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  4. Semiconductor Manufacturing Equipment
  5. Sputtering Equipment
  6. Next-generation substrate conductor layer formation "PVD device" - World first! Direct copper deposition.

Next-generation substrate conductor layer formation "PVD device" - World first! Direct copper deposition.

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New Generation PVD Equipment

last updated:Apr 02, 2025

サーマプレシジョン
サーマプレシジョン
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Using sputtering technology in a medium vacuum environment, we have developed the world's first plating seed layer formation technology through direct copper deposition! Achieving productivity beyond conventional levels!

【Features】 ■ Achieves high productivity equivalent to or greater than conventional methods such as electroless plating through a vacuum process. ■ Enables high-density plasma modification treatment using a new plasma source. ■ Allows for a high-adhesion process through direct copper sputtering onto organic insulators and glass. ■ Realizes film formation on high aspect ratio TH and BVH, which is considered difficult with conventional sputtering. ■ Offers overwhelming cost competitiveness in equipment compared to traditional sputtering devices. 【Adhesion Strength (Peel Strength)】 Non-alkali glass: ~10 Quartz: ~7 Epoxy resin: ~6 Polyimide: ~12

    Sputtering Equipment
PVD装置.jpg

Next-generation substrate conductor layer formation "PVD device" - World first! Direct copper deposition.

PVD装置.jpg
PVD装置.jpg PVD装置  .jpg
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High adhesion properties can be obtained through direct copper deposition on organic insulating materials and glass.

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TGV film formation Circuit formation

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PVD equipment for forming conductor layers for next-generation substrates

PVD equipment for forming conductor layers for next-generation substrates

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Starting with printed circuit boards, we provide cutting-edge technology to electronic component manufacturers in Japan through the sale of manufacturing equipment for major electronic components such as semiconductors, LCDs, and PDPs, as well as inspection and analysis equipment. Although we operate as a trading company, we leverage our many years of experience in resist coating as a "trading company that can speak about technology" to offer optimal solutions to various customers, and we will continue to contribute to the Japanese electronic component industry.

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