For cleaning various masks, glass, and after wafer polishing! It can open and close the nozzle 30 times per second, delivering repeated impacts with a small amount of water.
A cleaning nozzle unit that requires less water and is less likely to form a water film, which can also be retrofitted to existing equipment. A cleaning nozzle that operates at a maximum of 30Hz. A pump that generates high-pressure water of 5 to 10 MPa. A combination of control units. Conventional continuous spraying applies pressure over a self-created water film, which tends to increase cleaning power = increase pressure = increase flow rate, resulting in a thicker water film. However, the DP-Gun uses intermittent spraying, which means that even at the same pressure (impact), the flow rate is lower, making it less likely to form a water film, and the sprayed water directly impacts the target object. By repeatedly applying intermittent spray impacts, it demonstrates excellent cleaning effects for removing foreign substances from the items being cleaned, cleaning masks, and cleaning three-dimensional objects such as cassettes (with narrow grooves and complex shapes). The pump unit achieves stable water pressure control with minimal waste water during pressure adjustment by performing feedback control that matches flow rate changes due to nozzle opening and closing. *Please consult us regarding spraying a fixed amount of liquid and spray application measurements. *Nozzles and pumps require regular maintenance.
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basic information
【Reference Specifications】 ■DP-Gun 1 unit ・ Main unit ・ Nozzle tip standard cleaning width approximately 110mm or approximately 65mm *1 ■Pump Unit 1 set ・ Pump *1 ・ Control unit (built-in driver for 2 DP-Guns) ・ Operation panel ・ External control compatible (start, stop, alarm output, etc.) ■Settings 1. Pressure (supply pressure 2–10MPa) 2. Frequency (spray frequency 5–30Hz) 3. Pulse width (spray open time 5–15ms) *1 The shape of the nozzle tip and pump capacity will be discussed separately based on the purpose of cleaning, required flow rate, and the number of DP-Guns installed. ■Others We can propose solutions according to your needs, including DP-Gun mounting brackets, cleaning tanks, moving stages, drying with spin or air knives, and integration with other cleaning methods (ultrasonic, chemical, etc.). * The photo shows an image of multiple DP-Guns connected and our demo unit (with mounting bracket and simple cleaning tank).
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Applications/Examples of results
【Applications】 ■ Cleaning various masks - Used as a roller conveyor system - Standalone use (handgun method) ■ Cleaning chip trays - High-pressure pulse jet → US cleaning → Oven drying ■ Cleaning system using roller conveyance for seed glass - Brush → High-pressure pulse jet → Rinse → Air knife drying ■ Cleaning of three-dimensional objects such as wafer cassettes, carriers, carrier cassettes, and chip trays - Cleaning inner and outer surfaces in combination with a multi-joint robot (automating manual work) ■ Strengthening the cleaning power of existing lines - Addition to part of the cleaning tank of existing cleaning equipment - Replacement of existing cleaning equipment's two-fluid spray
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This brand name was chosen to signify the creation of highly unique products with the aim of "EXTENSIVE VISION ON SYSTEM." Current technological innovations are remarkable, and the demands of the times are constantly becoming more advanced. We believe that it is our mission at Zebios to contribute to the industry by consistently proposing differentiated equipment that will revolutionize the now-mature equipment industry.
