Small Halogen-Compatible Furnace | High-Temperature Process Evaluation Using F-Series and Cl-Series Gases

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last updated：Jun 05, 2026

サーモニックENG

Suppressing concerns about degradation and leaks of furnace materials due to corrosive gases, safely examining halogen atmosphere testing.

In high-temperature processes involving halogen gases (such as F and Cl series), common electric furnaces may face issues with corrosion and degradation of heaters, furnace materials, piping, and sealing materials. Particularly in surface treatment, etching, cleaning, and reaction evaluation using fluorine or chlorine gases, it is crucial to design equipment that includes corrosion resistance of furnace materials, exhaust and emission control, and gas leakage prevention. Our small halogen-compatible furnace is a test furnace designed to examine high-temperature processing using corrosive gases on a small scale. We can consider configurations tailored to applications, including corrosion-resistant materials, scrubber integration, interlocks, and safety equipment. **Features** - Compatible with halogen gas atmospheres such as F and Cl series - Consideration of furnace materials, piping, and sealing configurations for corrosive gases - Integration with scrubbers, gas detection, and emergency shutdown systems is possible - Pre-evaluation of temperature, gas concentration, and processing time in a small furnace - Support for process feasibility confirmation before mass production furnace introduction *For more details, please download the materials or contact us.*

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basic information

【Capabilities】 ■ High-temperature treatment using halogen gases such as F and Cl ■ Material reaction evaluation in corrosive gas atmospheres ■ Examination of surface treatment, etching, cleaning, and film removal conditions ■ Corrosion evaluation of furnace materials, fixtures, and samples using halogen gases ■ Confirmation of small-scale conditions before mass production processes 【Key Points of Equipment Configuration】 ■ Selection of furnace body, piping, and gas connection materials considering corrosion resistance ■ Corrosion and leak prevention measures for gaskets, sealing materials, and joint sections ■ Integration with exhaust lines, scrubbers, and detoxification devices ■ Safety design through gas detection, emergency shutdown, and interlocks ■ Custom design according to treatment temperature, gas type, concentration, and flow rate *Specifications will be proposed based on gas type, temperature, pressure, treatment volume, and detoxification conditions.

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Applications/Examples of results

【Applications】 ■ High-temperature reaction tests using F-type gases and Cl-type gases ■ Surface treatment, etching, and cleaning evaluation for semiconductor and electronic materials ■ Corrosion and reaction evaluation of ceramics, quartz, SiC, AlN, and carbon materials ■ Evaluation of halogen resistance for fixtures, furnace internal materials, and coating materials ■ Film removal, metal stripping, and surface modification in a halogen atmosphere ■ Small-scale testing and condition screening before introducing mass production equipment 【For such challenges】 ■ Concerned about corrosion of heaters and furnace materials by halogen gases ■ Worried about leaks from gaskets and piping, safety issues ■ Existing furnaces cannot handle F-type and Cl-type gases ■ Want to confirm the corrosiveness of samples and fixtures on a small scale ■ Want to consider including scrubbers and exhaust treatment equipment ■ Want to test reaction and safety conditions before mass production furnaces Even at a stage where materials, gas types, processing temperatures, concentrations, flow rates, and exhaust conditions are not yet determined, you can consult us according to your application.