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  6. Sonia Corporation's ultrasonic spray nozzle for semiconductor film deposition.

Sonia Corporation's ultrasonic spray nozzle for semiconductor film deposition.

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last updated:Aug 03, 2026

ティックコーポレーション 本社
ティックコーポレーション 本社
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Spraying fine particles without pressure! Improving the quality and efficiency of the film formation process!

In the film formation process of semiconductor manufacturing, uniform film thickness and high-quality film formation are required. Particularly in the formation of fine patterns, the particle size of the coating solution and the application accuracy significantly affect product performance. Coating irregularities and contamination can lead to reduced yield and product defects. The ultrasonic spray nozzle from Sonia generates fine particles through the vibration of piezoelectric ceramics, achieving uniform application. It does not require pressurization, suppresses splatter and liquid rebound, and reduces waste of the coating solution. It also contributes to reducing capital investment and running costs. 【Usage Scenarios】 - Application of chemical solutions to wafers - Thin film formation - Photoresist application 【Effects of Implementation】 - Achievement of uniform film thickness - Reduction of waste in coating solution - Improvement of yield - Reduction of capital investment and running costs

    Ultrasonic Oscillatornozzlevalve
_AJC0338.jpg

Sonia Corporation's ultrasonic spray nozzle for semiconductor film deposition.

_AJC0338.jpg
_AJC0338.jpg
  • Sonia Corporation Ultrasonic Spray Nozzle HP
  • Special site - Product/service details - https://pr.mono.ipros.com/ticjapan/product/

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basic information

【Features】 - Concentrated spraying of micron-level droplets on small parts (Precision Atomizer Nozzle) - High-precision spraying in a narrow area, ideal for thin film formation (Narrow Spray Nozzle) - Capable of uniform spraying over a wide area (Wide Spray Nozzle) - Supports spraying in recessed areas (Extended Wide Spray Nozzle) - Usable in environments up to 600℃ (High-Temperature Compatible Nozzle) 【Our Strengths】 Tick Corporation focuses on providing products that contribute to solving customer challenges. We handle a variety of energy-saving products, including ultrasonic spray nozzles, to support our customers' productivity improvement.

Price information

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Delivery Time

P4

Applications/Examples of results

Ultrasonic spray nozzles cater to a variety of industrial applications that require precise spray coating. The nozzles are integrated into automated spray systems, enabling the formation of fine and uniform films. Notably, they are characterized by minimal overspray (waste dispersion) and a very narrow particle size distribution. Main application areas: Medical and Bio-related • Coating of medical stents • Coating of balloon catheters • Interior treatment of blood collection tubes • Application of proteins, enzymes, and reagents to diagnostic equipment • Spray drying of pharmaceuticals • Spray application of hydrogels • Spray freeze-drying Clean and Sterilization Applications • Disinfection and sterilization of indoor spaces • Coating of substrates • Spray processing in high-temperature environments Energy and Electronic Materials • Coating of solar cells • Application of fuel cell components • Spraying of graphene and carbon nanotubes • Application of photoresist • Aerosol-assisted CVD (Chemical Vapor Deposition) Precision Processing and Material Development • Fine etching of glass • Production of microbeads • Microencapsulation • Bioprinting

catalog(19)

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Sonaer ultrasonic spray nozzle manufactured by Sonia Corporation

Sonaer ultrasonic spray nozzle manufactured by Sonia Corporation

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Sonaer Particle Generator manufactured by Sonia Corporation

Sonaer Particle Generator manufactured by Sonia Corporation

PRODUCT
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[Sonaer] (Example) Sonia Corporation's ultrasonic spray nozzle for thin film coating inside blood collection tubes and Bayer bottles.

[Sonaer] (Example) Sonia Corporation's ultrasonic spray nozzle for thin film coating inside blood collection tubes and Bayer bottles.

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[Sonaer] (Case Study) Sonia Corporation's ultrasonic spray nozzle - Prevention of overspray and cost reduction through changes in lubricant application.

[Sonaer] (Case Study) Sonia Corporation's ultrasonic spray nozzle - Prevention of overspray and cost reduction through changes in lubricant application.

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Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for stent thin film coating.

Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for stent thin film coating.

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Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for freeze-drying.

Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for freeze-drying.

TECHNICAL
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Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for photoresist coating.

Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for photoresist coating.

TECHNICAL
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Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for fuel cells

Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for fuel cells

TECHNICAL
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Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for small spherical shaping.

Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for small spherical shaping.

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Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for fragrance application.

Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for fragrance application.

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[Sonaer] (Case Study) Sonia Corporation's ultrasonic spray nozzle - Improvement of flux application

[Sonaer] (Case Study) Sonia Corporation's ultrasonic spray nozzle - Improvement of flux application

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Lechler Sonosys (Case Study) Spray Nozzles and Ultrasonic Spray Nozzles for Semiconductor Equipment

Lechler Sonosys (Case Study) Spray Nozzles and Ultrasonic Spray Nozzles for Semiconductor Equipment

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Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for applying to non-woven fabric.

Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for applying to non-woven fabric.

