is UJR 1/4 Female size, compatible with inlet/outlet sizes ranging from 1/4 to 1/2. 【Features】 ■ Clean structure using only WEP pipes ■ Compact, lightweight, and high efficiency ■ Standard equipped with thermocouples and thermostats ■ IN/OUT joints are interchangeable ■ Available in four sizes: SS / S / M / L *For more details, please refer to the PDF document or feel free to contact us. ▼ Contact Information TEL: Sagamihara Office 042-704-5352 MAIL: info@watty.co.jp

    Other semiconductor manufacturing equipmentHeating device
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High-efficiency gas heating heater "WEX Series"

MG_6580.png
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  • Related Link - https://watty.co.jp/heater/gas/

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basic information

【Specifications】 ■ Maximum operating temperature: Supports 200℃ to 300℃ ■ Rated flow rate: Capable of handling up to 100L/min ■ Rated capacity: 130W to 1300W ■ Leak rate: Below 1×10-10Pa·m3/sec ■ Thermocouple: K type, Class 2 ■ Power supply: AC100 or AC200 ■ Thermostat: Disc type and block type ■ The 300℃ model comes with a dedicated burn prevention perforated metal exterior *For more details, please refer to the PDF document or feel free to contact us.

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[Achievements] ■ There is a track record of being adopted as a gas heater for semiconductor manufacturing equipment. It is used for applications such as heating carrier gas for bubbling. * For more details, please refer to the PDF document or feel free to contact us.

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Model number overview
WEX-SS Dimensions 70×32×42mm Operating temperature 250℃ Rated flow 5L/min Rated capacity 140W Temperature sensor K thermocouple with thermostat Weight 280g
WEX-UL-S2-S (UL compliant) Dimensions 98×75×75mm Operating temperature 200℃ Rated flow 10L/min Rated capacity 130W Temperature sensor K thermocouple with thermostat Weight 1000g UL499 compliant File No E478998
WEX-S*-2※ Dimensions 75×75×98mm Maximum operating temperature 200℃ Rated flow 10L/min Rated capacity 130W Standard accessories Thermo and power connector K thermocouple Mounting bracket Weight 1000g *Power 1: AC100V 2: AC200V ※Fitting specification U: Standard fitting N: No fitting Unmarked: Special specification
WEX-S*-3-※ Dimensions 96×102×128mm Maximum operating temperature 300℃ Rated flow 10L/min Rated capacity 190W Standard accessories Mounting bracket Exterior perforated metal Weight 1200g *Power 1: AC100V 2: AC200V ※Fitting specification U: Standard fitting N: No fitting Unmarked: Special specification
WEX-M*-2※ Dimensions 125.5×100×115 Maximum operating temperature 200℃ Rated flow 50L/min Rated capacity 400W Standard accessories Thermo and power connector K thermocouple Mounting bracket Weight 2000g *Power 1: AC100V 2: AC200V ※Fitting specification U: Standard fitting N: No fitting Unmarked: Special specification
WEX-M*-3※ Dimensions 155.5×130×145mm Maximum operating temperature 300℃ Rated flow 50L/min Rated capacity 560W Standard accessories Mounting bracket Exterior perforated metal Weight 2300g *Power 1: AC100V 2: AC200V ※Fitting specification U: Standard fitting N: No fitting Unmarked: Special specification
WEX-L*-3※ Dimensions 178×150×165mm Maximum operating temperature 300℃ Rated flow 100L/min Rated capacity 1300W Standard accessories Thermo connector Power connector K thermocouple connector Mounting bracket Weight 4000g *Power 1: AC100V 2: AC200V ※Fitting specification U: Standard fitting N: No fitting Unmarked: Special specification

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Our company (formerly known as Keihin Sokkiki Co., Ltd.) was reborn as Watty, Inc. on January 1, 2007, marking our 40th anniversary. The company name combines "watt," a familiar unit of power associated with our main manufacturing division, the Thermal Systems Division (which develops, manufactures, and sells heater units used primarily in semiconductor and FPD manufacturing equipment and various precision instruments), and "water," representing the liquid typically sensed by our other main division, the Sensor Division (which focuses on the development, manufacturing, and sales of liquid level sensors). Thus, we chose the name Watty to reflect these two pillars.

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The related categories of Other semiconductor manufacturing equipment

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