For stages and transport applications of processing machines and inspection equipment.
A porous chuck is a type of suction tool that holds thin objects such as wafers and glass by utilizing a porous (permeable) surface structure and negative pressure. It is also referred to as "porous vacuum chuck" or "porous vacuum chuck," and is used as a stage for processing machines and inspection devices, as well as suction pads for transportation, becoming a standard tool in various manufacturing sites. At Creative Technology, we aim to provide a one-stop solution related to suction, not only limited to our core technology of "electrostatic chucks," but also engage in the development, manufacturing, and sales of porous chucks.
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basic information
Main Features of the Product 1) Uniform adsorption due to micron-sized pores Conventional vacuum chucks can cause deformation or leave marks on delicate objects due to localized suction forces. In contrast, porous chucks have micron-sized pores distributed across their surface, allowing for uniform adsorption and reducing issues related to object deformation or suction marks. 2) Can adsorb without fully covering the object Porous chucks have dense pores spread across their surface, making it difficult for air leaks to occur. Even if the object is slightly smaller than the porous chuck, the reduction in suction power can be minimized. We can also provide advice on the optimal usage methods while considering the properties of the object. 3) Usable in wet environments Designed to be usable even in processing operations that involve liquids or when the object is wet. 4) Custom design options available We can provide custom design and manufacturing tailored to your application. Feel free to consult us regarding shape, dimensions, thickness, type of object to be adsorbed, body materials, and more.
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Applications/Examples of results
Main Uses - For fixing plate-shaped objects during machining Surface grinding machines, rotary polishers, lapping machines, etc. - For fixing plate-shaped objects, films, etc. during various inspections Visual inspection devices, image inspection devices, two-dimensional measuring instruments, and three-dimensional measuring machines, etc. - For transporting plate-shaped objects, films, etc.
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In 1985, Creative Technology began with the development of processing technology for brittle materials, specifically fine ceramics. In the 1990s, it successfully developed electrostatic chucks for semiconductor manufacturing equipment, based on that processing technology. Furthermore, in the early 2000s, it established a regeneration business for electrostatic chucks, leveraging the development and manufacturing technology it had cultivated, and built connections with customers around the world. Now, we are evolving the technology used in the semiconductor industry into various forms and working on the development of high-value-added electrostatic adhesion application products. Creative Technology contributes to labor-saving and IoT initiatives in various fields through technology that connects objects. If you can provide samples, we also conduct adhesion tests at our company. Please feel free to consult with us.






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