New concept cableless electrostatic chuck
An electrostatic carrier is a tool that enables the adhesion of objects without cables, aiming to simplify and enhance the efficiency of the transport process. Typical electrostatic chucks adhere to objects when voltage is supplied and release them when the voltage is cut off, which means that the electrostatic chuck must always be connected to a power source during use. Therefore, there are cases where it is not suitable for applications such as long-distance transport, moving from atmospheric environments to vacuum chambers, or use in rotating mechanisms. On the other hand, the electrostatic carrier is a new adhesion method that applies the characteristics of electrostatic chucks. While it requires a connection to a power source during the detachment of objects, it does not need voltage supply to maintain adhesion, allowing it to be used disconnected from the power source. The electrostatic carrier contributes to the automation, efficiency, and reduction of running costs in processes that have previously relied on double-sided tape or clamping methods.
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basic information
Main Features 1) Utilizes conventional electrostatic chuck technology to enable cable-free adsorption transport. 2) Allows movement between atmospheric environment and vacuum chamber in an adsorbed state due to electrostatic adsorption that does not involve air movement. 3) Applicable to various materials, including fragile thin glass, wafers, metal foils, films, and paper.
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Applications/Examples of results
As a suction stage for the assembly and transport process, it is compatible without cables.
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Company information
In 1985, Creative Technology began with the development of processing technology for brittle materials, specifically fine ceramics. In the 1990s, it successfully developed electrostatic chucks for semiconductor manufacturing equipment, based on that processing technology. Furthermore, in the early 2000s, it established a regeneration business for electrostatic chucks, leveraging the development and manufacturing technology it had cultivated, and built connections with customers around the world. Now, we are evolving the technology used in the semiconductor industry into various forms and working on the development of high-value-added electrostatic adhesion application products. Creative Technology contributes to labor-saving and IoT initiatives in various fields through technology that connects objects. If you can provide samples, we also conduct adhesion tests at our company. Please feel free to consult with us.
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