Years of experience and accumulated processing know-how! Over 1,300 units delivered for compound semiconductor processing.
The "plasma processing equipment" is a plasma etching and deposition device for optical compound semiconductors. It is capable of providing systems suitable for various stages from research and development to mass production. Additionally, it is designed to handle a wide range of materials necessary for the manufacturing of optoelectronic devices. Please feel free to contact us when needed. 【Applications】 VCSEL, LED, μLED, Micro Lens, Wave Guide 【Etching】 Sapphire, GaN, GaAs, Si3N4, SiO2, etc. 【Deposition】 nSiO2, Si3N4, a-Si, SiC, etc. *You can download the English version of the catalog. *For more details, please refer to the PDF materials or feel free to contact us.
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*You can download the English version of the catalog. *For more details, please refer to the PDF document or feel free to contact us.
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*You can download the English version of the catalog. *For more details, please refer to the PDF document or feel free to contact us.
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Our company offers etching, film deposition, and cutting equipment utilizing plasma technology, as well as the sale of ICP, RIE, DSE, IBE, IBD, PECVD, HDPCVD, and HDRF F.A.S.T.-ALD equipment, along with customer service related to these devices. Plasma-Therm LLC, headquartered in Florida, USA, was established in 1974. Since its founding, it has been manufacturing and selling semiconductor manufacturing equipment utilizing plasma technology for 48 years. Please feel free to contact us for inquiries. ▼ Group company Corial official website https://corial.plasmatherm.com/en