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[Sonosys] Sonosys Company Overview (Ultrasonic Cleaning Equipment) (Revised 2021)

[Sonosys] Sonosys Company Overview (Ultrasonic Cleaning Equipment) (Revised 2021)

CATALOG
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[Sonosys] (Case Study) Ultrasonic Spray Nozzle Improvement of Non-Woven Fabric Coating Line

[Sonosys] (Case Study) Ultrasonic Spray Nozzle Improvement of Non-Woven Fabric Coating Line

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Sonosys Ultrasonic Cleaning Device

Sonosys Ultrasonic Cleaning Device

COMPANY
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Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for micro-etching glass.

Sonaer (Example) Sonia Corporation's ultrasonic spray nozzle for micro-etching glass.

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Sonosys Company Overview (Ultrasonic Cleaning Equipment)

Sonosys Company Overview (Ultrasonic Cleaning Equipment)

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Ultrasonic cleaning spray

Ultrasonic cleaning spray

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CAD data(4)

Model number overview File
WS40K We have published a 3D drawing of the WS40K. This drawing allows for a three-dimensional confirmation of the dimensions of the nozzle body, the mounting structure, and the shape of the spraying section, which is useful for equipment design and layout considerations. The WS40K is a high-performance spray nozzle that can atomize liquids into fine and uniform mist using ultrasonic technology, and it is utilized in a wide range of industrial fields such as precision coating, surface treatment, humidification, and cleaning processes. Please use it as a reference material during the design and implementation considerations.
  • 3D stp ( 105KB)
WS130K We have published the 3D drawing of the WS130K. This drawing allows for a three-dimensional confirmation of the dimensions of the nozzle body, the mounting structure, and the shape of the spraying section, which is useful for equipment design and layout considerations. The WS130K is a high-performance spray nozzle that can atomize liquids into fine and uniform mist using ultrasonic technology, and it is utilized in a wide range of industrial fields such as precision coating, surface treatment, humidification, and cleaning processes. Please use it as a reference material during the design and implementation considerations.
  • 3D stp ( 100KB)
WS40K We have published a 3D drawing of the WS40K. This drawing allows for a three-dimensional confirmation of the dimensions of the nozzle body, the mounting structure, and the shape of the spraying section, which is useful for equipment design and layout considerations. The WS40K is a high-performance spray nozzle that can atomize liquids into fine and uniform mist using ultrasonic technology, and it is utilized in a wide range of industrial fields such as precision coating, surface treatment, humidification, and cleaning processes. Please use it as a reference material during design and implementation considerations.
  • 3D stp ( 105KB)
WS130K We have published a 3D drawing of the WS130K. This drawing allows for a three-dimensional confirmation of the dimensions of the nozzle body, the mounting structure, and the shape of the spraying section, which is useful for equipment design and layout considerations. The WS130K is a high-performance spray nozzle that can atomize liquids into fine and uniform mist using ultrasonic technology, and it is utilized in a wide range of industrial fields such as precision coating, surface treatment, humidification, and cleaning processes. Please use it as a reference material during the design and implementation considerations.
  • 3D stp ( 100KB)

News about this product(2)

Start of distribution of 3D CAD data for Sonia Corporation's ultrasonic spray nozzle.

  • Product news

We have started distributing 3D CAD data for the Sonia ultrasonic spray nozzles. Designers and equipment manufacturers can efficiently proceed with equipment design and layout considerations by confirming product shapes and mounting dimensions in advance. This time, we have also released the 3D CAD data for the ultrasonic spray nozzles "WS40K" and "WS130K," which can be used for interference checks and design simulations before implementation. Sonia's ultrasonic spray nozzles cater to a wide range of applications, including precision coating, surface treatment, humidification, and cleaning. By providing 3D CAD data, we support the reduction of design man-hours and the shortening of development periods, facilitating a smooth process from product selection to equipment development.

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Our product catalog is now available on Apelza.

  • Catalog news

The catalog for the air nozzles manufactured by Lehira (commonly known as multi-channel jets), ultrasonic spray nozzles by Sonia, blowers, and air knife systems by Sonic has been released.

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Companynews list (354)

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ティックコーポレーション

ティックコーポレーション 本社

Machine elements and parts

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Tick Corporation is committed to providing products that contribute to solving various issues faced by companies, such as improving production efficiency, enhancing cost efficiency, improving quality, and considering environmental conservation. We have been widely collecting product information from around the world and providing products that meet market needs. In the future, we will continue to develop and deliver products that contribute to rationalization and particularly to environmental conservation, which has become increasingly stringent in recent years. ◇◆Main Products◇◆ - Precision industrial spray nozzles - Agricultural spray nozzles - Air nozzles / Air knives - Special spray nozzles - Tank cleaning nozzles - Blowers - Ultrasonic spray nozzles (Nebulizers / Atomizers) - Ultrasonic cleaning devices - Air conveying devices - Ventilators - Plastic connectors - Cutting torches (nozzles for gas cutters) - Latex testers - In-house manufactured tubing pumps (dispensers) - Syringe pumps

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