Top-class throughput! Flexible modular design.
The "Firebird" is a thermal ALD device of the cluster tool type for large-scale mass production. It is equipped with Veeco's proven automation system, ensuring batch transport with minimal impact on the substrates. Please feel free to consult us when you need assistance. 【Features】 ■ Top-class throughput ■ Low ownership cost ■ Proven Veeco automation system ■ Flexible modular design ■ Batch transport with minimal impact on substrates ■ Veeco's global sales, service, and support *For more details, please refer to the PDF document or feel free to contact us.
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