[Process Analysis Instrument Technical Documentation] Online Analysis of TMAH in Developer Solution
Process analyzer
For the semiconductor industry! Process analyzer / Online analyzer for monitoring tetramethylammonium hydroxide (TMAH) in developer solutions!
Tetra-methylammonium hydroxide (TMAH) is a quaternary ammonium salt primarily used in the manufacturing of integrated circuits (ICs), printed circuit boards (PCBs), and flat panel displays (LCDs), and it is most commonly used in the photolithography process during the production of these devices. In this process, a photoresist developer is used to transfer patterns onto a substrate. The chemicals used in the semiconductor industry must be extremely pure because even trace amounts of contaminants can adversely affect electrical properties. The development process is a critical stage in photolithography, and it must be optimized to increase production efficiency. This process application note introduces a method for monitoring the concentration of TMAH in the developer solution through online process titration.
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Company information
Metrom AG, based in Herisau, Switzerland, is a leading company specializing in ion analysis with over 70 years of history. It provides products and services in more than 140 countries worldwide. Based on Swiss technology developed over many years, the equipment comes with a 3-year warranty.