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  3. Scientific and Physics Equipment
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  6. Infrared and heating technologies that contribute to the acceleration and energy efficiency of semiconductor manufacturing processes.

Infrared and heating technologies that contribute to the acceleration and energy efficiency of semiconductor manufacturing processes.

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last updated:Nov 02, 2026

ウシオ電機
ウシオ電機
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[Exhibition Participation] Achieving non-contact, short-time, and high-precision heating. Our unique lamp design and high controllability solve a wide range of heating process challenges.

This is a halogen lamp heater that achieves non-contact heating through infrared radiation, enabling short-time and high-precision heating. With excellent heating and cooling performance, and optimization of heating distribution through lamp shape and filament design, it is suitable for a wide range of heating processes, including semiconductor manufacturing equipment. It is lightweight and compact, making it easy to integrate into devices, and it supports precise heating with a temperature variation of ±5°C, as well as rapid heating of aluminum to 300°C in about 10 seconds. 【Features】 ■ A highly efficient heat source that converts and radiates over 65% of the input power into infrared ■ Excellent heating and cooling performance that responds almost simultaneously with the ON/OFF switch ■ High controllability through optical control using lenses and mirrors ■ Flexible heating pattern adaptation by changing lamp shape and filament design ■ Non-contact heating prevents contamination of the target object and can be installed in various environments from the atmosphere to a vacuum *For more details, please contact us or download the catalog.

    Heating device
ランプヒータ.jpg

Infrared and heating technologies that contribute to the acceleration and energy efficiency of semiconductor manufacturing processes.

ランプヒータ.jpg
ランプヒータ.jpg image_14.png image_15.png image_16.png image_17.png
  • Related Link - https://www.ushio.co.jp/jp/feature/thermal/product…
  • Special site - Product/service details - https://pr.mono.ipros.com/ushio/product/

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【Exhibition Participation Information】 SEMICON Japan 2026 Dates: December 9 (Wed) - 11 (Fri), 2026, 10:00 AM - 5:00 PM Venue: Tokyo Big Sight Free admission (pre-registration required) *For more details, please refer to the related links or feel free to contact us.

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【Applications】 ■Automobiles ■Semiconductors ■Flat Panel Displays ■Solar Cells ■Resins ■Home Appliances and Others *For more details, please refer to the related links or feel free to contact us.

catalog(2)

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Light Heating Comprehensive Catalog

Light Heating Comprehensive Catalog

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Light Application Heating Device "Flash Lamp Annealing Device"

Light Application Heating Device "Flash Lamp Annealing Device"

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ウシオ電機

ウシオ電機

Industrial Electrical Equipment

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Heating, hardening, cleaning, modification, surface treatment, adhesion, exposure, lighting, treatment, measurement, testing... When it comes to "light," leave it to Ushio. From light sources to units and light devices, we propose the optimal "light" tailored to your goals and applications with our unique light technology (we also offer joint experiments, joint research, and lending of demo and experimental equipment).

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