Extremely low Rc system design in the industry and the highest level of inter-wafer reproducibility!
"HEXAGON" is a mass production dedicated wafer-level packaging platform that provides atmospheric degassing, etching, and metal deposition at a very low cost of ownership for applications such as FOWLP. High-speed wafer processing is made possible by wafer transport using a synchronous indexer. With wafer handling, during 24/7 production, the wafer sensing function within the chamber allows for accurate and reproducible positioning, enabling full-face etching and deposition processes. 【Features】 - Processing of wafers passivated with organic films that degas in large quantities - High-performance dual-end effectors achieving short wafer exchange times Atmospheric front-end module using robots - Wafer transport via synchronous indexer enabling high-speed wafer processing - Over 20,000 etching shield kit lifespan due to enhanced uptime and reduced maintenance *For more details, please refer to the related links or feel free to contact us.
Inquire About This Product
basic information
【Other Features】 ■ Compact footprint (excluding control rack) ■ Up to 5 process chambers can be installed for etching, cooling, or film deposition applications ■ Atmospheric batch degassing module ■ Bridging function from 200mm to 300mm through simple conversion *For more details, please refer to the related links or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the related links or feel free to contact us.
Detailed information
-
HEXAGON
catalog（1）
Download All Catalogs
Company information
Evatec's technology has been utilized worldwide for 70 years since the establishment of Balzers AG in 1946. Now, Evatec's thin film manufacturing technology is revolutionizing our lives and ways of working. The Internet of Things (IoT) offers the potential to connect 7 trillion devices for a global population of 7 billion people, and Evatec's thin film manufacturing technology makes this possible. Semiconductor devices manufactured with Evatec's equipment enable millions of people around the world to connect through high-speed wireless networks, changing the way we work due to the evolution of AI. Additionally, autonomous driving made possible by AI semiconductors and high-precision sensing is transforming lifestyles, while power semiconductors allow various devices to operate with less power, addressing energy issues. We provide cutting-edge solutions for thin film manufacturing with high-performance electrical and optical properties, ranging from high-frequency filters essential for wireless communication, high-brightness LEDs for automotive and lighting applications, AI and optoelectronic integrated semiconductors for highly integrated data centers, to touch panels for mobile phones.