Sulfur compound compatibility available. Dedicated film deposition device for research on thin-film solid-state batteries. Comprehensive support from target to film deposition testing, including dedicated equipment. Standard glove box included.
Dedicated sputtering equipment for research on thin-film solid-state secondary batteries. Post-processing is possible. It allows for the simultaneous formation of the anode, electrolyte, and cathode using a multi-component cathode, as well as sealing the substrate to prevent exposure to the atmosphere after film formation. Pre-film tests using a dedicated Li target are also available (for a fee). Comprehensive support for materials (targets), soft (film formation tests), and hard (dedicated equipment). Sulfide targets and dedicated glove boxes can also be equipped, achieving both versatility and individual customization.
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basic information
Customized standard sputtering device equipped with a 3-inch cathode and three targets. Comes standard with a dedicated target and glove box. Targets such as Li-based composite oxides and sulfides are also supplied, with paid support for film deposition testing. Follows the basic specifications of a sputtering device with a wealth of research and development experience, capable of depositing films over large areas (φ180) using small-diameter targets. Standard features include a substrate heating heater and substrate water cooling mechanism, enabling a wide range of deposition conditions. Offers a variety of options such as ferromagnetic cathodes, simultaneous sputtering, and load-lock mechanisms to meet diverse requirements for hard materials.
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Applications/Examples of results
Research and development of thin-film solid secondary batteries Research and development of compound semiconductors Research and development of photosensitive materials and optical devices Film formation of low melting point materials
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Company information
Shinko Seiki, as a technology-driven manufacturer, leverages the numerous know-how accumulated particularly in the field of vacuum equipment to deliver innovative products that meet user needs. In recent years, the company has also been challenging cutting-edge fields such as electronics and new materials, aiming to develop truly valuable hardware and software through the advancement of distinctive technologies and their organic integration.
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