The ideal small sputtering device for research and prototyping: 'VS-R400G'
VS-R400G
Ideal for experiments, research, evaluation, and prototype production! Achieving high-speed, high-precision, low-damage vacuum deposition on flat substrates such as glass and metal!
The "VS-R400G" is a sputtering device that adopts a unique LIA (Low Inductance Antenna) plasma source, achieving ultra-fast and high-quality vacuum deposition. Thanks to the assist effect of the LIA method's inductively coupled plasma (LIA-ICP), it reduces damage without lowering the deposition speed, resulting in high-quality film formation. Additionally, it can also accommodate reactive sputtering by leveraging the characteristics of high-density plasma. 【Features】 ■ A sputtering device suitable for experiments, research, evaluation, and prototyping ■ Reduces damage without lowering deposition speed, achieving high-quality film formation ■ Capable of reactive sputtering by utilizing the characteristics of high-density plasma ■ Enables faster deposition speeds by incorporating a rotary cathode ■ Easy to expand into production machines *For more details, please refer to the related links or feel free to contact us.
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basic information
■Target substrates: Flat plates such as glass plates and metal plates 【Specifications (partial)】 - Target films: ITO, alumina, compounds, various metal films - Film formation methods: Deposition down, inline film formation *For more details, please refer to the related links or feel free to contact us.
Applications/Examples of results
【Applications】 ■Functional film ■Surface modification ■Surface treatment ■Modification ■Nitriding ■Oxidation ■Passivation *For more details, please refer to the related links or feel free to contact us.
Line up（1）
| Model number | overview |
|---|---|
| VS-R400G | ・Target substrates: flat plates such as glass plates and metal plates |
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Company information
The SCREEN Group has celebrated its 80th anniversary. Since its establishment in 1943, we have received tremendous support from all of you, and on October 11, 2023, the SCREEN Group marked its 80th anniversary. We sincerely thank you. With the spirit of continuing to challenge creativity and development, we will continue to evolve.