Prevent defects from wafer scratches! High-purity PFA coating for CMP equipment.
Fluororesin coating
【Scratch and Contamination Measures】Excellent non-stick properties suppress adhesion caused by slurry drying! Contributes to improved yield with high corrosion resistance and high purity coatings.
In the CMP (Chemical Mechanical Polishing) process of semiconductor manufacturing, major factors causing a decrease in wafer yield are "scratches due to the detachment of adhered slurry" and "ion contamination (metal contamination) caused by chemical corrosion." ■ Scratch Issues from Adhered Slurry When slurry that has splattered onto equipment parts dries and adheres, it can become trapped in the polishing surface and damage the delicate wafer surface. ■ Contamination from Chemical Corrosion Corrosion of the substrate by strong acids and strong alkalis can be a source of contaminating impurities that destroy circuit characteristics. ■ Preventing Slurry Adhesion and Improving Component Corrosion Resistance Our "Fluoropolymer PFA Coating" is a high-performance surface treatment solution that addresses these quality issues. With excellent "non-stick and water-repellent" properties, it prevents the adhesion of high-viscosity slurry. Even if it dries, it does not adhere and can be easily removed. Furthermore, it possesses high "chemical resistance and corrosion resistance" that is inert to chemicals, reducing the risk of metal leaching and ion contamination. The high purity and smooth coating also suppress particle generation, directly contributing to maximizing yield in the CMP process.
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basic information
【Functional Characteristics】 ■ Ultra non-stick and water-repellent Significantly reduces adhesion and drying fixation of sticky slurries. ■ Excellent chemical resistance and corrosion resistance Strongly protects the substrate even in environments with strong acids and strong alkaline solutions. ■ High purity and low dust generation Prevents the leaching of metal ions and suppresses wear particles. 【Target Substrates and Application Areas】 ■ Equipment head parts, surrounding covers, slurry supply and drainage flow path components, etc. ■ Various metal substrates such as aluminum and stainless steel (SUS). 【Coating and Support System】 ■ Treatment method: Fluoropolymer PFA baked coating. ■ Test construction: Capable of selecting PFA grades and prototype (test construction) in accordance with customer-specified chemical types and usage conditions.
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【Application】 ■ Liquid contact and splash areas of semiconductor manufacturing equipment (CMP equipment, cleaning equipment, etching equipment, etc.) ■ Chemical flow piping, piping fittings, corrosion-resistant covers, various head components 【Adoption Results and Implementation Effects】 ■ Issue: Scratches on wafers due to slurry adhesion and detachment on CMP equipment head parts, and the risk of metal contamination from chemical corrosion. ■ After implementation: The application of PFA coating to the head parts resulted in a nearly zero reduction in slurry drying adhesion. Problems related to slurry detachment were resolved, significantly decreasing the occurrence rate of wafer scratches. ■ Effect: The stabilization of the polishing process greatly improved product yield. The high-purity coating also eliminated the risk of metal ion contamination.
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Nikken Coating Industry Co., Ltd. has been a specialized manufacturer of functional coatings for contract processing, earning the trust of customers across various industries for 79 years since its founding. We leverage our processing technology to maximize the properties of fluororesins, such as non-stick, lubricity, and chemical resistance, providing high-performance coatings that directly address customer challenges, including "Thermo Pro Release" for thermal welding processes and "NonStick STC" for blades and precision molds. In recent years, in response to movements regarding regulations on fluorinated compounds (PFAS), "PEEK resin," which is gaining attention as a substitute for fluororesins, has become a focus. Nikken Coating Industry commercialized the world's first PEEK resin coating, "PEEKCOAT," in 1999. Based on the solid knowledge and know-how accumulated over more than 20 years, we are further intensifying our research and development efforts to explore the potential of next-generation PEEK coatings! We aim to be recognized as "the go-to for PEEK coatings" and will continue to lead the way. As "the best partner for functional coatings that builds trust through technology," Nikken Coating Industry will continue to contribute to the creation of high-quality, high-performance products.
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