Drug delivery device

Equipped with a built-in control panel! Direct supply from chemical manufacturers' concentrated liquid tanks or CCSS is possible.

The "Chemical Supply Device" is an automatic mixing and supply device for HF. The supply of each chemical to the device can be done directly from the manufacturer's concentrated solution tanks or from CCSS. The supplied chemical solution is transferred to a weighing tank via a pump, where it is automatically mixed with pure water in a specified ratio. Additionally, the mixed HF is stored in a supply tank and is automatically supplied to the use point upon receiving a supply request signal. 【Main Specifications】 ■ Main Frame: Lightweight steel welded assembly, integrated structure with baked paint finish ■ Exterior Color: Ivory White ■ Exterior Coating: PVC ■ Structure: Main body draft structure, front, back, and PVC transparent panels ■ Supplied Chemical: HF (with clean air supply function for storage area) ■ Control Unit: Built-in control panel for the device ■ Supply Tank Main Frame ・SUS welded assembly, two-part structure + corrosion-resistant resin coating in ivory white *For more details, please refer to the PDF document or feel free to contact us.

Other semiconductor manufacturing equipment