ALD equipment for research and development that grows together.
The "Beneq TFS 200" is a highly flexible ALD research platform suitable for academic research and corporate R&D. It is specially designed to minimize cross-contamination that can occur in multi-user research environments. Additionally, it provides technological solutions that enable high-quality film deposition on wafers, flat objects, particles, porous bulk materials, and complex three-dimensional objects characterized by very high aspect ratios. 【Products Offered (Partial)】 ■ 3D and batch production ■ Research equipment ■ Semiconductor devices ■ Spatial ALD devices *For more details, please download the PDF or feel free to contact us.
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We are a provider of ALD equipment headquartered in Finland. Our mission is to develop high-quality tools for production and research applications, and to create significant technological trends through industrial ALD solutions. Our products are designed to minimize cross-contamination in multi-user research environments. We offer various options and upgrades to meet the most stringent research requirements.