Heating element for semiconductors

basic information

It is possible to provide solutions for almost all furnaces used in existing horizontal and vertical semiconductor manufacturing equipment. We also hold several patents related to heater design and can offer proposals for extending lifespan and achieving uniform heating. □■ Product Lineup ■□ ■ Heavy Gauge Heater (Thick Wire) This heater is mainly used in horizontal and vertical diffusion processes. With the adoption of our unique interlocking system and new material powder sintered heater (APM-HP), it is expected to have a long lifespan. ■ Medium Gauge Heater (Medium Thin Wire) / Light Gauge Heater (Thin Wire) The Romath heater ensures excellent temperature uniformity in the medium to low temperature range and has a high power density for rapid heating. ■ Rapid Heating and Cooling System (FastCool) This is a heater system that employs our proprietary forced air cooling system. It provides the optimal solution for reducing circulation time and solving QSS issues. ■ We can accommodate even small quantities. Please contact us for more details.

Price information

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Delivery Time

Applications/Examples of results

The electric heaters used in semiconductor manufacturing equipment (especially diffusion furnaces and various CVD furnaces) have already proven to be the most reliable and high-quality heaters in the world, with many achievements. They are already being adopted by device manufacturers and solar cell manufacturers worldwide. We also offer proposals for higher value-added heaters through our unique designs and ideas as a heater manufacturer for existing equipment.